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EP0680081
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EP About this file: EP0680081
| EP0680081 - Method of forming thin film and electronic device using thin film [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 03.11.2000 Database last updated on 19.10.2024 | Most recent event Tooltip | 03.11.2000 | Application deemed to be withdrawn | published on 20.12.2000 [2000/51] | Applicant(s) | For all designated states Hitachi, Ltd. 6, Kanda Surugadai 4-chome Chiyoda-ku Tokyo 101 / JP | [N/P] |
| Former [1995/44] | For all designated states HITACHI, LTD. 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 101 / JP | Inventor(s) | 01 /
Miwa, Takao 4829-46, Nakane Hitachinaka-shi, Ibaraki 312 / JP | 02 /
Matsuda, Minoru 16-18 Kuromatsu 1-chome, Izumi-ku Sendai-shi, Miyagi 981 / JP | 03 /
Watanabe, Akira 68-6-22, Kawauchikameoka, Aoba-ku Sendai-shi, Miyagi 980 / JP | [1995/44] | Representative(s) | Paget, Hugh Charles Edward, et al Mewburn Ellis LLP City Tower 40 Basinghall Street London EC2V 5DE / GB | [N/P] |
| Former [1995/44] | Paget, Hugh Charles Edward, et al MEWBURN ELLIS York House 23 Kingsway London WC2B 6HP / GB | Application number, filing date | 95302740.6 | 24.04.1995 | [1995/44] | Priority number, date | JP19940086196 | 25.04.1994 Original published format: JP 8619694 | [1995/44] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0680081 | Date: | 02.11.1995 | Language: | EN | [1995/44] | Type: | A3 Search report | No.: | EP0680081 | Date: | 04.03.1998 | [1998/10] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 20.01.1998 | Classification | IPC: | H01L21/428, H01L21/4757, H01L51/30, C08G77/60 | [1998/06] | CPC: |
H01L21/4846 (EP);
H01L21/31 (KR);
H01L21/02337 (US);
H01L21/02164 (EP,KR,US);
H01L21/02348 (US);
H01L21/481 (EP);
H01L23/49872 (EP);
H01L21/02126 (EP);
H01L21/02282 (EP);
H01L2924/0002 (EP)
(-)
| C-Set: |
H01L2924/0002, H01L2924/00 (EP)
|
| Former IPC [1995/44] | H01L21/428, H01L21/4757, H01L51/30 | Designated contracting states | DE, FR [1995/44] | Title | German: | Verfahren zur Bildung dünner Schichten und elektronischer Vorrichtung mit dünnen Schichten | [1995/44] | English: | Method of forming thin film and electronic device using thin film | [1995/44] | French: | Procédé pour former une couche mince et dispositif électronique utilisant la couche mince | [1995/44] | Examination procedure | 02.05.1995 | Examination requested [1995/44] | 21.02.2000 | Despatch of a communication from the examining division (Time limit: M04) | 04.07.2000 | Application deemed to be withdrawn, date of legal effect [2000/51] | 28.07.2000 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2000/51] | Fees paid | Renewal fee | 23.04.1997 | Renewal fee patent year 03 | 21.04.1998 | Renewal fee patent year 04 | 21.04.1999 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 30.04.2000 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]GB925722 (KOPPERS CO INC)[A] 1-14; | [A]JPH02202524 (NIPPON OILS & FATS CO LTD) [A] 1-14; | [AD]JPH03258834 (NIPPON TELEGRAPH & TELEPHONE) [AD] 1-14; | [A]JPH05247217 (SHONO TATSUYA, et al) [A] 1-14 | [AD] - WALLRAFF, G.M. et al., "Poly- silanes for microlithography. SPIE Advances in Resist Technology and Processing VIII", (1991), vol. 1466, pages 211 - 217 [AD] 1-14 |