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EP0709488
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EP About this file: EP0709488
| EP0709488 - Method and apparatus for thin film growth [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 02.08.2002 Database last updated on 16.07.2024 | Most recent event Tooltip | 02.08.2002 | Application deemed to be withdrawn | published on 18.09.2002 [2002/38] | Applicant(s) | For all designated states SHIN-ETSU HANDOTAI COMPANY LIMITED 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo / JP | [N/P] |
| Former [1996/18] | For all designated states SHIN-ETSU HANDOTAI COMPANY LIMITED 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo / JP | Inventor(s) | 01 /
Habuka, Hitoshi Asakura-cho, 1-35-4, Maehashi-shi Gunma-ken / JP | 02 /
Mayuzumi, Masanori Isobe, 3-12-37, Annaka-shi Gunma-ken / JP | 03 /
Katayama, Masatake Shimotyooka-cho, 179-7, Takasaki-shi Gunma-ken / JP | 04 /
Tate, Naoto 544 NW View Bay Camas WA 98607 / US | [1996/18] | Representative(s) | Cooper, John, et al Murgitroyd & Company Scotland House 165-169 Scotland Street Glasgow G5 8PL / GB | [N/P] |
| Former [1996/18] | Cooper, John, et al Murgitroyd & Company, Chartered Patent Agents, 373 Scotland Street Glasgow G5 8QA / GB | Application number, filing date | 95307596.7 | 25.10.1995 | [1996/18] | Priority number, date | JP19940284233 | 25.10.1994 Original published format: JP 28423394 | [1996/18] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0709488 | Date: | 01.05.1996 | Language: | EN | [1996/18] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 06.03.1996 | Classification | IPC: | C23C16/44, C30B25/10, C23C16/46 | [1996/18] | CPC: |
C23C16/481 (EP,US);
C23C16/0209 (EP,US);
C23C16/0236 (EP,US);
C23C16/4401 (EP,US);
C30B25/10 (EP,US)
| Designated contracting states | DE, FR, GB [1996/18] | Title | German: | Verfahren und Vorrichtung zum Wachstum einer dünnen Schicht | [1996/18] | English: | Method and apparatus for thin film growth | [1996/18] | French: | Procédé et appareillage de croissance d'une couche mince | [1996/18] | Examination procedure | 09.08.1996 | Examination requested [1996/41] | 03.06.1997 | Despatch of a communication from the examining division (Time limit: M06) | 03.12.1997 | Reply to a communication from the examining division | 28.06.1999 | Despatch of a communication from the examining division (Time limit: M04) | 29.10.1999 | Reply to a communication from the examining division | 26.09.2000 | Despatch of a communication from the examining division (Time limit: M04) | 27.12.2000 | Reply to a communication from the examining division | 01.08.2001 | Despatch of communication of intention to grant (Approval: Yes) | 29.11.2001 | Communication of intention to grant the patent | 12.03.2002 | Application deemed to be withdrawn, date of legal effect [2002/38] | 15.04.2002 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2002/38] | Fees paid | Renewal fee | 20.10.1997 | Renewal fee patent year 03 | 28.10.1998 | Renewal fee patent year 04 | 27.10.1999 | Renewal fee patent year 05 | 11.10.2000 | Renewal fee patent year 06 | 11.10.2001 | Renewal fee patent year 07 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XAY]US5097890 (NAKAO KEN [JP]) [X] 4 * column 3, line 60 - column 4, line 30 * * column 5, line 43 - column 7, line 20 * [A] 1-3,5,7 [Y] 6; | [XAY]US4728389 (LOGAR ROGER E [US]) [X] 5 * column 2, line 59 - column 3, line 16; table 1 * [A] 1-4,7 [Y] 6; | [A]EP0296804 (ASM EPITAXY [US]) [A] 1-7 * column 5, line 37 - column 6, line 34; figure 1 *; | [A]US4263336 (THOMPSON STEPHEN W, et al) [A] 7 * column 3, line 45 - column 4, line 2 * | by applicant | JPS572527 | JPS60110116 |