-
EP0733267
European procedure
Extract from the Register of European Patents
EP About this file: EP0733267
| EP0733267 - WAFER HEATING CHUCK WITH DUAL ZONE BACKPLANE HEATING AND SEGMENTED CLAMPING MEMBER [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 16.08.2002 Database last updated on 04.06.2024 | Most recent event Tooltip | 06.08.2004 | Lapse of the patent in a contracting state New state(s): LU | published on 22.09.2004 [2004/39] | Applicant(s) | For all designated states TOKYO ELECTRON LIMITED TBS Broadcast Center, 5-3-6 Akasaka Minato-ku Tokyo 107 / JP | [N/P] |
| Former [1998/51] | For all designated states Tokyo Electron Limited TBS Broadcast Center, 5-3-6 Akasaka Minato-ku, Tokyo 107 / JP | ||
| Former [1996/39] | For all designated states MATERIALS RESEARCH CORPORATION Route 303 Orangeburg New York 10962 / US | Inventor(s) | 01 /
JELINEK, Vaclav 87 Resorvoir Avenue River Edge, NJ 07661 / US | [1996/39] | Representative(s) | Findlay, Alice Rosemary, et al Marks & Clerk LLP 90 Long Acre London WC2E 9RA / GB | [N/P] |
| Former [1996/39] | Findlay, Alice Rosemary, et al Lloyd Wise, Tregear & Co., Commonwealth House, 1-19 New Oxford Street London WC1A 1LW / GB | Application number, filing date | 95904144.3 | 29.11.1994 | [1996/39] | WO1994US13615 | Priority number, date | US19940319884 | 07.10.1994 Original published format: US 319884 | [1996/39] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9611495 | Date: | 18.04.1996 | Language: | EN | [1996/17] | Type: | A1 Application with search report | No.: | EP0733267 | Date: | 25.09.1996 | Language: | EN | The application published by WIPO in one of the EPO official languages on 18.04.1996 takes the place of the publication of the European patent application. | [1996/39] | Type: | B1 Patent specification | No.: | EP0733267 | Date: | 10.10.2001 | Language: | EN | [2001/41] | Search report(s) | International search report - published on: | EP | 18.04.1996 | Classification | IPC: | H01L21/00 | [1996/39] | CPC: |
H01L21/67109 (EP,US);
H01L21/68785 (EP,US)
| Designated contracting states | BE, CH, DE, FR, GB, IT, LI, LU, NL, SE [1996/39] | Title | German: | HEIZUNGSSUBSTRATHALTER FÜR EINE HALBLEITERSCHEIBE MIT ZWEI-ZONEN RÜCKWANDHEIZUNG UND SEGMENTIERTEM KLEMMELEMENT | [1996/39] | English: | WAFER HEATING CHUCK WITH DUAL ZONE BACKPLANE HEATING AND SEGMENTED CLAMPING MEMBER | [1996/39] | French: | SUPPORT CHAUFFANT POUR UNE TRANCHE DE SILICIUM AVEC DEUX ZONES DE CHAUFFAGE POUR LA PLAQUE D'APPUI ET UN ELEMENT DE FIXATION SEGMENTE | [1996/39] | Entry into regional phase | 06.06.1996 | National basic fee paid | 06.06.1996 | Designation fee(s) paid | 06.06.1996 | Examination fee paid | Examination procedure | 06.06.1996 | Examination requested [1996/39] | 18.06.1998 | Despatch of a communication from the examining division (Time limit: M06) | 10.11.1998 | Reply to a communication from the examining division | 04.08.1999 | Despatch of a communication from the examining division (Time limit: M04) | 14.12.1999 | Reply to a communication from the examining division | 05.12.2000 | Despatch of communication of intention to grant (Approval: Yes) | 10.04.2001 | Communication of intention to grant the patent | 29.06.2001 | Fee for grant paid | 29.06.2001 | Fee for publishing/printing paid | Opposition(s) | 11.07.2002 | No opposition filed within time limit [2002/40] | Fees paid | Renewal fee | 28.10.1996 | Renewal fee patent year 03 | 29.10.1997 | Renewal fee patent year 04 | 19.03.1999 | Renewal fee patent year 05 | 04.11.1999 | Renewal fee patent year 06 | 03.11.2000 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 30.11.1998 | 05 M06 Fee paid on 19.03.1999 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | BE | 10.10.2001 | LU | 29.11.2001 | SE | 10.01.2002 | [2004/39] |
| Former [2003/06] | BE | 10.10.2001 | |
| SE | 10.01.2002 | ||
| Former [2002/26] | SE | 10.01.2002 | Cited in | International search | [A]EP0452779 (APPLIED MATERIALS INC [US]) [A] 1,13,16,20,21,23,25,26,29,33,41 * column 8, line 3 - column 8, line 37; figure 1 *; | [A]US5294778 (CARMAN JUSTICE [US], et al) [A] 1,16,20,23,25,29,33 * column 2, line 62 - column 3, line 33; figure 1 *; | [A]US5267607 (WADA YUICHI [JP]) [A] 1,13,16,21,23,26,29,33,41 * column 7, line 56 - column 8, line 51; figure 3 * |