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Extract from the Register of European Patents

EP About this file: EP0801814

EP0801814 - WET CHEMICAL TREATMENT INSTALLATION [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  05.07.2002
Database last updated on 24.04.2024
Most recent event   Tooltip05.09.2008Lapse of the patent in a contracting state
New state(s): FR		published on 08.10.2008  [2008/41]
Applicant(s)For all designated states
STEAG MICROTECH GMBH
Carl-Benz-Strasse 10
72124 Pliezhausen / DE
[N/P]
Former [1997/43]For all designated states
STEAG MicroTech GmbH
Carl-Benz-Strasse 10
72124 Pliezhausen / DE
Inventor(s)01 / DURST, Johann
Baumsatzstrasse 34
D-72124 Pliezhausen / DE
02 / SIGEL, Holger
Fischerstrasse 42
D-72124 Pliezhausen / DE
03 / SCHULZ, Werner
Abt-Johannes-Strasse 21
D-73434 Aalen / DE
[1997/43]
Representative(s)Wagner, Karl H., et al
Wagner & Geyer Partnerschaft mbB
Patent- und Rechtsanwälte
Gewürzmühlstrasse 5
80538 München / DE
[N/P]
Former [2008/33]Wagner, Karl H., et al
Wagner & Geyer Partnerschaft Patent- und Rechtsanwälte Gewürzmühlstrasse 5
80538 München / DE
Former [2000/48]Wagner, Karl H., Dipl.-Ing., et al
WAGNER & GEYER Patentanwälte Gewürzmühlstrasse 5
80538 München / DE
Application number, filing date95943224.629.12.1995
[1997/43]
WO1995EP05153
Priority number, dateDE1995100023905.01.1995         Original published format: DE 19500239
DE1995104699015.12.1995         Original published format: DE 19546990
[1997/43]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO9621241
Date:11.07.1996
Language:DE
[1996/31]
Type: A1 Application with search report 
No.:EP0801814
Date:22.10.1997
Language:DE
The application published by WIPO in one of the EPO official languages on 11.07.1996 takes the place of the publication of the European patent application.
[1997/43]
Type: B1 Patent specification 
No.:EP0801814
Date:29.08.2001
Language:DE
[2001/35]
Search report(s)International search report - published on:EP11.07.1996
ClassificationIPC:H01L21/00
[1997/43]
CPC:
H01L21/67017 (EP,US); H01L21/67781 (EP,US); Y10S118/02 (EP,US);
Y10S134/902 (EP,US); Y10S414/137 (EP,US); Y10S414/14 (EP,US);
Y10S414/141 (EP,US) (-)
Designated contracting statesAT,   BE,   CH,   DE,   DK,   ES,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   NL,   PT,   SE [1997/43]
TitleGerman:ANLAGE ZUR CHEMISCHEN NASSBEHANDLUNG[1997/43]
English:WET CHEMICAL TREATMENT INSTALLATION[1997/43]
French:INSTALLATION DE TRAITEMENT CHIMIQUE PAR VOIE HUMIDE[1997/43]
Entry into regional phase05.08.1997National basic fee paid 
05.08.1997Designation fee(s) paid 
05.08.1997Examination fee paid 
Examination procedure10.07.1996Request for preliminary examination filed
International Preliminary Examining Authority: EP
05.08.1997Examination requested  [1997/43]
10.12.1998Despatch of a communication from the examining division (Time limit: M04)
12.03.1999Reply to a communication from the examining division
16.11.2000Despatch of communication of intention to grant (Approval: Yes)
31.01.2001Communication of intention to grant the patent
17.03.2001Fee for grant paid
17.03.2001Fee for publishing/printing paid
Opposition(s)30.05.2002No opposition filed within time limit [2002/34]
Fees paidRenewal fee
02.01.1998Renewal fee patent year 03
04.01.1999Renewal fee patent year 04
05.01.2000Renewal fee patent year 05
02.01.2001Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipIE29.08.2001
DK29.11.2001
PT29.11.2001
SE29.11.2001
GR30.11.2001
LU29.12.2001
CH31.12.2001
FR31.12.2001
LI31.12.2001
ES28.02.2002
[2008/41]
Former [2006/24]IE29.08.2001
DK29.11.2001
PT29.11.2001
SE29.11.2001
GR30.11.2001
LU29.12.2001
CH31.12.2001
LI31.12.2001
ES28.02.2002
Former [2004/51]IE29.08.2001
DK29.11.2001
PT29.11.2001
SE29.11.2001
GR30.11.2001
LU29.12.2001
CH31.12.2001
LI31.12.2001
FR25.01.2002
ES28.02.2002
Former [2004/39]IE29.08.2001
DK29.11.2001
PT29.11.2001
SE29.11.2001
LU29.12.2001
CH31.12.2001
LI31.12.2001
FR25.01.2002
ES28.02.2002
Former [2004/04]IE29.08.2001
DK29.11.2001
PT29.11.2001
SE29.11.2001
CH31.12.2001
LI31.12.2001
FR25.01.2002
ES28.02.2002
Former [2003/46]IE29.08.2001
DK29.11.2001
PT29.11.2001
SE29.11.2001
CH31.12.2001
LI31.12.2001
FR25.01.2002
Former [2003/21]IE29.08.2001
PT29.11.2001
SE29.11.2001
CH31.12.2001
LI31.12.2001
FR25.01.2002
Former [2003/16]IE29.08.2001
PT29.11.2001
SE29.11.2001
CH31.12.2001
LI31.12.2001
Former [2002/48]IE29.08.2001
PT29.11.2001
SE29.11.2001
Former [2002/26]PT29.11.2001
SE29.11.2001
Former [2002/20]SE29.11.2001
Cited inInternational search[A]GB2178594  (MCCONNELL CHRISTOPHER FRANK) [A] 1,16 * page 3, line 130 - page 4, line 33; figures 2A,2B *;
 [A]FR2586658  (RECIF SA [FR]) [A] 1-4 * page 5 - page 8; figures 3,4 *;
 [A]EP0523836  (SHINETSU HANDOTAI KK [JP]) [A] 1 * column 2, line 19 - column 4, line 5; figures 1,8-12 *;
 [A]US5301700  (KAMIKAWA YUUJI [JP], et al) [A] 1* the whole document *
ExaminationUS4722752
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.