-
EP0758688
European procedure
Extract from the Register of European Patents
EP About this file: EP0758688
| EP0758688 - Apparatuses for deposition or etching [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 27.09.2002 Database last updated on 14.05.2024 | Most recent event Tooltip | 27.09.2002 | No opposition filed within time limit | published on 13.11.2002 [2002/46] | Applicant(s) | For all designated states Sumitomo Electric Industries, Ltd. 5-33, Kitahama 4-chome, Chuo-ku Osaka-shi Osaka 541 / JP | [N/P] |
| Former [1997/08] | For all designated states SUMITOMO ELECTRIC INDUSTRIES, LTD. 5-33, Kitahama 4-chome, Chuo-ku Osaka-shi, Osaka 541 / JP | Inventor(s) | 01 /
Shiomi, Hiromu, c/o Itami Works Sumitomo Elec. Ind., Ltd., 1-1, Koyakita 1-chome Itami-shi, Hyogo 664 / JP | [1997/08] | Representative(s) | von Fischern, Bernhard, et al Hoffmann - Eitle Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | [N/P] |
| Former [1997/08] | Ritter und Edler von Fischern, Bernhard, Dipl.-Ing., et al Hoffmann, Eitle & Partner, Patentanwälte, Arabellastrasse 4 81925 München / DE | Application number, filing date | 96112896.4 | 09.08.1996 | [1997/08] | Priority number, date | JP19950206211 | 11.08.1995 Original published format: JP 20621195 | [1997/08] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP0758688 | Date: | 19.02.1997 | Language: | EN | [1997/08] | Type: | B1 Patent specification | No.: | EP0758688 | Date: | 21.11.2001 | Language: | EN | [2001/47] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 02.12.1996 | Classification | IPC: | C23C16/50, H01J37/32, C23F4/00 | [1997/08] | CPC: |
H01J37/32247 (EP,US);
C23C16/505 (EP,US);
C23C16/511 (EP,US);
H01J37/32192 (EP,US);
H01J37/3244 (EP,US)
| Designated contracting states | DE, GB [1997/08] | Title | German: | Vorrichtungen zum Aufdampfen oder Ätzen | [1997/08] | English: | Apparatuses for deposition or etching | [1997/08] | French: | Dispositifs de déposition ou de gravure | [1997/08] | Examination procedure | 04.04.1997 | Examination requested [1997/23] | 10.09.1998 | Despatch of a communication from the examining division (Time limit: M04) | 30.12.1998 | Reply to a communication from the examining division | 28.06.1999 | Despatch of a communication from the examining division (Time limit: M04) | 28.10.1999 | Reply to a communication from the examining division | 28.03.2000 | Despatch of a communication from the examining division (Time limit: M04) | 07.08.2000 | Reply to a communication from the examining division | 16.03.2001 | Despatch of communication of intention to grant (Approval: Yes) | 28.05.2001 | Communication of intention to grant the patent | 24.08.2001 | Fee for grant paid | 24.08.2001 | Fee for publishing/printing paid | Opposition(s) | 22.08.2002 | No opposition filed within time limit [2002/46] | Fees paid | Renewal fee | 27.08.1998 | Renewal fee patent year 03 | 25.08.1999 | Renewal fee patent year 04 | 14.08.2000 | Renewal fee patent year 05 | 14.08.2001 | Renewal fee patent year 06 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US5272360 (TODOROKI SATORU [JP], et al) [X] 1 * column 6, line 12 - column 7, line 18; figure 5 *; | [XD]JPH05166596 ; | [XD]JPH06275566 ; | [X]US4987284 (FUJIMURA SHUZO [JP], et al) [X] 1 * column 5, line 66 - column 6, line 30; figure 2 * | [XD] - PATENT ABSTRACTS OF JAPAN, (19931014), vol. 017, no. 568, Database accession no. (E - 1447), & JP05166596 A 19930702 (TOSHIBA CORP) [XD] 1 * abstract * | [XD] - PATENT ABSTRACTS OF JAPAN, (19941222), vol. 018, no. 684, Database accession no. (E - 1650), & JP06275566 A 19940930 (SUMITOMO METAL IND LTD) [XD] 1 * abstract * | Examination | JPH04211118 |