EP0785571 - Exposure method and apparatus therefore [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 17.08.2001 Database last updated on 24.08.2024 | Most recent event Tooltip | 17.08.2001 | No opposition filed within time limit | published on 04.10.2001 [2001/40] | Applicant(s) | For all designated states CANON KABUSHIKI KAISHA 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo / JP | [N/P] |
Former [1997/30] | For all designated states CANON KABUSHIKI KAISHA 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo / JP | Inventor(s) | 01 /
Morisada, Masahiro Canon Kabushiki Kaisha, 30-2, Shimomaruko 3-chome Ohta-ku, Tokyo / JP | [1997/30] | Representative(s) | Beresford, Keith Denis Lewis Beresford Crump LLP 16 High Holborn London WC1V 6BX / GB | [N/P] |
Former [1997/30] | Beresford, Keith Denis Lewis BERESFORD & Co. 2-5 Warwick Court High Holborn London WC1R 5DJ / GB | Application number, filing date | 96309565.8 | 31.12.1996 | [1997/30] | Priority number, date | JP19960016985 | 08.01.1996 Original published format: JP 1698596 | JP19960016986 | 08.01.1996 Original published format: JP 1698696 | JP19960340445 | 06.12.1996 Original published format: JP 34044596 | [1997/30] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0785571 | Date: | 23.07.1997 | Language: | EN | [1997/30] | Type: | A3 Search report | No.: | EP0785571 | Date: | 27.08.1997 | [1997/35] | Type: | B1 Patent specification | No.: | EP0785571 | Date: | 18.10.2000 | Language: | EN | [2000/42] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 10.07.1997 | Classification | IPC: | G03F7/20 | [1997/33] | CPC: |
G03F7/70425 (EP);
H01L21/027 (KR);
G03F7/70358 (EP);
G03F7/70725 (EP)
|
Former IPC [1997/30] | H01L21/027, G03F9/00 | Designated contracting states | DE, GB, NL [1997/30] | Title | German: | Belichtungsverfahren und Belichtungsvorrichtung | [1997/30] | English: | Exposure method and apparatus therefore | [1997/30] | French: | Méthode et appareil d'exposition | [1997/30] | Examination procedure | 07.01.1998 | Examination requested [1998/11] | 15.06.1998 | Despatch of a communication from the examining division (Time limit: M06) | 24.12.1998 | Reply to a communication from the examining division | 19.07.1999 | Despatch of communication of intention to grant (Approval: No) | 22.11.1999 | Despatch of communication of intention to grant (Approval: later approval) | 07.12.1999 | Communication of intention to grant the patent | 11.02.2000 | Fee for grant paid | 11.02.2000 | Fee for publishing/printing paid | Opposition(s) | 19.07.2001 | No opposition filed within time limit [2001/40] | Fees paid | Renewal fee | 24.12.1998 | Renewal fee patent year 03 | 27.12.1999 | Renewal fee patent year 04 |
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