-
EP0812368
European procedure
Extract from the Register of European Patents
EP About this file: EP0812368
| EP0812368 - REACTIVE SPUTTERING PROCESS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 08.10.1999 Database last updated on 09.09.2024 | Most recent event Tooltip | 08.10.1999 | No opposition filed within time limit | published on 24.11.1999 [1999/47] | Applicant(s) | For all designated states Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Leonrodstrasse 54 80636 München / DE | [N/P] |
| Former [1997/51] | For all designated states FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. Leonrodstrasse 54 80636 München / DE | Inventor(s) | 01 /
FRACH, Peter Bautzner Landstrasse 53 D-01324 Dresden / DE | 02 /
GOTTFRIED, Christian Thomas-Mann-Strasse 50 D-01219 Dresden / DE | 03 /
WALDE, Hendrik 3219 Laredo Lane Fort Collins, CO 80526 / US | 04 /
GOEDICKE, Klaus Pfeifferhannsstrasse 18 D-01307 Dresden / DE | [1998/49] |
| Former [1997/51] | 01 /
FRACH, Peter Bautzner Landstrasse 53 D-01324 Dresden / DE | ||
| 02 /
GOTTFRIED, Christian Thomas-Mann-Strasse 50 D-01219 Dresden / DE | |||
| 03 /
WALDE, Hendrik 3219 Laredo Lane Fort Collins, CO 80526 / US | |||
| 04 /
GOEDICKE, KLaus Pfeifferhannsstrasse 18 D-01307 Dresden / DE | Application number, filing date | 96900864.8 | 23.01.1996 | [1997/51] | WO1996DE00121 | Priority number, date | DE19951006515 | 24.02.1995 Original published format: DE 19506515 | [1997/51] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO9626302 | Date: | 29.08.1996 | Language: | DE | [1996/39] | Type: | A1 Application with search report | No.: | EP0812368 | Date: | 17.12.1997 | Language: | DE | The application published by WIPO in one of the EPO official languages on 29.08.1996 takes the place of the publication of the European patent application. | [1997/51] | Type: | B1 Patent specification | No.: | EP0812368 | Date: | 02.12.1998 | Language: | DE | [1998/49] | Search report(s) | International search report - published on: | EP | 29.08.1996 | Classification | IPC: | C23C14/00, C23C14/54 | [1997/51] | CPC: |
H01J37/3405 (EP,US);
C23C14/0042 (EP,US);
C23C14/352 (EP,US);
C23C14/54 (EP,US)
| Designated contracting states | BE, FR, GB, NL [1997/51] | Title | German: | VERFAHREN ZUR REAKTIVEN BESCHICHTUNG | [1997/51] | English: | REACTIVE SPUTTERING PROCESS | [1997/51] | French: | PROCEDE DE PULVERISATION REACTIVE | [1997/51] | Entry into regional phase | 06.08.1997 | National basic fee paid | 06.08.1997 | Designation fee(s) paid | 06.08.1997 | Examination fee paid | Examination procedure | 19.09.1996 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 06.08.1997 | Examination requested [1997/51] | 22.01.1998 | Despatch of communication of intention to grant (Approval: Yes) | 25.05.1998 | Communication of intention to grant the patent | 04.06.1998 | Fee for grant paid | 04.06.1998 | Fee for publishing/printing paid | Opposition(s) | 03.09.1999 | No opposition filed within time limit [1999/47] | Fees paid | Renewal fee | 22.01.1998 | Renewal fee patent year 03 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]US5334302 (KUBO KENICHI [JP], et al) [A] 1-21 * column 10, line 9 - line 25 *; | [AD]EP0501016 (LEYBOLD AG [DE]) [AD] 1-21 * column 7, line 58 - column 9, line 20 * |