-
EP0836536
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP0836536
| EP0836536 - ON-SITE GENERATION OF ULTRA-HIGH-PURITY BUFFERED-HF FOR SEMICONDUCTOR PROCESSING [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 19.05.2006 Database last updated on 29.03.2025 | Most recent event Tooltip | 19.05.2006 | Application deemed to be withdrawn | published on 21.06.2006 [2006/25] | Applicant(s) | For all designated states Air Liquide America Corporation 2700 Post Oak Boulevard, Suite 1800 Houston Texas 77056 / US | [N/P] |
| Former [1999/23] | For all designated states Air Liquide America Corporation 2700 Post Oak Boulevard, Suite 1800 Houston, Texas 77056 / US | ||
| Former [1998/17] | For all designated states STARTEC VENTURES, INC. 1327 Ferrand Road Fallbrook, CA 92028 / US | Inventor(s) | 01 /
HOFFMAN, Joe, G. Suite F 2140 Orinda Drive Cardiff, CA 92007 / US | 02 /
CLARK, R., Scot 1327 Farrand Road Fallbrook, CA 92028 / US | [1998/17] | Representative(s) | Vesin, Jacques L'Air Liquide S.A. Service Propriété Industrielle, 75 Quai d'Orsay 75321 Paris Cedex 07 / FR | [N/P] |
| Former [1999/34] | Vesin, Jacques L'AIR LIQUIDE, S.A., Service Propriété Industrielle, 75, Quai d'Orsay 75321 Paris Cédex 07 / FR | ||
| Former [1998/17] | Daniels, Jeffrey Nicholas Page White & Farrer 54 Doughty Street London WC1N 2LS / GB | Application number, filing date | 96922477.3 | 05.06.1996 | [1998/17] | WO1996US10388 | Priority number, date | WO1995US07649 | 05.06.1995 Original published format: PCT/US95/07649 | US19950499427 | 07.07.1995 Original published format: US 499427 | [1998/17] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9639266 | Date: | 12.12.1996 | Language: | EN | [1996/54] | Type: | A1 Application with search report | No.: | EP0836536 | Date: | 22.04.1998 | Language: | EN | The application published by WIPO in one of the EPO official languages on 12.12.1996 takes the place of the publication of the European patent application. | [1998/17] | Search report(s) | International search report - published on: | US | 12.12.1996 | (Supplementary) European search report - dispatched on: | EP | 04.11.1999 | Classification | IPC: | B08B7/04, B01D1/00, B01D3/14, B01D3/02, B01D3/00, C01B7/19, C01B7/07, F26B7/00, C01C1/02, H01L21/306, H01L21/311, C01C1/16 | [1999/51] | CPC: |
C01C1/024 (EP);
B08B7/04 (KR);
B01D1/00 (KR);
C01B7/19 (KR);
C01B7/195 (EP);
C01B7/198 (EP);
C01C1/162 (EP);
H01L21/30604 (EP);
H01L21/31111 (EP);
C01P2006/80 (EP)
(-)
|
| Former IPC [1998/17] | B08B7/04, B01D1/00, B01D3/14, B01D3/02, B01D3/00, C01B7/19, C01B7/07, F26B7/00 | Designated contracting states | DE, FR, GB, IT, NL [1998/17] | Title | German: | HERSTELLUNG AM ORT VON ULTRAHOCHREINEM GEPUFFERTEM WASSERSTOFFFLUORID FÜR HALBLEITERBEHANDLUNG | [1998/17] | English: | ON-SITE GENERATION OF ULTRA-HIGH-PURITY BUFFERED-HF FOR SEMICONDUCTOR PROCESSING | [1998/17] | French: | PRODUCTION IN SITU DE PEROXYDE D'HYDROGENE ULTRAPUR POUR LE TRAITEMENT DE SEMI-CONDUCTEURS | [1998/17] | Entry into regional phase | 31.12.1997 | National basic fee paid | 31.12.1997 | Search fee paid | 31.12.1997 | Designation fee(s) paid | 31.12.1997 | Examination fee paid | Examination procedure | 02.01.1997 | Request for preliminary examination filed International Preliminary Examining Authority: US | 31.12.1997 | Examination requested [1998/17] | 20.02.2002 | Despatch of a communication from the examining division (Time limit: M06) | 14.08.2002 | Reply to a communication from the examining division | 30.04.2003 | Despatch of a communication from the examining division (Time limit: M08) | 06.01.2004 | Reply to a communication from the examining division | 31.12.2005 | Application deemed to be withdrawn, date of legal effect [2006/25] | 03.02.2006 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2006/25] | Appeal following examination | 01.12.2000 | Appeal received No. J0005/01 | 05.02.2001 | Statement of grounds filed | 28.11.2001 | Result of appeal procedure: rejection of appeal | Fees paid | Renewal fee | 20.05.1998 | Renewal fee patent year 03 | 25.05.1999 | Renewal fee patent year 04 | 22.05.2000 | Renewal fee patent year 05 | 17.05.2001 | Renewal fee patent year 06 | 21.05.2002 | Renewal fee patent year 07 | 19.05.2003 | Renewal fee patent year 08 | 19.05.2004 | Renewal fee patent year 09 | Penalty fee | Additional fee for renewal fee | 30.06.2005 | 10 M06 Not yet paid |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [ ] - No further relevant documents disclosed | International search | [YP]US5500098 (BROWN CRAIG J [CA], et al); | [YP]US5496778 (HOFFMAN JOE G [US], et al); | [Y]US5362469 (SESEKE-KOYRO ULRICH [DE], et al); | [Y]US5346557 (ITO HIDEO [JP], et al); | [Y]US5288333 (TANAKA MASATO [JP], et al); | [Y]US5164049 (CLARK R SCOT [US], et al); | [A]US4980032 (DOBSON JESSE C [US], et al); | [Y]US4952386 (DAVISON JOHN B [US], et al); | [Y]US4929435 (BOGHEAN BARRY J [CA], et al); | [Y]US4828660 (CLARK R SCOT [US], et al); | [A]US4756899 (JENCZEWSKI THEODORE J [US], et al) |