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EP0805483
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EP About this file: EP0805483
| EP0805483 - SEMICONDUCTOR TREATMENT APPARATUS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 29.10.1999 Database last updated on 19.10.2024 | Most recent event Tooltip | 29.10.1999 | Application deemed to be withdrawn | published on 15.12.1999 [1999/50] | Applicant(s) | For all designated states ASM JAPAN K.K. 23-1, Nagayama 6-chome, Tama-shi Tokyo 206 / JP | [1997/45] | Inventor(s) | 01 /
SHIMIZU, Akira ASM Japan K.K., 23-1, Nagayama 6-chome Tama-shi, Tokyo 206 / JP | 02 /
HU, Peirong ASM Japan K.K., 23-1, Nagayama 6-chome Tama-shi, Tokyo 206 / JP | 03 /
MIYAKAWA, Hitoshi, ASM Japan K.K., Nagaoka Factory 92-1, Shimpo mishima-machi Santou-gun, Niigata-prefecture 940-23 / JP | 04 /
TANABE, Nobuaki, ASM Japan K.K., Nagaoka Factory 392-1, Shimpo mishima-machi Santou-gun, Niigata prefecture 940-23 / JP | [1997/45] | Representative(s) | de Bruijn, Leendert C., et al Nederlandsch Octrooibureau P.O. Box 29720 2502 LS Den Haag / NL | [N/P] |
| Former [1997/45] | de Bruijn, Leendert C., et al Nederlandsch Octrooibureau P.O. Box 29720 2502 LS Den Haag / NL | Application number, filing date | 96935355.6 | 17.10.1996 | [1997/45] | WO1996JP03013 | Priority number, date | JP19950293256 | 17.10.1995 Original published format: JP 29325695 | JP19960137736 | 09.05.1996 Original published format: JP 13773696 | JP19960143432 | 15.05.1996 Original published format: JP 14343296 | [1997/45] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9715073 | Date: | 24.04.1997 | Language: | EN | [1997/18] | Type: | A1 Application with search report | No.: | EP0805483 | Date: | 05.11.1997 | Language: | EN | The application published by WIPO in one of the EPO official languages on 24.04.1997 takes the place of the publication of the European patent application. | [1997/45] | Search report(s) | International search report - published on: | JP | 24.04.1997 | Classification | IPC: | H01L21/302 | [1997/45] | CPC: |
H01L21/02046 (EP);
H01L21/302 (KR);
H01L21/31116 (EP);
H01L21/67075 (EP);
H01L21/6708 (EP);
H01L21/67757 (EP)
| Designated contracting states | DE, FR, GB, IT, NL [1997/45] | Title | German: | VORRICHTUNG ZUR BEHANDLUNG VON HALBLEITERN | [1997/45] | English: | SEMICONDUCTOR TREATMENT APPARATUS | [1997/45] | French: | APPAREIL DE TRAITEMENT DE SEMI-CONDUCTEURS | [1997/45] | Entry into regional phase | 17.06.1997 | Translation filed | 17.06.1997 | National basic fee paid | 17.06.1997 | Search fee paid | 01.07.1997 | Designation fee(s) paid | 17.06.1997 | Examination fee paid | Examination procedure | 17.06.1997 | Examination requested [1997/45] | 04.05.1999 | Application deemed to be withdrawn, date of legal effect [1999/50] | 15.07.1999 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [1999/50] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.10.1998 | 03 M06 Not yet paid |
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