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EP0801143
European procedure
Extract from the Register of European Patents
EP About this file: EP0801143
| EP0801143 - Apparatus for masking or covering of substrates [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 12.03.2004 Database last updated on 15.06.2024 | Most recent event Tooltip | 12.03.2004 | No opposition filed within time limit | published on 28.04.2004 [2004/18] | Applicant(s) | For all designated states Singulus Technologies AG Junkersstrasse 1 63755 Alzenau / DE | [1998/24] |
| Former [1998/14] | For all designated states Singulus Technologies AG Junkersstrasse 1 63755 Alzenau / DE | ||
| Former [1997/42] | For all designated states Singulus Technologies GmbH Junkersstrasse 1 63755 Alzenau / DE | Inventor(s) | 01 /
Kempf, Stefan Savignystrasse 3 63755 Alzenau-Albstadt / DE | [1997/42] | Representative(s) | Heunemann, Dieter, et al Vossius & Partner Postfach 86 07 67 81634 München / DE | [N/P] |
| Former [1997/42] | Heunemann, Dieter, Dr., et al Vossius & Partner, Postfach 86 07 67 81634 München / DE | Application number, filing date | 97101697.7 | 04.02.1997 | [1997/42] | Priority number, date | DE1996114600 | 13.04.1996 Original published format: DE 19614600 | [1997/42] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | EP0801143 | Date: | 15.10.1997 | Language: | DE | [1997/42] | Type: | B1 Patent specification | No.: | EP0801143 | Date: | 07.05.2003 | Language: | DE | [2003/19] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 30.07.1997 | Classification | IPC: | C23C14/04, C23C14/34, H01J37/34 | [1997/42] | CPC: |
C23C14/042 (EP);
H01J37/3408 (EP);
H01J37/3447 (EP)
| Designated contracting states | CH, DE, FR, GB, LI, NL, SE [1997/42] | Title | German: | Vorrichtung zum Maskieren oder Abdecken von Substraten | [1997/42] | English: | Apparatus for masking or covering of substrates | [1997/42] | French: | Appareil de recouvrement ou masquage de substrats | [1997/42] | Examination procedure | 04.11.1997 | Examination requested [1998/02] | 13.01.1999 | Despatch of a communication from the examining division (Time limit: M04) | 25.05.1999 | Reply to a communication from the examining division | 20.07.1999 | Despatch of a communication from the examining division (Time limit: M04) | 13.10.1999 | Reply to a communication from the examining division | 10.11.2000 | Despatch of communication of intention to grant (Approval: No) | 11.01.2001 | Despatch of communication of intention to grant (Approval: later approval) | 19.08.2002 | Communication of intention to grant the patent | 13.11.2002 | Fee for grant paid | 13.11.2002 | Fee for publishing/printing paid | Opposition(s) | 10.02.2004 | No opposition filed within time limit [2004/18] | Fees paid | Renewal fee | 26.02.1999 | Renewal fee patent year 03 | 29.02.2000 | Renewal fee patent year 04 | 28.02.2001 | Renewal fee patent year 05 | 28.02.2002 | Renewal fee patent year 06 | 28.02.2003 | Renewal fee patent year 07 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [AD]DE4315023 (LEYBOLD AG [DE]) [AD] 1-19 * column 3, line 27 - column 4, line 12 *; | [A]GB2286201 (SONY DISC TECHNOLOGY INC [JP]) [A] 1-19 * claim 1 * | by applicant | DE4315023 |