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EP0805481
European procedure
Extract from the Register of European Patents
EP About this file: EP0805481
| EP0805481 - Operating method for vacuum processing apparatus [Right-click to bookmark this link] | |||
| Former [1997/45] | Vacuum processing apparatus and operating method therefor | ||
| [2005/29] | Status | No opposition filed within time limit Status updated on 27.04.2007 Database last updated on 11.05.2024 | Most recent event Tooltip | 27.04.2007 | No opposition filed within time limit | published on 30.05.2007 [2007/22] | Applicant(s) | For all designated states Hitachi, Ltd. 6, Kanda Surugadai 4-chome Chiyoda-ku Tokyo 101 / JP | [N/P] |
| Former [2006/25] | For all designated states Hitachi, Ltd. 6, Kanda Surugadai 4-chome Chiyoda-ku Tokyo 101 / JP | ||
| Former [1997/45] | For all designated states HITACHI, LTD. 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 101 / JP | Inventor(s) | 01 /
Kato, Shigekazu 12-4 3-chome, Toyo Kudamatsu-shi, Yamaguchi-Ken / JP | 02 /
Nishihata, Kouji 6-37, 3-chome, Toishi Tokuyama-Ken / JP | 03 /
Tsubone, Tsunehiko 1-47, Iwagari-Cho Hikari-Shi, Yamaguchi-Ken / JP | 04 /
Itou, Atsushi 499-3, Ikunoya Kudamatsu-Shi, Yamaguchi-Ken / JP | [1997/45] | Representative(s) | Paget, Hugh Charles Edward, et al Mewburn Ellis LLP City Tower 40 Basinghall Street London EC2V 5DE / GB | [N/P] |
| Former [1997/45] | Paget, Hugh Charles Edward, et al MEWBURN ELLIS York House 23 Kingsway London WC2B 6HP / GB | Application number, filing date | 97111628.0 | 19.08.1991 | [1997/45] | Priority number, date | JP19900225321 | 29.08.1990 Original published format: JP 22532190 | [1997/45] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP0805481 | Date: | 05.11.1997 | Language: | EN | [1997/45] | Type: | A3 Search report | No.: | EP0805481 | Date: | 20.05.1998 | [1998/21] | Type: | B1 Patent specification | No.: | EP0805481 | Date: | 21.06.2006 | Language: | EN | [2006/25] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 06.04.1998 | Classification | IPC: | H01L21/00, C23C14/56 | [1997/45] | CPC: |
H01L21/67748 (EP,US);
H01L21/304 (KR);
B01J3/006 (EP,US);
B41J2/36 (EP,US);
B41J2/365 (EP,US);
C23C14/564 (EP,US);
H01L21/67028 (EP,US);
H01L21/67167 (EP,US);
H01L21/67253 (EP,US);
H01L21/67736 (EP,US);
Y10S134/902 (EP,US);
Y10S414/137 (EP,US);
| Designated contracting states | DE, FR, GB [1997/45] | Title | German: | Arbeitsverfahren für Vakuumbehandlungsvorrichtung | [2005/29] | English: | Operating method for vacuum processing apparatus | [2005/29] | French: | Méthode d'opération d'un dispositif de traitement sous vide | [2005/29] |
| Former [1997/45] | Vakuumbehandlungsvorrichtung und Arbeitsverfahren dafür | ||
| Former [1997/45] | Vacuum processing apparatus and operating method therefor | ||
| Former [1997/45] | Dispositif de traitement sous vide et sa méthode d'opération | Examination procedure | 28.07.1997 | Examination requested [1997/45] | 20.12.1999 | Despatch of a communication from the examining division (Time limit: M06) | 24.05.2000 | Reply to a communication from the examining division | 15.11.2000 | Despatch of a communication from the examining division (Time limit: M06) | 03.05.2001 | Reply to a communication from the examining division | 11.06.2001 | Despatch of a communication from the examining division (Time limit: M04) | 19.10.2001 | Reply to a communication from the examining division | 10.04.2002 | Despatch of communication that the application is refused, reason: substantive examination {1} | 14.07.2004 | Despatch of a communication from the examining division (Time limit: M06) | 20.12.2004 | Reply to a communication from the examining division | 07.07.2005 | Communication of intention to grant the patent | 06.10.2005 | Fee for grant paid | 06.10.2005 | Fee for publishing/printing paid | Appeal following examination | 24.05.2002 | Appeal received No. T0642/02 | 24.05.2002 | Statement of grounds filed | 24.06.2004 | Interlocutory revision of appeal | 24.06.2004 | Result of appeal procedure: continuation of examination procedure | Parent application(s) Tooltip | EP91307625.3 / EP0475604 | Divisional application(s) | EP00121401.4 / EP1079418 | EP00121402.2 / EP1076354 | EP02022861.5 Application deemed to be withdrawn : 15.11.2002 | EP98106162.5 / EP0856875 | Opposition(s) | 22.03.2007 | No opposition filed within time limit [2007/22] | Fees paid | Renewal fee | 28.07.1997 | Renewal fee patent year 03 | 28.07.1997 | Renewal fee patent year 04 | 28.07.1997 | Renewal fee patent year 05 | 28.07.1997 | Renewal fee patent year 06 | 28.07.1997 | Renewal fee patent year 07 | 21.08.1998 | Renewal fee patent year 08 | 23.08.1999 | Renewal fee patent year 09 | 22.08.2000 | Renewal fee patent year 10 | 22.08.2001 | Renewal fee patent year 11 | 22.08.2002 | Renewal fee patent year 12 | 22.08.2003 | Renewal fee patent year 13 | 24.08.2004 | Renewal fee patent year 14 | 23.08.2005 | Renewal fee patent year 15 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US4836905 (DAVIS CECIL J [US], et al) [X] 1 * column 23, line 65 - column 24, line 35; figure 9 *; | [A]WO8707309 (NOVELLUS SYSTEMS INC [US]) [A] 1,5 * page 3, line 6 - page 4, line 14; figure 2 *; | [A]JPS61250185 | [A] - PATENT ABSTRACTS OF JAPAN, (19870331), vol. 11, no. 101, Database accession no. (C - 413), & JP61250185 A 19861107 (ANELVA CORP) [A] 1 * abstract * | Examination | JPH0226229U | EP0367423 | JPH0265252 | JPS63127125U |