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Extract from the Register of European Patents

EP About this file: EP0867924

EP0867924 - Method for removing organic contaminants from a semiconductor surface [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  06.07.2012
Database last updated on 24.04.2024
Most recent event   Tooltip26.04.2013Lapse of the patent in a contracting state
New state(s): ES		published on 29.05.2013  [2013/22]
Applicant(s)For all designated states
IMEC
Kapeldreef 75
3001 Leuven / BE
[2009/33]
Former [1998/40]For all designated states
INTERUNIVERSITAIR MICRO-ELEKTRONICA CENTRUM VZW
Kapeldreef 75
3001 Heverlee / BE
Inventor(s)01 / De Gendt, Stefan
Ridder Gustaaf van Havre Laan 10
2110 Wijnegem / BE
02 / Snee, Peter
Nekwinkelstraat 21/2
3001 Veltem-Beisem / BE
03 / Heyns, Marc
Merelnest 14
3210 Linden / BE
[1998/40]
Representative(s)Van Malderen, Joëlle, et al
pronovem - Office Van Malderen
Avenue Josse Goffin 158
1082 Bruxelles / BE
[N/P]
Former [1998/40]Van Malderen, Joelle, et al
Office Van Malderen, Place Reine Fabiola 6/1
1083 Bruxelles / BE
Application number, filing date98870026.610.02.1998
[1998/40]
Priority number, dateUS19970040309P14.02.1997         Original published format: US 40309 P
US19970042389P25.03.1997         Original published format: US 42389 P
US19970066261P20.11.1997         Original published format: US 66261 P
[1998/40]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP0867924
Date:30.09.1998
Language:EN
[1998/40]
Type: A3 Search report 
No.:EP0867924
Date:01.09.1999
[1999/35]
Type: B1 Patent specification 
No.:EP0867924
Date:31.08.2011
Language:EN
[2011/35]
Search report(s)(Supplementary) European search report - dispatched on:EP20.07.1999
ClassificationIPC:H01L21/306, H01L21/311, G03F7/42
[1998/40]
CPC:
H01L21/31133 (EP,US); G03F7/42 (EP,US); G03F7/422 (EP,US);
G03F7/423 (EP,US); H01L21/02063 (EP,US); H01L21/31116 (EP,US);
H01L21/31138 (EP,US); H01L21/76814 (EP,US) (-)
Designated contracting statesAT,   BE,   CH,   DE,   ES,   FR,   GB,   IT,   LI,   NL,   SE [2000/19]
Former [1998/40]AT,  BE,  CH,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE 
TitleGerman:Verfahren zur Entfernung organischer Kontamination von einer Halbleiteroberfläche[1998/40]
English:Method for removing organic contaminants from a semiconductor surface[1998/40]
French:Procédé pour enlever la contamination organique de la surface de semiconducteurs[1998/40]
Examination procedure18.02.1998Examination requested  [1998/40]
31.07.2006Despatch of a communication from the examining division (Time limit: M06)
02.02.2007Reply to a communication from the examining division
09.06.2009Despatch of a communication from the examining division (Time limit: M06)
02.12.2009Reply to a communication from the examining division
01.04.2011Communication of intention to grant the patent
13.07.2011Fee for grant paid
13.07.2011Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  31.07.2006
Opposition(s)01.06.2012No opposition filed within time limit [2012/32]
Fees paidRenewal fee
25.01.2000Renewal fee patent year 03
07.02.2001Renewal fee patent year 04
15.01.2002Renewal fee patent year 05
21.01.2003Renewal fee patent year 06
24.02.2004Renewal fee patent year 07
25.02.2005Renewal fee patent year 08
27.02.2006Renewal fee patent year 09
26.02.2007Renewal fee patent year 10
27.02.2008Renewal fee patent year 11
25.02.2009Renewal fee patent year 12
24.02.2010Renewal fee patent year 13
23.02.2011Renewal fee patent year 14
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT31.08.2011
BE31.08.2011
IT31.08.2011
NL31.08.2011
SE31.08.2011
ES11.12.2011
CH29.02.2012
LI29.02.2012
[2013/22]
Former [2012/49]AT31.08.2011
BE31.08.2011
IT31.08.2011
NL31.08.2011
SE31.08.2011
CH29.02.2012
LI29.02.2012
Former [2012/23]AT31.08.2011
BE31.08.2011
IT31.08.2011
NL31.08.2011
SE31.08.2011
Former [2012/17]AT31.08.2011
BE31.08.2011
NL31.08.2011
SE31.08.2011
Former [2012/11]AT31.08.2011
NL31.08.2011
SE31.08.2011
Former [2012/10]NL31.08.2011
SE31.08.2011
Former [2012/08]NL31.08.2011
Documents cited:Search[DA]JPS614232  ;
 [A]EP0327263  (PROCTOR PETER H) [A] 13 * page 10, line 51 - line 52 *;
 [A]US4974530  (LYON RICHARD K [US]) [A] 1 * column 10, line 58 - line 59 *;
 [DA]EP0548596  (CHLORINE ENG CORP LTD [JP]) [DA] 1,8,19,20,22,26 * page 3, line 2 - page 4, line 10 *;
 [X]GB2287827  (NEC CORP [JP]) [X] 7,9,10,12-14,16-18,22-24,26 * page 42, line 15 - page 50, line 20 *;
 [XA]JPH07297163  (TOSHIBA ELETRONIC IWATE, et al) [X] 1,10,12,22,23,26 [A] 2,16-18,25;
 [X]EP0702399  (SIEMENS AG [DE]) [X] 9,14,16-18,23,26 * the whole document *;
 [DXA]US5503708  (KOIZUMI KOOTAROO [JP], et al) [DX] 1-3,10,12,13,26 * column 5, line 18 - column 7, line 14 * [A] 5;
 US5632847  [ ] (OHNO REIKO [JP], et al) [ ] * the whole document *;
 [DA]  - PATENT ABSTRACTS OF JAPAN, (19860524), vol. 010, no. 141, Database accession no. (E - 406), & JP61004232 A 19860110 (NIPPON DENKI KK) [DA] 9,13-15,22,26 * abstract *
 [DA]  - SEHESTED K ET AL, "Decomposition of Ozone in Aqueous Acetic Acid Solutions (pH 0-4)", JOURNAL OF PHYSICAL CHEMISTRY, (1992), vol. 96, pages 1005 - 1009, XP002108237 [DA] 13-15 * section "Introduction" *

DOI:   http://dx.doi.org/10.1021/j100181a084
Examination   - Hawley, Hawley's Condensed Chemical Dictionary, New York, Van Nostrand Reinhold Company, (1987), pages 1028 - 1028, ISBN 0442280971
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.