EP0909311 - POST CLEAN TREATMENT [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 14.05.2004 Database last updated on 29.07.2024 | Most recent event Tooltip | 07.03.2008 | Lapse of the patent in a contracting state New state(s): IT | published on 09.04.2008 [2008/15] | Applicant(s) | For all designated states EKC TECHNOLOGY, INC. 2520 Barrington Court Hayward California 94545 / US | [N/P] |
Former [1999/16] | For all designated states EKC TECHNOLOGY, INC. 2520 Barrington Court Hayward California 94545 / US | Inventor(s) | 01 /
SMALL, Robert, J. 11418 Rampart Drive Dublin, CA 94568 / US | [1999/16] | Representative(s) | Allard, Susan Joyce, et al BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
Former [1999/16] | Allard, Susan Joyce, et al BOULT WADE TENNANT, 27 Furnival Street London EC4A 1PQ / GB | Application number, filing date | 98906398.7 | 14.02.1998 | [1999/16] | WO1998US02794 | Priority number, date | US19970801911 | 14.02.1997 Original published format: US 801911 | [1999/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9836045 | Date: | 20.08.1998 | Language: | EN | [1998/33] | Type: | A1 Application with search report | No.: | EP0909311 | Date: | 21.04.1999 | Language: | EN | The application published by WIPO in one of the EPO official languages on 20.08.1998 takes the place of the publication of the European patent application. | [1999/16] | Type: | B1 Patent specification | No.: | EP0909311 | Date: | 09.07.2003 | Language: | EN | [2003/28] | Search report(s) | International search report - published on: | US | 20.08.1998 | (Supplementary) European search report - dispatched on: | EP | 16.01.2001 | Classification | IPC: | C11D3/18, C11D3/30, C11D3/04, C11D3/44, B08B3/08, C11D7/06, C11D7/26, C11D7/28, C11D7/32, C23F3/06, C23G1/00, H01L21/3105, H01L21/321, H01L21/3213 | [2001/09] | CPC: |
H01L21/02071 (EP,US);
C11D3/18 (KR);
B08B3/08 (EP,US);
B24B37/042 (EP,US);
C09D9/00 (EP,US);
C11D3/30 (EP,US);
C11D3/43 (EP,US);
C11D7/06 (EP,US);
C11D7/263 (EP,US);
C11D7/265 (EP,US);
C11D7/267 (EP,US);
C11D7/32 (EP,US);
C11D7/3209 (EP,US);
C11D7/3218 (EP,US);
C11D7/3227 (EP,US);
C11D7/3245 (EP,US);
C11D7/3254 (EP,US);
C11D7/3263 (EP,US);
C11D7/3272 (EP,US);
C11D7/3281 (EP,US);
C11D7/5013 (EP,US);
C23F3/06 (EP,US);
C23G1/00 (EP,US);
C23G1/103 (EP,US);
C23G1/205 (EP,US);
G03F7/42 (EP,US);
G03F7/423 (EP,US);
G03F7/425 (EP,US);
H01L21/0206 (EP,US);
H01L21/02065 (EP,US);
H01L21/02074 (EP,US);
H01L21/3212 (EP,US);
C11D2111/16 (EP,US);
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Former IPC [1999/16] | C11D3/18, C11D3/30, C11D3/04, C11D3/44, B08B3/08 | Designated contracting states | AT, BE, CH, DE, DK, FI, FR, GB, IE, IT, LI, LU [1999/16] | Title | German: | REINIGUNGSNACHBEHANDLUNG | [1999/16] | English: | POST CLEAN TREATMENT | [1999/16] | French: | TRAITEMENT POST-NETTOYAGE | [1999/16] | Entry into regional phase | 15.10.1998 | National basic fee paid | 15.10.1998 | Search fee paid | 15.10.1998 | Designation fee(s) paid | 15.10.1998 | Examination fee paid | Examination procedure | 15.10.1998 | Examination requested [1999/16] | 08.08.2000 | Request for accelerated examination filed | 02.05.2001 | Despatch of a communication from the examining division (Time limit: M04) | 02.05.2001 | Decision about request for accelerated examination - accepted: Yes | 12.09.2001 | Reply to a communication from the examining division | 03.07.2002 | Date of oral proceedings | 07.08.2002 | Minutes of oral proceedings despatched | 23.10.2002 | Communication of intention to grant the patent | 30.04.2003 | Fee for grant paid | 30.04.2003 | Fee for publishing/printing paid | Opposition(s) | 14.04.2004 | No opposition filed within time limit [2004/27] | Fees paid | Renewal fee | 25.02.2000 | Renewal fee patent year 03 | 15.02.2001 | Renewal fee patent year 04 | 28.05.2002 | Renewal fee patent year 05 | 09.01.2003 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 28.02.2002 | 05   M06   Fee paid on   28.05.2002 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 09.07.2003 | BE | 09.07.2003 | CH | 09.07.2003 | FI | 09.07.2003 | IT | 09.07.2003 | LI | 09.07.2003 | DK | 09.10.2003 | LU | 14.02.2004 | IE | 16.02.2004 | [2008/15] |
Former [2005/23] | AT | 09.07.2003 | |
BE | 09.07.2003 | ||
CH | 09.07.2003 | ||
FI | 09.07.2003 | ||
LI | 09.07.2003 | ||
DK | 09.10.2003 | ||
LU | 14.02.2004 | ||
IE | 16.02.2004 | ||
Former [2005/19] | AT | 09.07.2003 | |
BE | 09.07.2003 | ||
CH | 09.07.2003 | ||
FI | 09.07.2003 | ||
LI | 09.07.2003 | ||
DK | 09.10.2003 | ||
IE | 16.02.2004 | ||
Former [2004/29] | AT | 09.07.2003 | |
BE | 09.07.2003 | ||
CH | 09.07.2003 | ||
FI | 09.07.2003 | ||
LI | 09.07.2003 | ||
DK | 09.10.2003 | ||
Former [2004/28] | AT | 09.07.2003 | |
BE | 09.07.2003 | ||
CH | 09.07.2003 | ||
FI | 09.07.2003 | ||
LI | 09.07.2003 | ||
Former [2004/22] | AT | 09.07.2003 | |
CH | 09.07.2003 | ||
FI | 09.07.2003 | ||
LI | 09.07.2003 | ||
Former [2004/14] | AT | 09.07.2003 | |
FI | 09.07.2003 | ||
Former [2004/12] | FI | 09.07.2003 | Documents cited: | Search | [X]JPS62250189 ; | [X]JPH0238498 ; | [X]GB1065016 (BORG HOLDING A G) [X] 1,3,4,6,7,9-11,13,15-18,21 * example 1 *; | [XA]DE2154234 (LICENTIA GMBH) [X] 13,17,18,21 * claims 1-8 * [A] 11; | [XA]US4363741 (GOULD JOSEPH C) [X] 1,3,4,6,11,13,15,16,21 * claim - * [A] 7; | [XA]US5078801 (MALIK FARID A [US]) [X] 13 * abstract * * column 3, line 57 - line 63 * [A] 11,21; | [XA]DE19525521 (ONTRAK SYSTEMS INC [US]) [X] 1-3,11,13,15,16 * abstract * [A] 4,6,7,19,21; | [XA]WO9626538 (ADVANCED MICRO DEVICES INC [US]) [X] 13,15,17,18,21 * claims 1-3 * [A] 1,3,4,6,7,9-12,14; | [PX]US5645737 (ROBINSON KARL M [US], et al) [PX] 13,15,21* claim 5 * | [X] - PATENT ABSTRACTS OF JAPAN, (19880422), vol. 012, no. 132, Database accession no. (C - 490), & JP62250189 A 19871031 (KURITA WATER IND LTD) [X] 1,3,4,6,7,11,13,15,16,21 * abstract * | [X] - PATENT ABSTRACTS OF JAPAN, (19900423), vol. 014, no. 197, Database accession no. (C - 0712), & JP02038498 A 19900207 (AIKO MIZUNOYA) [X] 1,3,6,7,11,13,15,16,19 * abstract * | International search | [Y]EP0578507 (EKC TECHNOLOGY INC [US]); | [A]US5334332 (LEE WAI M [US]); | [A]US5419779 (WARD IRL E [US]); | [A]US5498293 (ILARDI JOSEPH M [US], et al); | [A]US5556482 (WARD IRL E [US], et al); | [A]US5560857 (SAKON TADASHI [JP], et al); | [A]US5563119 (WARD IRL E [US]); | [A]US5571447 (WARD IRL E [US], et al); | [A]US5597420 (WARD IRL E [US]); | [Y] - MORRISON R.T. et al., Organic Chemistry, 3rd Edition, 1979, ALLYN AND BACON, INC., pages 787-788, XP002911125 |