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EP0962048
European procedure
Extract from the Register of European Patents
EP About this file: EP0962048
| EP0962048 - System for high power RF plasma processing [Right-click to bookmark this link] | |||
| Former [1999/49] | SERIES POWERED, PARALLEL OUTPUT RADIO FREQUENCY GENERATOR | ||
| [2002/37] | Status | No opposition filed within time limit Status updated on 16.04.2004 Database last updated on 26.06.2024 | Most recent event Tooltip | 16.04.2004 | No opposition filed within time limit | published on 02.06.2004 [2004/23] | Applicant(s) | For all designated states ADVANCED ENERGY INDUSTRIES, INC. 1625 Sharp Point Drive Fort Collins, CO 80525 / US | [1999/49] | Inventor(s) | 01 /
LEDENEV, Anatoli V. 719 Parliament Court Fort Collins, CO 80525 / US | 02 /
GUROV, Gennady G. 4936 Dakota Drive Fort Collins, CO 80525 / US | 03 /
PORTER, Robert, M., Jr. 1501 Redberry Court Fort Collins, CO 80525 / US | [1999/49] | Representative(s) | Kador & Partner Part mbB Corneliusstraße 15 80469 München / DE | [N/P] |
| Former [1999/49] | Kador & Partner Corneliusstrasse 15 80469 München / DE | Application number, filing date | 98907601.3 | 24.02.1998 | [1999/49] | WO1998US03564 | Priority number, date | US19970805608 | 24.02.1997 Original published format: US 805608 | [1999/49] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9837627 | Date: | 27.08.1998 | Language: | EN | [1998/34] | Type: | A1 Application with search report | No.: | EP0962048 | Date: | 08.12.1999 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.08.1998 takes the place of the publication of the European patent application. | [1999/49] | Type: | B1 Patent specification | No.: | EP0962048 | Date: | 11.06.2003 | Language: | EN | [2003/24] | Search report(s) | International search report - published on: | EP | 27.08.1998 | Classification | IPC: | H03F3/21, H03F3/217 | [1999/49] | CPC: |
H03F3/72 (EP,US);
H03F3/21 (KR);
H03F3/211 (EP,US);
H03F3/2176 (EP,US)
| Designated contracting states | DE, FR, GB [1999/49] | Title | German: | HOCHLEISTUNGS RF-PLASMAPROZESSSYSTEM | [2002/37] | English: | System for high power RF plasma processing | [2002/37] | French: | SYSTEME DE TRAITMENT AU PLASMA RF A HAUTE PUISSANCE | [2002/37] |
| Former [1999/49] | SERIELL GESPEISTER HOCHFREQUENZGENERATOR MIT PARALLELEM AUSGANG | ||
| Former [1999/49] | SERIES POWERED, PARALLEL OUTPUT RADIO FREQUENCY GENERATOR | ||
| Former [1999/49] | GENERATEUR RADIOFREQUENCE A SORTIE PARALLELE, ALIMENTE EN SERIE | Entry into regional phase | 21.09.1999 | National basic fee paid | 21.09.1999 | Designation fee(s) paid | 21.09.1999 | Examination fee paid | Examination procedure | 21.09.1998 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 21.09.1999 | Examination requested [1999/49] | 06.06.2001 | Despatch of a communication from the examining division (Time limit: M07) | 08.01.2002 | Reply to a communication from the examining division | 13.02.2002 | Despatch of a communication from the examining division (Time limit: M04) | 13.06.2002 | Reply to a communication from the examining division | 28.08.2002 | Communication of intention to grant the patent | 18.12.2002 | Fee for grant paid | 18.12.2002 | Fee for publishing/printing paid | Opposition(s) | 12.03.2004 | No opposition filed within time limit [2004/23] | Fees paid | Renewal fee | 21.09.1999 | Renewal fee patent year 03 | 26.02.2001 | Renewal fee patent year 04 | 27.02.2002 | Renewal fee patent year 05 | 28.03.2003 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 28.02.2003 | 06 M06 Fee paid on 28.03.2003 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]US4631493 (VENDELIN GEORGE D [US], et al) [A] 1,3,12,16-20 * column 4, line 36 - column 6, line 54; figures 3,5 *; | [DA]WO9321685 (ADVANCED ENERGY IND INC [US], et al) [DA] 46-71,90-137,164,165* the whole document *; | [A]DE4419318 (MICROELECTRONICS TECH INC [TW]) [A] 72,75,78,81,84,87 * column 4, line 28 - column 6, line 28; figures 3,4 *; | [XA] - PETERSON K E ET AL, "30-V MMIC POWER AMPLIFIER WITH NOVEL BIAS CIRCUITRY*", MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, BOSTON, JUNE 10 - 14, 1991, HEITER G L, (19910610), VOL. 2, no. -, pages 823 - 826, XP000260499 [X] 1-7,9-11,16-20,22-29,31-34,36-40,43-45 * page 823 - page 825, column L; figures 3,4 * [A] 138-145 | [A] - "ADVANCES IN SOLID-STATE POWER SUPPLIES FOR RF HEATING", ELECTRONICS & WIRELESS WORLD, SUTTON, SURREY, GB, (198810), vol. 94, no. 1632, pages 1013 - 1015, 22, XP000001939 [A] 8,21,30,41 * the whole document * | [A] - WHITTAKER ET AL, "The Design, Evaluation & Modelling of a UHF Power Amplifier for a Mobile Satellite Transponder", IEEE INTERNATIONAL CONFERENCE ON COMMUNICATIONS '86, TORONTO, CANADA, (19860622), vol. 3/3, pages 1396 - 1401, XP002067410 [A] 72,75,78,81,84,87,90 * page 1398, column R, line 2 - page 1399, column L, line 59; figures 7,10 * |