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EP1018088
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EP About this file: EP1018088
| EP1018088 - SYSTEM AND METHOD FOR MONITORING AND CONTROLLING GAS PLASMA PROCESSES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 20.08.2010 Database last updated on 21.05.2024 | Most recent event Tooltip | 20.08.2010 | Application deemed to be withdrawn | published on 22.09.2010 [2010/38] | Applicant(s) | For all designated states TOKYO ELECTRON LIMITED TBS Broadcast Center, 3-6 Akasaka 5 chome Minato-ku Tokyo 107 / JP | [N/P] |
| Former [2000/28] | For all designated states Tokyo Electron Limited TBS Broadcast Center, 3-6 Akasaka 5 chome Minato-ku, Tokyo 107 / JP | Inventor(s) | 01 /
JOHNSON, Wayne, L. 13658 S. 32nd Street Phoenix, AZ 85044 / US | 02 /
PARSONS, Richard 14853 N. 46th Street Phoenix, AZ 85032 / US | [2000/28] | Representative(s) | Crawford, Andrew Birkby A.A. Thornton & Co. 235 High Holborn London WC1V 7LE / GB | [N/P] |
| Former [2000/28] | Crawford, Andrew Birkby A.A. Thornton & Co. 235 High Holborn London WC1V 7LE / GB | Application number, filing date | 98950610.0 | 17.09.1998 | [2000/28] | WO1998US18498 | Priority number, date | US19970059151P | 17.09.1997 Original published format: US 59151 P | [2000/28] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9914699 | Date: | 25.03.1999 | Language: | EN | [1999/12] | Type: | A1 Application with search report | No.: | EP1018088 | Date: | 12.07.2000 | Language: | EN | The application published by WIPO in one of the EPO official languages on 25.03.1999 takes the place of the publication of the European patent application. | [2000/28] | Search report(s) | International search report - published on: | US | 25.03.1999 | (Supplementary) European search report - dispatched on: | EP | 13.07.2006 | Classification | IPC: | G06F19/00, G06G7/64, G06G7/66, H01J37/32 | [2006/33] | CPC: |
H01J37/32082 (EP,KR,US);
H01J37/32137 (EP,KR,US);
H01J37/32146 (EP,KR,US);
H01J37/32155 (EP,KR,US);
H01J37/32165 (EP,KR,US);
H01J37/32174 (EP,KR,US);
H01J37/32935 (EP,KR,US);
H01J37/32963 (EP,KR,US);
H01J37/3299 (EP,KR,US);
|
| Former IPC [2000/28] | G06F19/00, G06G7/64, G06G7/66 | Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2000/28] | Title | German: | VORRICHTUNG UND VERFAHREN ZUR ÜBERWACHUNG UND REGELUNG VON GAS PLASMA PROZESSEN | [2000/28] | English: | SYSTEM AND METHOD FOR MONITORING AND CONTROLLING GAS PLASMA PROCESSES | [2000/28] | French: | SYSTEME ET PROCEDE DE CONTROLE ET DE REGULATION DE TRAITEMENTS AU PLASMA | [2000/28] | Entry into regional phase | 06.03.2000 | National basic fee paid | 06.03.2000 | Search fee paid | 06.03.2000 | Designation fee(s) paid | 06.03.2000 | Examination fee paid | Examination procedure | 13.04.1999 | Request for preliminary examination filed International Preliminary Examining Authority: US | 06.03.2000 | Examination requested [2000/28] | 08.02.2007 | Despatch of a communication from the examining division (Time limit: M04) | 06.06.2007 | Reply to a communication from the examining division | 01.04.2010 | Application deemed to be withdrawn, date of legal effect [2010/38] | 10.05.2010 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2010/38] | Fees paid | Renewal fee | 13.09.2000 | Renewal fee patent year 03 | 12.09.2001 | Renewal fee patent year 04 | 12.09.2002 | Renewal fee patent year 05 | 12.09.2003 | Renewal fee patent year 06 | 14.09.2004 | Renewal fee patent year 07 | 14.09.2005 | Renewal fee patent year 08 | 11.09.2006 | Renewal fee patent year 09 | 12.09.2007 | Renewal fee patent year 10 | 31.03.2008 | Renewal fee patent year 11 | Penalty fee | Additional fee for renewal fee | 30.09.2009 | 12 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [DX]US5474648 (PATRICK ROGER [US], et al) [DX] 1,5,12 * abstract * * column 6, line 54 - column 8, line 27 * * figures 2A,2B,6 *; | [DX]US5472561 (WILLIAMS NORMAN [US], et al) [DX] 1-3,5,12-14 * abstract * * column 1, line 54 - column 2, line 3 * * column 5, lines 44-62 * * column 9, line 50 - column 10, line 4 * * figures 1,5 *; | [AD]US5025135 (GESCHE ROLAND [DE], et al) [AD] 1-18 * abstract * * column 2, lines 46-56 * | International search | [Y]US5347460 (GIFFORD GEORGE G [US], et al); | [Y]US5472561 (WILLIAMS NORMAN [US], et al); | [Y]US5474648 (PATRICK ROGER [US], et al); | [Y]US5556549 (PATRICK ROGER [US], et al); | [Y]US5571366 (ISHII NOBUO [JP], et al); | [Y]US5573595 (DIBLE ROBERT D [US]); | [Y]US5658423 (ANGELL DAVID [US], et al) |