EP1001461 - Passivation method of a high-speed power diode by means of an amorphous carbon passivation layer [Right-click to bookmark this link] | |||
Former [2000/20] | High speed power diode having an amorphous carbon passivation layer and corresponding method | ||
[2007/46] | Status | No opposition filed within time limit Status updated on 26.12.2008 Database last updated on 19.10.2024 | Most recent event Tooltip | 20.05.2011 | Lapse of the patent in a contracting state New state(s): GR | published on 22.06.2011 [2011/25] | Applicant(s) | For all designated states SEMIKRON Elektronik GmbH & Co. KG Sigmundstrasse 200 90431 Nürnberg / DE | [2005/34] |
Former [2000/20] | For all designated states Semikron Elektronik GmbH Postfach 82 02 51 D-90253 Nürnberg / DE | Inventor(s) | 01 /
Lutz, Josef Knauerstrasse 11 90443 Nürnberg / DE | 02 /
Lang, Manfred, Dr. Am Hang 8 91126 Schwabach / DE | [2000/20] | Application number, filing date | 99120312.6 | 12.10.1999 | [2000/20] | Priority number, date | DE1998151461 | 09.11.1998 Original published format: DE 19851461 | [2000/20] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | EP1001461 | Date: | 17.05.2000 | Language: | DE | [2000/20] | Type: | B1 Patent specification | No.: | EP1001461 | Date: | 20.02.2008 | Language: | DE | [2008/08] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 31.03.2000 | Classification | IPC: | H01L23/29, H01L23/31, H01L21/314, H01L29/06 | [2000/20] | CPC: |
H01L21/02115 (EP,US);
H01L21/02274 (EP,US);
H01L23/291 (EP);
H01L23/3171 (EP);
H01L29/408 (EP);
H01L2924/0002 (EP);
H01L2924/13055 (EP)
(-)
| C-Set: |
H01L2924/0002, H01L2924/00 (EP)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2000/20] | Title | German: | Verfahren zur Passivierung einer schnellen Leistungsdiode durch eine Passivierungsschicht aus amorphem Kohlenstoff | [2007/46] | English: | Passivation method of a high-speed power diode by means of an amorphous carbon passivation layer | [2007/46] | French: | Méthode de passivation d'une diode rapide de puissance par une couche de passivation en carbone amorphe | [2007/46] |
Former [2000/20] | Schnelle Leistungsdiode mit einer Passivierungsschicht aus amorphem Kohlenstoff und entsprechendes Verfahren | ||
Former [2000/20] | High speed power diode having an amorphous carbon passivation layer and corresponding method | ||
Former [2000/20] | Diode rapide de puissance comprenant une couche de passivation en carbone amorphe et méthode de fabrication correspondante | Examination procedure | 29.05.2000 | Examination requested [2000/30] | 28.08.2003 | Despatch of a communication from the examining division (Time limit: M04) | 10.12.2003 | Reply to a communication from the examining division | 22.02.2007 | Despatch of a communication from the examining division (Time limit: M04) | 21.06.2007 | Reply to a communication from the examining division | 06.11.2007 | Communication of intention to grant the patent | 16.11.2007 | Fee for grant paid | 16.11.2007 | Fee for publishing/printing paid | Opposition(s) | 21.11.2008 | No opposition filed within time limit [2009/05] | Fees paid | Renewal fee | 07.08.2001 | Renewal fee patent year 03 | 12.08.2002 | Renewal fee patent year 04 | 14.08.2003 | Renewal fee patent year 05 | 07.09.2004 | Renewal fee patent year 06 | 30.08.2005 | Renewal fee patent year 07 | 14.09.2006 | Renewal fee patent year 08 | 10.09.2007 | Renewal fee patent year 09 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | CY | 20.02.2008 | DK | 20.02.2008 | FI | 20.02.2008 | IE | 20.02.2008 | IT | 20.02.2008 | NL | 20.02.2008 | SE | 20.05.2008 | GR | 21.05.2008 | ES | 31.05.2008 | PT | 21.07.2008 | AT | 12.10.2008 | GB | 12.10.2008 | LU | 12.10.2008 | BE | 31.10.2008 | CH | 31.10.2008 | LI | 31.10.2008 | MC | 31.10.2008 | [2011/25] |
Former [2010/28] | CY | 20.02.2008 | |
DK | 20.02.2008 | ||
FI | 20.02.2008 | ||
IE | 20.02.2008 | ||
IT | 20.02.2008 | ||
NL | 20.02.2008 | ||
SE | 20.05.2008 | ||
ES | 31.05.2008 | ||
PT | 21.07.2008 | ||
AT | 12.10.2008 | ||
GB | 12.10.2008 | ||
LU | 12.10.2008 | ||
BE | 31.10.2008 | ||
CH | 31.10.2008 | ||
LI | 31.10.2008 | ||
MC | 31.10.2008 | ||
Former [2010/19] | CY | 20.02.2008 | |
DK | 20.02.2008 | ||
FI | 20.02.2008 | ||
IE | 20.02.2008 | ||
IT | 20.02.2008 | ||
NL | 20.02.2008 | ||
SE | 20.05.2008 | ||
ES | 31.05.2008 | ||
PT | 21.07.2008 | ||
AT | 12.10.2008 | ||
GB | 12.10.2008 | ||
BE | 31.10.2008 | ||
CH | 31.10.2008 | ||
LI | 31.10.2008 | ||
MC | 31.10.2008 | ||
Former [2010/06] | CY | 20.02.2008 | |
DK | 20.02.2008 | ||
FI | 20.02.2008 | ||
IE | 20.02.2008 | ||
IT | 20.02.2008 | ||
NL | 20.02.2008 | ||
SE | 20.05.2008 | ||
ES | 31.05.2008 | ||
PT | 21.07.2008 | ||
GB | 12.10.2008 | ||
BE | 31.10.2008 | ||
CH | 31.10.2008 | ||
LI | 31.10.2008 | ||
MC | 31.10.2008 | ||
Former [2009/30] | DK | 20.02.2008 | |
FI | 20.02.2008 | ||
IE | 20.02.2008 | ||
NL | 20.02.2008 | ||
SE | 20.05.2008 | ||
ES | 31.05.2008 | ||
PT | 21.07.2008 | ||
MC | 31.10.2008 | ||
Former [2008/49] | DK | 20.02.2008 | |
FI | 20.02.2008 | ||
IE | 20.02.2008 | ||
NL | 20.02.2008 | ||
SE | 20.05.2008 | ||
ES | 31.05.2008 | ||
PT | 21.07.2008 | ||
Former [2008/48] | DK | 20.02.2008 | |
FI | 20.02.2008 | ||
IE | 20.02.2008 | ||
NL | 20.02.2008 | ||
SE | 20.05.2008 | ||
ES | 31.05.2008 | ||
Former [2008/46] | DK | 20.02.2008 | |
FI | 20.02.2008 | ||
SE | 20.05.2008 | ||
ES | 31.05.2008 | ||
Former [2008/39] | FI | 20.02.2008 | |
ES | 31.05.2008 | ||
Former [2008/35] | ES | 31.05.2008 | Documents cited: | Search | [A]EP0381111 (SIEMENS AG [DE]) [A] 6 * column 3, line 54 - column 4, line 36 *; | [DYA]DE4310444 (SEMIKRON ELEKTRONIK GMBH [DE]) [DY] 1-5 * page 2, line 42 - page 4, line 28; figures 1-3 * [A] 8; | [DYA]DE4410354 (SEMIKRON ELEKTRONIK GMBH [DE]) [DY] 1-5 * column 2, line 31 - column 3, line 63; figures 1-6 * [A] 6-8; | [YA] - BARTHELMESS R ET AL, "Electroactive passivation of high power semiconductor devices with punch through design by hydrogenated amorphous carbon layers (a-C:H)", PROCEEDINGS OF THE 10TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD '98) (IEEE CAT. NO.98CH36212), KYOTO, JP, Inst. Electr. Eng. Japan, Tokyo, JP,, (19980603), ISBN 0-7803-4752-8, pages 181 - 184, XP000801060 [Y] 1-5 * Absatz "Optimized High-Voltage GTO-Diodes (freewheeling diodes)"; Abbildung 4 * * Absatz "The Electroactive Passivation", Zeilen 1-17 * [A] 6-8 DOI: http://dx.doi.org/10.1109/ISPSD.1998.702664 | [A] - FRISCHHOLZ M ET AL, "OBIC MEASUREMENTS ON PLANAR HIGH VOLTAGE P+-N JUNCTIONS WITH DIAMOND-LIKE CARBON FILMS AS PASSIVATION LAYER", DIAMOND AND RELATED MATERIALS, ELSEVIER SEQUOIA SA, LAUSANNE, CH, (19930413), vol. 2, no. 5-7, ISSN 0925-9635, pages 778 - 781, XP000414262 [A] 1,6 * Absätze 2, 3.1; Abbildungen 1, 5 * DOI: http://dx.doi.org/10.1016/0925-9635(93)90222-N | [A] - MASSI M ET AL, "Effects of plasma etching on DLC films", 14TH INT VACUUM CONGRESS (IVC-14). 10TH INT CONF ON SOLID SURFACES (ICSS-10). 5TH INT CONF ON NANOMETRE-SCALE SCIENCE AND TECHNOLOGY (NANO-5). 10TH INT CONF ON QUANTITATIVE SURFACE ANALYSIS, BIRMINGHAM, GB, Thin Solid Films, April 1999, Elsevier, Lausanne, CH,, (19980831), vol. 343-344, ISSN 0040-6090, pages 381 - 384, XP002131416 [A] 6 * abstract * DOI: http://dx.doi.org/10.1016/S0040-6090(98)01691-5 |