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EP1057214
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EP About this file: EP1057214
| EP1057214 - END EFFECTOR FOR WAFER HANDLER IN PROCESSING SYSTEM [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 17.09.2004 Database last updated on 29.07.2024 | Most recent event Tooltip | 17.09.2004 | Application deemed to be withdrawn | published on 03.11.2004 [2004/45] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2000/49] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | Inventor(s) | 01 /
BRODINE, Jeff 21441 Madrone Drive Los Gatos, CA 95030 / US | 02 /
MAROHL, Dan 3461 Outlook Court San Jose, CA 95132 / US | [2001/05] |
| Former [2000/49] | 01 /
BRODINE, Jeff 21441 Madrone Drive Los Gatos, CA 95030 / US | ||
| 02 /
MAROHL, Dan 193 Herlong Avenue San Jose, CA 95171 / US | Representative(s) | Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [2000/49] | Bayliss, Geoffrey Cyril, et al BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | Application number, filing date | 99906990.9 | 11.02.1999 | [2000/49] | WO1999US03114 | Priority number, date | US19980025320 | 18.02.1998 Original published format: US 25320 | [2000/49] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9943021 | Date: | 26.08.1999 | Language: | EN | [1999/34] | Type: | A1 Application with search report | No.: | EP1057214 | Date: | 06.12.2000 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.08.1999 takes the place of the publication of the European patent application. | [2000/49] | Search report(s) | International search report - published on: | EP | 26.08.1999 | Classification | IPC: | H01L21/00 | [2000/49] | CPC: |
H01L21/68707 (EP,US);
H01L21/00 (KR);
H01L21/67742 (EP,US);
H01L21/67766 (EP,US);
Y10S414/141 (EP,US)
| Designated contracting states | BE, DE, GB, NL [2000/49] | Title | German: | GREIFER FÜR EINEN WAFER-MANIPULATOR IN EINEM BEHANDLUNGSSYSTEM | [2000/49] | English: | END EFFECTOR FOR WAFER HANDLER IN PROCESSING SYSTEM | [2000/49] | French: | PREHENSEUR SERVANT A MANIPULER LES TRANCHES DE SILICIUM DANS UN SYSTEME DE TRAITEMENT | [2000/49] | Entry into regional phase | 28.08.2000 | National basic fee paid | 28.08.2000 | Designation fee(s) paid | 28.08.2000 | Examination fee paid | Examination procedure | 17.08.1999 | Request for preliminary examination filed International Preliminary Examining Authority: US | 28.08.2000 | Examination requested [2000/49] | 25.10.2001 | Amendment by applicant (claims and/or description) | 17.12.2003 | Despatch of a communication from the examining division (Time limit: M04) | 28.04.2004 | Application deemed to be withdrawn, date of legal effect [2004/45] | 02.06.2004 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2004/45] | Fees paid | Renewal fee | 02.02.2001 | Renewal fee patent year 03 | 01.02.2002 | Renewal fee patent year 04 | 03.02.2003 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 29.02.2004 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]EP0342940 (VEECO INSTR INC [US]) [A] 1,7,14,20,27,33 * abstract *; | [A]US5004399 (SULLIVAN HAROLD W [US], et al) [A] 1,7,13,20,26,27,33,39 * abstract * * column 3, lines 61-68 *; | [YA]US5102495 (MAHER JOSEPH A [US], et al) [Y] 1,14,27 * abstract * * column 6, lines 12-19 * * column 7, lines 23-34 * [A] 7,13,20,26,33,39; | [A]EP0776035 (KOKUSAI ELECTRIC CO LTD [JP]) [A] 1,5,7,11,14,18,20,26,27,31,33,37 * abstract ** column 7, lines 2-32 *; | [YA]EP0820091 (APPLIED MATERIALS INC [US]) [Y] 1,14,27 * abstract * * column 12, lines 44-58 * [A] 7,13,20,26,33,39 |