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EP1090329
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EP About this file: EP1090329
| EP1090329 - ALIGNMENT SIMULATION [Right-click to bookmark this link] | Status | The application has been refused Status updated on 19.09.2008 Database last updated on 20.07.2024 | Most recent event Tooltip | 19.09.2008 | Refusal of application | published on 22.10.2008 [2008/43] | Applicant(s) | For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100 / JP | [N/P] |
| Former [2001/15] | For all designated states NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100 / JP | Inventor(s) | 01 /
COON, Paul, Derek 875 Newport Circle Redwood City, CA 94065 / US | 02 /
CHAU, Henry, Kwok, Pang 90 Niagra Avenue San Francisco, CA 94112 / US | 03 /
AIYER, Arun, Ananth 43 Dolerita Court Fremont, CA 94539 / US | [2001/15] | Representative(s) | Burke, Steven David, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB | [N/P] |
| Former [2001/15] | Burke, Steven David, et al R.G.C. Jenkins & Co. 26 Caxton Street London SW1H 0RJ / GB | Application number, filing date | 99920243.5 | 29.04.1999 | [2001/15] | WO1999US09538 | Priority number, date | US19980071378 | 30.04.1998 Original published format: US 71378 | [2001/15] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO9956174 | Date: | 04.11.1999 | Language: | EN | [1999/44] | Type: | A1 Application with search report | No.: | EP1090329 | Date: | 11.04.2001 | Language: | EN | The application published by WIPO in one of the EPO official languages on 04.11.1999 takes the place of the publication of the European patent application. | [2001/15] | Search report(s) | International search report - published on: | US | 04.11.1999 | (Supplementary) European search report - dispatched on: | EP | 09.08.2002 | Classification | IPC: | G03B27/42, G03B27/58 | [2001/15] | CPC: |
G03F9/7092 (EP,US);
G03F9/7076 (EP,US)
| Designated contracting states | DE, GB, NL [2001/15] | Title | German: | AUSRICHTUNGSSIMULATION | [2001/15] | English: | ALIGNMENT SIMULATION | [2001/15] | French: | SIMULATION D'ALIGNEMENT | [2001/15] | Entry into regional phase | 19.07.2000 | National basic fee paid | 19.07.2000 | Search fee paid | 19.07.2000 | Designation fee(s) paid | 19.07.2000 | Examination fee paid | Examination procedure | 19.07.2000 | Examination requested [2001/15] | 30.01.2003 | Despatch of a communication from the examining division (Time limit: M06) | 16.09.2003 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 25.09.2003 | Reply to a communication from the examining division | 17.04.2008 | Date of oral proceedings | 20.05.2008 | Date of oral proceedings | 29.05.2008 | Despatch of communication that the application is refused, reason: substantive examination [2008/43] | 29.05.2008 | Minutes of oral proceedings despatched | 10.06.2008 | Application refused, date of legal effect [2008/43] | Request for further processing for: | 25.09.2003 | Request for further processing filed | 25.09.2003 | Full payment received (date of receipt of payment) Request granted | 10.10.2003 | Decision despatched | Fees paid | Renewal fee | 12.04.2001 | Renewal fee patent year 03 | 12.04.2002 | Renewal fee patent year 04 | 14.04.2003 | Renewal fee patent year 05 | 15.04.2004 | Renewal fee patent year 06 | 13.04.2005 | Renewal fee patent year 07 | 12.04.2006 | Renewal fee patent year 08 | 12.04.2007 | Renewal fee patent year 09 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 26.06.2000 | DE M01 Fee paid on 19.07.2000 | 26.06.2000 | GB M01 Fee paid on 19.07.2000 | 26.06.2000 | NL M01 Fee paid on 19.07.2000 | Penalty fee Rule 85b EPC 1973 | 26.06.2000 | M01 Fee paid on 19.07.2000 | Additional fee for renewal fee | 30.04.2008 | 10 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JPH07167614 ; | [X]JPH07254546 | [X] - PATENT ABSTRACTS OF JAPAN, (19951130), vol. 1995, no. 10, & JP07167614 A 19950704 (HITACHI LTD) [X] 1,19,24,32,38,41,44,47,50 * abstract * * paragraph [0011] - paragraph [0023] * * figure - * | [X] - PATENT ABSTRACTS OF JAPAN, (19960229), vol. 1996, no. 02, & JP07254546 A 19951003 (TOSHIBA CORP) [X] 1,19,24,32,38,41,44,47,50 * abstract * | International search | [X]US5680200 (SUGAYA AYAKO [JP], et al); | [YP]US5830606 (OKAMOTO YOSHIHIKO [JP]); | [Y]US5424552 (TSUJI TOSHIHIKO [JP], et al); | [A]US5484671 (OKAMOTO YOSHIHIKO [JP]) |