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EP1095304

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EP About this file: EP1095304

EP1095304 - MULTIPLEXER FOR LASER LITHOGRAPHY [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 04.11.2005 Database last updated on 24.04.2024
Most recent event Tooltip	04.11.2005	Application deemed to be withdrawn	published on 21.12.2005 [2005/51]
Applicant(s)	For all designated states Cymer, Inc. 17075 Thornmint Court San Diego, CA 92127 / US
	[2004/14]
Former [2001/18]	For all designated states Cymer, Inc. 16750 Via del Campo Court San Diego, CA 92127-1712 / US
Inventor(s)	01 / OZARSKI, Robert, G. 13894 Lake Poway Road Poway, CA 92064 / US
	02 / ERSHOV, Alexander I. 11312 Meadow Flower Place San Diego, CA 92127 / US
	[2001/18]
Representative(s)	Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstrasse 4 80802 München / DE
	[N/P]
Former [2001/18]	Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München / DE
Application number, filing date	99931850.4	22.06.1999
	[2001/18]
	WO1999US14003
Priority number, date	US19980112631	09.07.1998 Original published format: US 112631
	[2001/18]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO0003284
	Date:	20.01.2000
	Language:	EN
	[2000/03]
	Type:	A1 Application with search report
	No.:	EP1095304
	Date:	02.05.2001
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 20.01.2000 takes the place of the publication of the European patent application.
	[2001/18]
Search report(s)	International search report - published on:	US	20.01.2000
	(Supplementary) European search report - dispatched on:	EP	18.03.2005
Classification	IPC:	G02B26/08, G03F7/20	[2005/18]
	CPC:	G02B26/08 (KR); G03F7/7005 (EP,US); G03F7/70991 (EP,US)
	Former IPC [2001/18]	G02B26/08
Designated contracting states	BE, DE, ES, FR, GB, IT, NL [2001/18]
Title	German:	MULTIPLEXER FÜR LASER-LITHOGRAPHE	[2001/18]
	English:	MULTIPLEXER FOR LASER LITHOGRAPHY	[2001/18]
	French:	MULTIPLEXEUR POUR LITHOGRAPHIE AU LASER	[2001/18]
Entry into regional phase	05.01.2001	National basic fee paid
	05.01.2001	Search fee paid
	05.01.2001	Designation fee(s) paid
	05.01.2001	Examination fee paid
Examination procedure	02.02.2000	Request for preliminary examination filed International Preliminary Examining Authority: US
	05.01.2001	Amendment by applicant (claims and/or description)
	05.01.2001	Examination requested [2001/18]
	03.06.2005	Application deemed to be withdrawn, date of legal effect [2005/51]
	13.07.2005	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2005/51]
Fees paid	Renewal fee
	28.06.2001	Renewal fee patent year 03
	28.06.2002	Renewal fee patent year 04
	27.06.2003	Renewal fee patent year 05
	23.06.2004	Renewal fee patent year 06
	21.06.2005	Renewal fee patent year 07
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[A]US5091744 (OMATA TAKASHI [JP]) [A] 1 * abstract * * figure 6 * * column 1, line 17 - line 21 * * column 6, line 1 - column 7, line 2 *;
		[A]JPH07312342 ;
		[A]US5036042 (HED AHARON Z [US]) [A] 1 * abstract * * figure 5 * * column 1, line 5 - line 13 * * column 4, line 58 - column 6, line 18 *;
		[A]JPS6175523
		[A] - PATENT ABSTRACTS OF JAPAN, (19960329), vol. 1996, no. 03, & JP07312342 A 19951128 (NIKON CORP) [A] 1 * abstract * * figures 1,2 *
		[A] - PATENT ABSTRACTS OF JAPAN, (19860822), vol. 010, no. 244, Database accession no. (E - 430), & JP61075523 A 19860417 (CANON INC) [A] 1 * abstract * * figures 1-11 *
	International search	[AP]US5880817 (HASHIMOTO SUMIO [JP]);
		[A]US5036042 (HED AHARON Z [US]);
		[A]US5576901 (HANCHETT NEVILLE [US]);
		[A]US3993402 (FREDRICK JR WILLIAM G)

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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