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Extract from the Register of European Patents

EP About this file: EP1142002

EP1142002 - APPARATUS FOR PROCESSING WAFERS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  08.09.2006
Database last updated on 19.10.2024
Most recent event   Tooltip04.05.2007Lapse of the patent in a contracting state
New state(s): CY, LU		published on 06.06.2007  [2007/23]
Applicant(s)For all designated states
ASML Holding N.V.
De Run 6501
5504 DR Veldhoven / NL
[N/P]
Former [2005/52]For all designated states
ASML Holding N.V.
De Run 6501
5504 DR Veldhoven / NL
Former [2001/41]For all designated states
Silicon Valley Group, Inc.
Suite 400, 101 Metro Drive
San Jose, CA 95110 / US
Inventor(s)01 / PARK, Jae, Heon
10490 Stokes Avenue
Cupertino, CA 95014 / US
 [2001/41]
Representative(s)McGowan, Cathrine, et al
D Young & Co LLP
120 Holborn
London EC1N 2DY / GB
[N/P]
Former [2005/52]McGowan, Cathrine, et al
D Young & Co 120 Holborn
London EC1N 2DY / GB
Former [2004/41]McGowan, Cathrine
D Young & Co, 21 New Fetter Lane
London EC4A 1DA / GB
Former [2001/41]Potter, Julian Mark, et al
D. Young & Co., 21 New Fetter Lane
London EC4A 1DA / GB
Application number, filing date99963012.202.12.1999
[2001/41]
WO1999US28753
Priority number, dateUS1998022311130.12.1998         Original published format: US 223111
[2001/41]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO0041222
Date:13.07.2000
Language:EN
[2000/28]
Type: A1 Application with search report 
No.:EP1142002
Date:10.10.2001
Language:EN
The application published by WIPO in one of the EPO official languages on 13.07.2000 takes the place of the publication of the European patent application.
[2001/41]
Type: B1 Patent specification 
No.:EP1142002
Date:02.11.2005
Language:EN
[2005/44]
Search report(s)International search report - published on:EP13.07.2000
ClassificationIPC:H01L21/00
[2001/41]
CPC:
H01L21/67178 (EP,US); H01L21/00 (KR); H01L21/67184 (EP,US);
Y10S414/137 (EP,US)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE [2001/41]
TitleGerman:VORRICHTUNG ZUR SCHEIBENBEHANDLUNG[2005/23]
English:APPARATUS FOR PROCESSING WAFERS[2001/41]
French:DISPOSITIF DE FABRICATION DES PLAQUETTES[2001/41]
Former [2001/41]VORRICHTUNG ZUM SCHEIBENBEHANDLUNG
Entry into regional phase20.07.2001National basic fee paid 
20.07.2001Designation fee(s) paid 
20.07.2001Examination fee paid 
Examination procedure17.07.2000Request for preliminary examination filed
International Preliminary Examining Authority: EP
20.07.2001Examination requested  [2001/41]
08.04.2004Despatch of a communication from the examining division (Time limit: M04)
23.07.2004Reply to a communication from the examining division
22.10.2004Despatch of a communication from the examining division (Time limit: M06)
16.03.2005Reply to a communication from the examining division
11.05.2005Communication of intention to grant the patent
26.08.2005Fee for grant paid
26.08.2005Fee for publishing/printing paid
Opposition(s)03.08.2006No opposition filed within time limit [2006/41]
Fees paidRenewal fee
31.12.2001Renewal fee patent year 03
23.12.2002Renewal fee patent year 04
29.12.2003Renewal fee patent year 05
23.12.2004Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT02.11.2005
BE02.11.2005
CH02.11.2005
FI02.11.2005
LI02.11.2005
CY02.12.2005
IE02.12.2005
MC31.12.2005
LU02.01.2006
DK02.02.2006
GR02.02.2006
SE02.02.2006
ES13.02.2006
PT03.04.2006
[2007/23]
Former [2006/49]AT02.11.2005
BE02.11.2005
CH02.11.2005
FI02.11.2005
LI02.11.2005
IE02.12.2005
MC31.12.2005
DK02.02.2006
GR02.02.2006
SE02.02.2006
ES13.02.2006
PT03.04.2006
Former [2006/40]AT02.11.2005
BE02.11.2005
CH02.11.2005
FI02.11.2005
LI02.11.2005
MC31.12.2005
DK02.02.2006
GR02.02.2006
SE02.02.2006
ES13.02.2006
Former [2006/38]AT02.11.2005
BE02.11.2005
CH02.11.2005
FI02.11.2005
LI02.11.2005
DK02.02.2006
GR02.02.2006
SE02.02.2006
ES13.02.2006
Former [2006/36]AT02.11.2005
BE02.11.2005
CH02.11.2005
FI02.11.2005
LI02.11.2005
DK02.02.2006
SE02.02.2006
ES13.02.2006
Former [2006/34]AT02.11.2005
CH02.11.2005
FI02.11.2005
LI02.11.2005
DK02.02.2006
SE02.02.2006
ES13.02.2006
Former [2006/33]CH02.11.2005
FI02.11.2005
LI02.11.2005
SE02.02.2006
ES13.02.2006
Former [2006/27]FI02.11.2005
SE02.02.2006
Former [2006/25]FI02.11.2005
Cited inInternational search[Y]US5766824  (BATCHELDER WILLIAM T [US], et al) [Y] 1-15,18,20-22,33-47 * abstract ** column 1, line 29 - column 6, line 59 *;
 [XY]US5826129  (HASEBE KEIZO [JP], et al) [X] 16,17,19,23-32 * abstract * * column 1, line 5 - column 2, line 45 * * column 4, line 14 - column 5, line 58 * [Y] 1-15,18,20-22,33-47
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.