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EP1063678
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EP About this file: EP1063678
| EP1063678 - Device for microwave powered plasma generation in a cavity [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 01.06.2007 Database last updated on 13.11.2024 | Most recent event Tooltip | 20.11.2009 | Change - representative | published on 23.12.2009 [2009/52] | Applicant(s) | For all designated states Leybold Optics GmbH Siemensstrasse 88 63775 Alzenau / DE | [2003/15] |
| Former [2000/52] | For all designated states Leybold Systems GmbH Wilhelm-Rohn-Strasse 25 63450 Hanau / DE | Inventor(s) | 01 /
Beckmann, Rudolf Planstrasse 37 63454 Hanau / DE | 02 /
Schulte, Thomas Schützenstrasse 5 49779 Niederlangen / DE | 03 /
Naumann, Thorsten Holzgasse 18 63829 Krombach / DE | 04 /
Grünwald, Heinrich Freigerichtstrasse 16 61194 Niddatal / DE | [2000/52] | Representative(s) | Pohlmann, Bernd Michael, et al RPK Patentanwälte Reinhardt, Pohlmann und Kaufmann Partnerschaft mbB Rossmarkt 12 60311 Frankfurt am Main / DE | [N/P] |
| Former [2009/52] | Pohlmann, Bernd Michael, et al Reinhardt & Pohlmann Patentanwälte Rossmarkt 12 60311 Frankfurt am Main / DE | ||
| Former [2005/49] | Pohlmann, Bernd Michael, et al Reinhardt & Pohlmann Partnerschaft Günthersburgallee 40 60316 Frankfurt am Main / DE | ||
| Former [2000/52] | Schickedanz, Willi, Dipl.-Ing. Langener Strasse 68 63073 Offenbach / DE | Application number, filing date | 00112949.3 | 20.06.2000 | [2000/52] | Priority number, date | DE1999128876 | 24.06.1999 Original published format: DE 19928876 | [2000/52] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | EP1063678 | Date: | 27.12.2000 | Language: | DE | [2000/52] | Type: | A3 Search report | No.: | EP1063678 | Date: | 07.01.2004 | [2004/02] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 21.11.2003 | Classification | IPC: | H01J37/32 | [2000/52] | CPC: |
H01J37/32192 (EP);
H01J37/32623 (EP)
| Designated contracting states | CH, DE, FR, GB, IT, LI [2004/40] |
| Former [2000/52] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Vorrichtung zur Erzeugung eines Plasmas in einer Kammer durch Mikrowellenanregung | [2000/52] | English: | Device for microwave powered plasma generation in a cavity | [2000/52] | French: | Dispositif de production d'un plasma excité par microondes dans une cavité | [2000/52] | Examination procedure | 10.01.2004 | Examination requested [2004/12] | 01.01.2007 | Application deemed to be withdrawn, date of legal effect [2007/27] | 06.02.2007 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2007/27] | Fees paid | Renewal fee | 21.05.2002 | Renewal fee patent year 03 | 19.05.2003 | Renewal fee patent year 04 | 19.05.2004 | Renewal fee patent year 05 | 19.05.2005 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 30.06.2006 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US5202095 (HOUCHIN RYUZOH [US], et al) [A] 1,2,4,5,14,15 * column 2, line 45 - line 62 *; | [A]US5478459 (LATZ RUDOLF [DE]) [A] 1,3,5 * column 2, line 17 - line 58 * * figure 1 *; | [A]EP0335675 (CANON KK [JP], et al) [A] 6,8 * column 10, line 48 - column 11, line 27; figure 1 *; | [A]US4908486 (FRY ALLAN R [AU]) [A] 1 * column 2, line 10 - line 42 * * column 3, line 11 - line 19 * |