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EP1069599

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EP About this file: EP1069599

EP1069599 - Apparatus for deposition of thin films on wafers [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 15.10.2010 Database last updated on 17.09.2024
Most recent event Tooltip	15.10.2010	No opposition filed within time limit	published on 17.11.2010 [2010/46]
Applicant(s)	For all designated states MooHan Co., Ltd 106, Dasankwan Venturetown, 1687-2, Sinil-dong Daeduck-ku Dae Jeun Megacity 306-230 / KR
	[2009/50]
Former [2001/03]	For all designated states MooHan Co., Ltd 106, Dasankwan Venturetown, 1687-2, Sinil-dong Daeduck-ku, Dae Jeun Megacity 306-230 / KR
Inventor(s)	01 / Kim, Yong il 311-204, Songgang Green Apt., 199 Songgang-dong Yousung-ku, Dae Jeun Megacity 305-751 / KR
	02 / Shin, Joong Ho 312-1403, Songgang Green Apt., 199 Songgang-dong Yousung-ku, Dae Jeun Megacity 305-751 / KR
	03 / Yun, Yeo Heung 203-801, Songgang maeul Apt., 10-3 Songgang-dong Yousung-ku, Dae Jeun Megacity 305-802 / KR
	[2001/03]
Representative(s)	Merkle, Gebhard Ter Meer Steinmeister & Partner Patentanwälte mbB Mauerkircherstrasse 45 81679 München / DE
	[N/P]
Former [2001/03]	Merkle, Gebhard TER MEER STEINMEISTER & PARTNER GbR, Patentanwälte, Mauerkircherstrasse 45 81679 München / DE
Application number, filing date	00115133.1	12.07.2000
	[2001/03]
Priority number, date	KR19990028609	15.07.1999 Original published format: KR 9928609
	[2001/03]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	EP1069599
	Date:	17.01.2001
	Language:	EN
	[2001/03]
	Type:	A3 Search report
	No.:	EP1069599
	Date:	04.12.2002
	[2002/49]
	Type:	B1 Patent specification
	No.:	EP1069599
	Date:	09.12.2009
	Language:	EN
	[2009/50]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	18.10.2002
Classification	IPC:	H01L21/00	[2001/03]
	CPC:	C23C16/45544 (EP,US); H01L21/20 (KR); C23C16/4412 (EP,US); C23C16/45519 (EP,US); C23C16/45561 (EP,US); C23C16/4584 (EP,US); (+) C23C16/481 (EP,US); C30B25/12 (EP,US) (-)
Designated contracting states	DE, FR [2003/35]
Former [2001/03]	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE
Title	German:	Vorrichtung zur Abscheidung von Dünnschichten auf Wafern	[2001/03]
	English:	Apparatus for deposition of thin films on wafers	[2001/03]
	French:	Appareil de déposition de films minces sur des plaquettes semiconductrices	[2001/03]
Examination procedure	04.06.2003	Amendment by applicant (claims and/or description)
	04.06.2003	Examination requested [2003/32]
	01.07.2003	Loss of particular rights, legal effect: designated state(s)
	24.09.2003	Despatch of communication of loss of particular rights: designated state(s) AT, BE, CH, CY, DK, ES, FI, GB, GR, IE, IT, LU, MC, NL, PT, SE
	26.04.2007	Despatch of a communication from the examining division (Time limit: M06)
	29.10.2007	Reply to a communication from the examining division
	25.02.2008	Despatch of a communication from the examining division (Time limit: M04)
	25.06.2008	Reply to a communication from the examining division
	08.07.2009	Communication of intention to grant the patent
	28.10.2009	Fee for grant paid
	28.10.2009	Fee for publishing/printing paid
Opposition(s)	10.09.2010	No opposition filed within time limit [2010/46]
Fees paid	Renewal fee
	17.07.2002	Renewal fee patent year 03
	17.07.2003	Renewal fee patent year 04
	14.07.2004	Renewal fee patent year 05
	28.07.2005	Renewal fee patent year 06
	19.07.2006	Renewal fee patent year 07
	23.07.2007	Renewal fee patent year 08
	30.07.2008	Renewal fee patent year 09
	20.07.2009	Renewal fee patent year 10
	Penalty fee
	Penalty fee Rule 85a EPC 1973
	10.07.2003	AT M01 Not yet paid
	10.07.2003	BE M01 Not yet paid
	10.07.2003	CH M01 Not yet paid
	10.07.2003	CY M01 Not yet paid
	10.07.2003	DK M01 Not yet paid
	10.07.2003	ES M01 Not yet paid
	10.07.2003	FI M01 Not yet paid
	10.07.2003	GB M01 Not yet paid
	10.07.2003	GR M01 Not yet paid
	10.07.2003	IE M01 Not yet paid
	10.07.2003	IT M01 Not yet paid
	10.07.2003	LU M01 Not yet paid
	10.07.2003	MC M01 Not yet paid
	10.07.2003	NL M01 Not yet paid
	10.07.2003	PT M01 Not yet paid
	10.07.2003	SE M01 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[A]JPH05179428 ;
		[A]JPH0982593 ;
		[A]JPH01140712 ;
		[X]US3437043 (SANDERS DAVID H, et al) [X] 20* the whole document *;
		[A]US4513021 (PURDES ANDREW J [US], et al) [A] 19 * the whole document *;
		[A]US4820106 (WALDE MICHAEL [DE], et al) [A] 1-6 * figures 3,5 *;
		[X]US4911101 (BALLINGALL III JAMES M [US], et al) [X] 7-11,13,14 * figure 3 * * the whole document *;
		[X]US5522934 (SUZUKI AKIRA [JP], et al) [X] 19 * the whole document * * figure 2 *;
		[A]US5575854 (JINNOUCHI SHIMPEI [JP], et al) [A] 7-14 * the whole document *;
		[X]WO9714180 (SEMITOOL INC [US], et al) [X] 7-14 * the whole document * * claims 1-140 *;
		[X]US5647945 (MATSUSE KIMIHIRO [JP], et al) [X] 7-11,13,14,19 * column 1, line 30 - line 67 * * column 16, line 35 - line 45 * * column 20, line 42 - line 62 * * claims 1,2 * * figures 4,5,7,8 *;
		[X]US5683518 (MOORE GARY M [US], et al) [X] 1-6,15-18 * column 19, line 65 - column 20, line 14 * * figures 2B,14 * * claims 1-51 *;
		[XA]WO9744820 (C V RESEARCH CORP [JP], et al) [X] 1-6 [A] 15-18;
		[A]EP0833374 (KOKUSAI ELECTRIC CO LTD [JP]) [A] 1-6 * figures 7-10 *;
		US6030459 [ ] (KAWAURA HIROSHI [JP]) [ ] * the whole document *;
		[PX]US6048798 (GADGIL PRASHANT [US], et al) [PX] 19 * column 4, line 40 - column 5, line 36 *
		[A] - PATENT ABSTRACTS OF JAPAN, (19931102), vol. 017, no. 597, Database accession no. (C - 1127), & JP05179428 A 19930720 (MATSUSHITA ELECTRIC IND CO LTD) [A] 1-6 * abstract *
		[A] - PATENT ABSTRACTS OF JAPAN, (19970731), vol. 1997, no. 07, & JP09082593 A 19970328 (NIPPON STEEL CORP) [A] 1-6 * abstract *
		[A] - PATENT ABSTRACTS OF JAPAN, (19890904), vol. 013, no. 396, Database accession no. (E - 815), & JP01140712 A 19890601 (FUJITSU LTD) [A] 7-14 * abstract * * figures 1,2 *
	Examination	EP0445596
	by applicant	US5683518

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