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Extract from the Register of European Patents

EP Citations: EP1039502

Cited inSearch
Type:Patent literature
Publication No.:US5082517  [A]
 (MOSLEHI MEHRDAD M [US]) [A] 1,8,13,16,19 * column 7, line 67 - column 8, line 14 *;
Type:Patent literature
Publication No.:US5423942  [A]
 (ROBBINS ROGER A [US], et al) [A] 1,8,13,16,19 * column 1, line 64 - column 2, line 23 * * column 3, line 3 - line 28 * * column 4, line 3 - line 25 *;
Type:Patent literature
Publication No.:EP0680071  [A]
 (APPLIED MATERIALS INC [US]) [A] 1,8,13,16,19 * column 6, line 24 - column 7, line 16 ** figure 3 *