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EP1041619
European procedure
Extract from the Register of European Patents
EP About this file: EP1041619
| EP1041619 - System and method for the real time determination of the in situ emissivity of a workpiece during processing [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 24.07.2009 Database last updated on 16.11.2024 | Most recent event Tooltip | 07.05.2010 | Lapse of the patent in a contracting state New state(s): GB | published on 09.06.2010 [2010/23] | Applicant(s) | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915-1053 / US | [2008/38] |
| Former [2000/40] | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915 / US | Inventor(s) | 01 /
Hebb, Jeffrey Paul 240 Heath Street Jamaica Plain, Massachusetts 01230 / US | 02 /
Shajii, Ali 26 Standish Drive Canton, Massachusetts 02021 / US | [2000/40] | Representative(s) | Burke, Steven David, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB | [N/P] |
| Former [2000/40] | Burke, Steven David, et al R.G.C. Jenkins & Co. 26 Caxton Street London SW1H 0RJ / GB | Application number, filing date | 00302508.7 | 28.03.2000 | [2000/40] | Priority number, date | US19990280308 | 29.03.1999 Original published format: US 280308 | [2000/40] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1041619 | Date: | 04.10.2000 | Language: | EN | [2000/40] | Type: | A3 Search report | No.: | EP1041619 | Date: | 15.01.2003 | [2003/03] | Type: | B1 Patent specification | No.: | EP1041619 | Date: | 17.09.2008 | Language: | EN | [2008/38] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 28.11.2002 | Classification | IPC: | H01L21/66, G01J5/00 | [2003/03] | CPC: |
H01L22/26 (EP,US);
B65D43/021 (KR);
B65D85/50 (KR);
G01J5/0003 (EP,US);
H01L2924/0002 (EP,US)
| C-Set: |
H01L2924/0002, H01L2924/00 (EP,US)
|
| Former IPC [2000/40] | H01L21/66 | Designated contracting states | DE, FR, GB, IT, NL [2003/40] |
| Former [2000/40] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | System und Methode zur Echtzeiterfassung der in-situ Emission eines Werkstückes bei der Bearbeitung | [2000/40] | English: | System and method for the real time determination of the in situ emissivity of a workpiece during processing | [2000/40] | French: | Systéme et methode en temps reel de la emissivité in-situ d'une pièce pendant d'usinage | [2000/40] | Examination procedure | 08.07.2003 | Examination requested [2003/36] | 30.11.2006 | Despatch of a communication from the examining division (Time limit: M06) | 02.05.2007 | Reply to a communication from the examining division | 28.11.2007 | Communication of intention to grant the patent | 14.05.2008 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time | 18.07.2008 | Fee for grant paid | 18.07.2008 | Fee for publishing/printing paid | Opposition(s) | 18.06.2009 | No opposition filed within time limit [2009/35] | Request for further processing for: | The application is deemed to be withdrawn due to failure to fulfill actions required for granting the patent | 18.07.2008 | Request for further processing filed | Fees paid | Renewal fee | 04.03.2002 | Renewal fee patent year 03 | 05.03.2003 | Renewal fee patent year 04 | 04.03.2004 | Renewal fee patent year 05 | 04.03.2005 | Renewal fee patent year 06 | 06.03.2006 | Renewal fee patent year 07 | 05.03.2007 | Renewal fee patent year 08 | 10.03.2008 | Renewal fee patent year 09 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | NL | 17.09.2008 | GB | 28.03.2009 | [2010/23] |
| Former [2009/25] | NL | 17.09.2008 | Documents cited: | Search | [A]US5326173 (EVANS DAN [CA], et al) [A] 1,6,19,20 * abstract *; | [A]US5601366 (PARANJPE AJIT P [US]) [A] 1,19* column 6, lines 14-24; claim 1 *; | [A]US5823681 (CABIB DARIO [IL], et al) [A] 1-3,19-21 * column 3, line 55 - column 4, line 25; figures 1,8 * |