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EP1087437
European procedure
Extract from the Register of European Patents
EP About this file: EP1087437
| EP1087437 - A multistep chamber cleaning process using a remote plasma that also enhances film gap fill [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 29.05.2009 Database last updated on 14.11.2024 | Most recent event Tooltip | 17.07.2009 | Lapse of the patent in a contracting state New state(s): IE | published on 19.08.2009 [2009/34] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2008/30] | For all designated states APPLIED MATERIALS, INC. 3050 Bowers Avenue Santa Clara, California 95054 / US | ||
| Former [2001/13] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | Inventor(s) | 01 /
Xia, Li-Qun 868 Leith Avenue Santa Clara, CA 95054 / US | 02 /
Yieh, Ellie 5888 Pistoia Way San Jose, CA 95138 / US | [2001/13] | Representative(s) | Setna, Rohan P., et al Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | [N/P] |
| Former [2004/34] | Setna, Rohan P., et al Boult Wade Tennant Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | ||
| Former [2001/13] | Allard, Susan Joyce, et al BOULT WADE TENNANT, Verulam Gardens 70 Gray's Inn Road London WC1X 8BT / GB | Application number, filing date | 00308252.6 | 21.09.2000 | [2001/13] | Priority number, date | US19990400338 | 21.09.1999 Original published format: US 400338 | [2001/13] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1087437 | Date: | 28.03.2001 | Language: | EN | [2001/13] | Type: | A3 Search report | No.: | EP1087437 | Date: | 07.06.2006 | [2006/23] | Type: | B1 Patent specification | No.: | EP1087437 | Date: | 23.07.2008 | Language: | EN | [2008/30] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 27.04.2006 | Classification | IPC: | H01L21/762, H01L21/316, H01L21/311, H01L21/3065, H01L21/00 | [2001/13] | CPC: |
C23C16/401 (EP,US);
H01L21/304 (KR);
H01L21/31625 (US);
C23C16/4405 (EP,US);
H01L21/02129 (EP,US);
H01L21/02131 (EP,US);
H01L21/0228 (EP,US);
H01L21/314 (US);
H01L21/67069 (EP,US);
H01L21/67253 (EP,US);
H01L21/67276 (EP,US);
H01L21/02164 (EP,US);
| Designated contracting states | BE, DE, GB, IE, NL [2007/07] |
| Former [2001/13] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE | Title | German: | Mehrschrittiges Verfahren zum Reinigen einer Prozesskammer unter Verwendung eines entfernt erzeugten Plasmas, das ebenfalls die Filmlückenfülleigenschaften verbessert | [2001/13] | English: | A multistep chamber cleaning process using a remote plasma that also enhances film gap fill | [2001/13] | French: | Procédé de nettoyage d'une chambre de traitement à étapes multiples utilisant un plasma à distance, ce procédé améliorant également le remplissage d'espace lors de la déposition subséquent d'un film | [2007/30] |
| Former [2001/13] | Procédé de nettoyage d'une chambre de traitement à étapes multiples utilisant un plasma à distance qui aussi améliore la capacité de remplissage des espaces de couche | Examination procedure | 22.11.2006 | Examination requested [2007/01] | 21.12.2006 | Despatch of a communication from the examining division (Time limit: M04) | 19.04.2007 | Reply to a communication from the examining division | 26.07.2007 | Communication of intention to grant the patent | 11.01.2008 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time | 20.03.2008 | Fee for grant paid | 20.03.2008 | Fee for publishing/printing paid | Opposition(s) | 24.04.2009 | No opposition filed within time limit [2009/27] | Request for further processing for: | The application is deemed to be withdrawn due to failure to fulfill actions required for granting the patent | 20.03.2008 | Request for further processing filed | 20.03.2008 | Full payment received (date of receipt of payment) Request granted | 09.05.2008 | Decision despatched | Fees paid | Renewal fee | 16.09.2002 | Renewal fee patent year 03 | 04.09.2003 | Renewal fee patent year 04 | 06.09.2004 | Renewal fee patent year 05 | 05.09.2005 | Renewal fee patent year 06 | 08.09.2006 | Renewal fee patent year 07 | 05.09.2007 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | BE | 23.07.2008 | NL | 23.07.2008 | IE | 21.09.2008 | [2009/34] |
| Former [2009/19] | BE | 23.07.2008 | |
| NL | 23.07.2008 | ||
| Former [2009/12] | NL | 23.07.2008 | Documents cited: | Search | [XA]EP0843348 (APPLIED MATERIALS INC [US]) [X] 11 * abstract * * page 27, line 1 - page 28, line 11 *[A] 1-10 |