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EP About this file: EP1047122

EP1047122 - Method of anisotropic etching of substrates [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 03.08.2007 Database last updated on 24.08.2024
Most recent event Tooltip	07.08.2009	Lapse of the patent in a contracting state New state(s): CY, LU	published on 09.09.2009 [2009/37]
Applicant(s)	For all designated states Alcatel Lucent 54, rue la Boétie 75008 Paris / FR
	[N/P]
Former [2007/14]	For all designated states Alcatel Lucent 54 rue La Boétie 75008 Paris / FR
Former [2006/39]	For all designated states ALCATEL 54, rue la Boétie 75008 Paris / FR
Former [2000/43]	For all designated states ALCATEL 54, rue La Boétie 75008 Paris / FR
Inventor(s)	01 / Pandhumsoporn, Tamarak 4985 Seneca Park Loop Fremont, California 94538 / US
	02 / Yu, Kevin 3479 Trafalgar Place San Jose, California 95132 / US
	03 / Feldbaum, Michael 4875 Mowry Avenue 110 Fremont, California 94538 / US
	04 / Puech, Michel 98 Avenue de Brogmy, B.P. 69 74009 Annecy Cedex / FR
	[2000/43]
Representative(s)	Hirsch & Associés 154 Boulevard Haussmann 75008 Paris / FR
	[N/P]
Former [2000/43]	Cabinet Hirsch 34, Rue de Bassano 75008 Paris / FR
Application number, filing date	00400462.8	21.02.2000
	[2000/43]
Priority number, date	US19990295100	21.04.1999 Original published format: US 295100
	[2000/43]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	EP1047122
	Date:	25.10.2000
	Language:	EN
	[2000/43]
	Type:	A3 Search report
	No.:	EP1047122
	Date:	05.12.2001
	[2001/49]
	Type:	B1 Patent specification
	No.:	EP1047122
	Date:	27.09.2006
	Language:	EN
	[2006/39]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	22.10.2001
Classification	IPC:	H01L21/3065	[2000/43]
	CPC:	H01L21/30655 (EP,US)
Designated contracting states	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2000/43]
Title	German:	Verfahren zur anisotropen Ätzung von Substraten	[2000/43]
	English:	Method of anisotropic etching of substrates	[2000/43]
	French:	Procédé de gravure anisotrope de substrats	[2000/43]
Examination procedure	17.05.2002	Examination requested [2002/29]
	02.11.2004	Despatch of a communication from the examining division (Time limit: M06)
	09.05.2005	Reply to a communication from the examining division
	18.01.2006	Date of oral proceedings
	02.02.2006	Minutes of oral proceedings despatched
	31.03.2006	Communication of intention to grant the patent
	10.08.2006	Fee for grant paid
	10.08.2006	Fee for publishing/printing paid
Opposition(s)	28.06.2007	No opposition filed within time limit [2007/36]
Fees paid	Renewal fee
	22.01.2002	Renewal fee patent year 03
	30.01.2003	Renewal fee patent year 04
	13.02.2004	Renewal fee patent year 05
	08.02.2005	Renewal fee patent year 06
	15.02.2006	Renewal fee patent year 07
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	AT	27.09.2006
	BE	27.09.2006
	CY	27.09.2006
	FI	27.09.2006
	IT	27.09.2006
	DK	27.12.2006
	SE	27.12.2006
	GR	28.12.2006
	ES	07.01.2007
	IE	21.02.2007
	LU	21.02.2007
	MC	28.02.2007
	PT	13.03.2007
	[2009/37]
Former [2008/19]	AT	27.09.2006
	BE	27.09.2006
	FI	27.09.2006
	IT	27.09.2006
	DK	27.12.2006
	SE	27.12.2006
	GR	28.12.2006
	ES	07.01.2007
	IE	21.02.2007
	MC	28.02.2007
	PT	13.03.2007
Former [2008/10]	AT	27.09.2006
	BE	27.09.2006
	FI	27.09.2006
	IT	27.09.2006
	DK	27.12.2006
	SE	27.12.2006
	ES	07.01.2007
	IE	21.02.2007
	MC	28.02.2007
	PT	13.03.2007
Former [2007/48]	AT	27.09.2006
	BE	27.09.2006
	FI	27.09.2006
	IT	27.09.2006
	DK	27.12.2006
	SE	27.12.2006
	ES	07.01.2007
	MC	28.02.2007
	PT	13.03.2007
Former [2007/37]	AT	27.09.2006
	BE	27.09.2006
	FI	27.09.2006
	IT	27.09.2006
	DK	27.12.2006
	SE	27.12.2006
	ES	07.01.2007
	PT	13.03.2007
Former [2007/35]	AT	27.09.2006
	BE	27.09.2006
	FI	27.09.2006
	IT	27.09.2006
	SE	27.12.2006
	ES	07.01.2007
	PT	13.03.2007
Former [2007/28]	AT	27.09.2006
	BE	27.09.2006
	FI	27.09.2006
	SE	27.12.2006
	ES	07.01.2007
	PT	13.03.2007
Former [2007/26]	FI	27.09.2006
	SE	27.12.2006
	ES	07.01.2007
	PT	13.03.2007
Former [2007/21]	FI	27.09.2006
	SE	27.12.2006
	ES	07.01.2007
Former [2007/09]	FI	27.09.2006
	SE	27.12.2006
Documents cited:	Search	[A]US4729815 (LEUNG HOWARD K H [US]) [A] 1-12 * column 3, line 35 - column 4, line 24 *;
		[XY]US4795529 (KAWASAKI YOSHINAO [JP], et al) [X] 1,2,8,10,12 * column 4, line 61 - line 68; figures 7,8 * * column 9, line 47 - line 58 * * column 18, line 22 - line 46 * [Y] 3,4,7,9;
		[A]DE4420962 (BOSCH GMBH ROBERT [DE]) [A] 1-12 * the whole document *;
		[DY]US5501893 (LAERMER FRANZ [DE], et al) [DY] 3,4 * abstract * * column 4, line 1 - column 5, line 20 *;
		[Y]EP0822582 (SURFACE TECH SYS LTD [GB]) [Y] 9 * abstract * * the whole document *;
		[A]DE19706682 (BOSCH GMBH ROBERT [DE]) [A] 1-12* the whole document *;
		[Y]WO9910922 (BOSCH GMBH ROBERT [DE], et al) [Y] 7 * page 8, line 13 - page 10, line 16 *

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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