EP1047122 - Method of anisotropic etching of substrates [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 03.08.2007 Database last updated on 24.08.2024 | Most recent event Tooltip | 07.08.2009 | Lapse of the patent in a contracting state New state(s): CY, LU | published on 09.09.2009 [2009/37] | Applicant(s) | For all designated states Alcatel Lucent 54, rue la Boétie 75008 Paris / FR | [N/P] |
Former [2007/14] | For all designated states Alcatel Lucent 54 rue La Boétie 75008 Paris / FR | ||
Former [2006/39] | For all designated states ALCATEL 54, rue la Boétie 75008 Paris / FR | ||
Former [2000/43] | For all designated states ALCATEL 54, rue La Boétie 75008 Paris / FR | Inventor(s) | 01 /
Pandhumsoporn, Tamarak 4985 Seneca Park Loop Fremont, California 94538 / US | 02 /
Yu, Kevin 3479 Trafalgar Place San Jose, California 95132 / US | 03 /
Feldbaum, Michael 4875 Mowry Avenue 110 Fremont, California 94538 / US | 04 /
Puech, Michel 98 Avenue de Brogmy, B.P. 69 74009 Annecy Cedex / FR | [2000/43] | Representative(s) | Hirsch & Associés 154 Boulevard Haussmann 75008 Paris / FR | [N/P] |
Former [2000/43] | Cabinet Hirsch 34, Rue de Bassano 75008 Paris / FR | Application number, filing date | 00400462.8 | 21.02.2000 | [2000/43] | Priority number, date | US19990295100 | 21.04.1999 Original published format: US 295100 | [2000/43] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1047122 | Date: | 25.10.2000 | Language: | EN | [2000/43] | Type: | A3 Search report | No.: | EP1047122 | Date: | 05.12.2001 | [2001/49] | Type: | B1 Patent specification | No.: | EP1047122 | Date: | 27.09.2006 | Language: | EN | [2006/39] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 22.10.2001 | Classification | IPC: | H01L21/3065 | [2000/43] | CPC: |
H01L21/30655 (EP,US)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2000/43] | Title | German: | Verfahren zur anisotropen Ätzung von Substraten | [2000/43] | English: | Method of anisotropic etching of substrates | [2000/43] | French: | Procédé de gravure anisotrope de substrats | [2000/43] | Examination procedure | 17.05.2002 | Examination requested [2002/29] | 02.11.2004 | Despatch of a communication from the examining division (Time limit: M06) | 09.05.2005 | Reply to a communication from the examining division | 18.01.2006 | Date of oral proceedings | 02.02.2006 | Minutes of oral proceedings despatched | 31.03.2006 | Communication of intention to grant the patent | 10.08.2006 | Fee for grant paid | 10.08.2006 | Fee for publishing/printing paid | Opposition(s) | 28.06.2007 | No opposition filed within time limit [2007/36] | Fees paid | Renewal fee | 22.01.2002 | Renewal fee patent year 03 | 30.01.2003 | Renewal fee patent year 04 | 13.02.2004 | Renewal fee patent year 05 | 08.02.2005 | Renewal fee patent year 06 | 15.02.2006 | Renewal fee patent year 07 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 27.09.2006 | BE | 27.09.2006 | CY | 27.09.2006 | FI | 27.09.2006 | IT | 27.09.2006 | DK | 27.12.2006 | SE | 27.12.2006 | GR | 28.12.2006 | ES | 07.01.2007 | IE | 21.02.2007 | LU | 21.02.2007 | MC | 28.02.2007 | PT | 13.03.2007 | [2009/37] |
Former [2008/19] | AT | 27.09.2006 | |
BE | 27.09.2006 | ||
FI | 27.09.2006 | ||
IT | 27.09.2006 | ||
DK | 27.12.2006 | ||
SE | 27.12.2006 | ||
GR | 28.12.2006 | ||
ES | 07.01.2007 | ||
IE | 21.02.2007 | ||
MC | 28.02.2007 | ||
PT | 13.03.2007 | ||
Former [2008/10] | AT | 27.09.2006 | |
BE | 27.09.2006 | ||
FI | 27.09.2006 | ||
IT | 27.09.2006 | ||
DK | 27.12.2006 | ||
SE | 27.12.2006 | ||
ES | 07.01.2007 | ||
IE | 21.02.2007 | ||
MC | 28.02.2007 | ||
PT | 13.03.2007 | ||
Former [2007/48] | AT | 27.09.2006 | |
BE | 27.09.2006 | ||
FI | 27.09.2006 | ||
IT | 27.09.2006 | ||
DK | 27.12.2006 | ||
SE | 27.12.2006 | ||
ES | 07.01.2007 | ||
MC | 28.02.2007 | ||
PT | 13.03.2007 | ||
Former [2007/37] | AT | 27.09.2006 | |
BE | 27.09.2006 | ||
FI | 27.09.2006 | ||
IT | 27.09.2006 | ||
DK | 27.12.2006 | ||
SE | 27.12.2006 | ||
ES | 07.01.2007 | ||
PT | 13.03.2007 | ||
Former [2007/35] | AT | 27.09.2006 | |
BE | 27.09.2006 | ||
FI | 27.09.2006 | ||
IT | 27.09.2006 | ||
SE | 27.12.2006 | ||
ES | 07.01.2007 | ||
PT | 13.03.2007 | ||
Former [2007/28] | AT | 27.09.2006 | |
BE | 27.09.2006 | ||
FI | 27.09.2006 | ||
SE | 27.12.2006 | ||
ES | 07.01.2007 | ||
PT | 13.03.2007 | ||
Former [2007/26] | FI | 27.09.2006 | |
SE | 27.12.2006 | ||
ES | 07.01.2007 | ||
PT | 13.03.2007 | ||
Former [2007/21] | FI | 27.09.2006 | |
SE | 27.12.2006 | ||
ES | 07.01.2007 | ||
Former [2007/09] | FI | 27.09.2006 | |
SE | 27.12.2006 | Documents cited: | Search | [A]US4729815 (LEUNG HOWARD K H [US]) [A] 1-12 * column 3, line 35 - column 4, line 24 *; | [XY]US4795529 (KAWASAKI YOSHINAO [JP], et al) [X] 1,2,8,10,12 * column 4, line 61 - line 68; figures 7,8 * * column 9, line 47 - line 58 * * column 18, line 22 - line 46 * [Y] 3,4,7,9; | [A]DE4420962 (BOSCH GMBH ROBERT [DE]) [A] 1-12 * the whole document *; | [DY]US5501893 (LAERMER FRANZ [DE], et al) [DY] 3,4 * abstract * * column 4, line 1 - column 5, line 20 *; | [Y]EP0822582 (SURFACE TECH SYS LTD [GB]) [Y] 9 * abstract * * the whole document *; | [A]DE19706682 (BOSCH GMBH ROBERT [DE]) [A] 1-12* the whole document *; | [Y]WO9910922 (BOSCH GMBH ROBERT [DE], et al) [Y] 7 * page 8, line 13 - page 10, line 16 * |