EP1180237 - OPTICAL INSPECTION OF SEMI-CONDUCTOR STRUCTURES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 04.09.2015 Database last updated on 09.09.2024 | Most recent event Tooltip | 04.09.2015 | Application deemed to be withdrawn | published on 07.10.2015 [2015/41] | Applicant(s) | For all designated states BELTRONICS, INC. 199 Wells Avenue Newton, MA 02159 / US | [2002/08] | Inventor(s) | 01 /
BISHOP, Robert 86 Deborah Road Newton, MA 01259 / US | [2002/08] | Representative(s) | Warren, Anthony Robert, et al Baron Warren Redfern Cambridge House 100 Cambridge Grove Hammersmith London W6 0LE / GB | [N/P] |
Former [2003/32] | Warren, Anthony Robert, et al BARON & WARREN, 19 South End, Kensington London W8 5BU / GB | ||
Former [2002/08] | Allsop, John Rowland McLeod Allsop, Bledington Grounds Bledington, Glos 0X7 6XL / GB | Application number, filing date | 00911151.9 | 22.03.2000 | [2002/08] | WO2000IB00334 | Priority number, date | US19990275349 | 22.03.1999 Original published format: US 275349 | [2002/08] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO0057162 | Date: | 28.09.2000 | Language: | EN | [2000/39] | Type: | A2 Application without search report | No.: | EP1180237 | Date: | 20.02.2002 | Language: | EN | The application published by WIPO in one of the EPO official languages on 28.09.2000 takes the place of the publication of the European patent application. | [2002/08] | Search report(s) | International search report - published on: | EP | 04.01.2001 | Classification | IPC: | G01N21/88, G01N21/64 | [2002/08] | CPC: |
G01N21/956 (EP,US);
H01L22/00 (KR)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE [2002/08] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | OPTISCHE UNTERSUCHUNG VON HALBLEITER-STRUKTUREN | [2014/52] | English: | OPTICAL INSPECTION OF SEMI-CONDUCTOR STRUCTURES | [2002/08] | French: | INSPECTION OPTIQUE DE STRUCTURES DE SEMI-CONDUCTEURS | [2014/52] |
Former [2002/08] | OPTISCHE UNTERSUCHUNG VON HALBLEITENDEN STRUKTUREN | ||
Former [2002/08] | STRUCTURES DE SEMI-CONDUCTEURS | Entry into regional phase | 05.12.2001 | National basic fee paid | 05.12.2001 | Designation fee(s) paid | 05.12.2001 | Examination fee paid | Examination procedure | 09.10.2000 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 05.12.2001 | Examination requested [2002/08] | 28.02.2007 | Despatch of a communication from the examining division (Time limit: M06) | 04.09.2007 | Reply to a communication from the examining division | 24.08.2011 | Despatch of a communication from the examining division (Time limit: M06) | 28.02.2012 | Reply to a communication from the examining division | 11.07.2014 | Despatch of a communication from the examining division (Time limit: M04) | 06.11.2014 | Reply to a communication from the examining division | 03.12.2014 | Communication of intention to grant the patent | 14.04.2015 | Application deemed to be withdrawn, date of legal effect [2015/41] | 20.05.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2015/41] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 28.02.2007 | Fees paid | Renewal fee | 12.04.2002 | Renewal fee patent year 03 | 24.04.2003 | Renewal fee patent year 04 | 13.02.2004 | Renewal fee patent year 05 | 24.03.2005 | Renewal fee patent year 06 | 23.03.2006 | Renewal fee patent year 07 | 30.04.2007 | Renewal fee patent year 08 | 14.03.2008 | Renewal fee patent year 09 | 17.03.2009 | Renewal fee patent year 10 | 04.03.2010 | Renewal fee patent year 11 | 23.03.2011 | Renewal fee patent year 12 | 20.03.2012 | Renewal fee patent year 13 | 14.03.2013 | Renewal fee patent year 14 | 20.03.2014 | Renewal fee patent year 15 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 29.11.2001 | AT   M01   Fee paid on   05.12.2001 | 29.11.2001 | BE   M01   Fee paid on   05.12.2001 | 29.11.2001 | CH   M01   Fee paid on   05.12.2001 | 29.11.2001 | CY   M01   Fee paid on   05.12.2001 | 29.11.2001 | DE   M01   Fee paid on   05.12.2001 | 29.11.2001 | DK   M01   Fee paid on   05.12.2001 | 29.11.2001 | ES   M01   Fee paid on   05.12.2001 | 29.11.2001 | FI   M01   Fee paid on   05.12.2001 | 29.11.2001 | FR   M01   Fee paid on   05.12.2001 | 29.11.2001 | GB   M01   Fee paid on   05.12.2001 | 29.11.2001 | GR   M01   Fee paid on   05.12.2001 | 29.11.2001 | IE   M01   Fee paid on   05.12.2001 | 29.11.2001 | IT   M01   Fee paid on   05.12.2001 | 29.11.2001 | LU   M01   Fee paid on   05.12.2001 | 29.11.2001 | MC   M01   Fee paid on   05.12.2001 | 29.11.2001 | NL   M01   Fee paid on   05.12.2001 | 29.11.2001 | PT   M01   Fee paid on   05.12.2001 | 29.11.2001 | SE   M01   Fee paid on   05.12.2001 | Penalty fee Rule 85b EPC 1973 | 29.11.2001 | M01   Fee paid on   05.12.2001 | Additional fee for renewal fee | 02.04.2002 | 03   M06   Fee paid on   12.04.2002 | 31.03.2003 | 04   M06   Fee paid on   24.04.2003 | 31.03.2007 | 08   M06   Fee paid on   30.04.2007 | 31.03.2015 | 16   M06   Not yet paid |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Licence(s) | ID: | 01 01/exclusive | For: | AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE | Licencee: | TORAY ENGINEERING CO., LTD. 3-16, Nihonbashi-Hongokucho 3-chome, Chuo-ku Tokyo / JP | Date: | 24.03.2010 | [2010/33] | Cited in | International search | [XY]US4816686 (HARA YASUHIKO [JP], et al) [X] 1-3,6-8,11,15,18-20 * column 1, line 9 - line 13 * * column 2, line 44 - line 57 * * column 7, line 39 - column 8, line 4 * * column 8, line 66 - column 9, line 2 * * column 10, line 21 - line 33 * * column 10 * [Y] 4,5,9,10,12,13,16,17; | [Y]US4877326 (CHADWICK CURT H [US], et al) [Y] 4,9,13,16 * column 1, line 30 - line 44 * * column 21, line 22 - line 60 *; | [Y]WO9906823 (KLA TENCOR CORP [US], et al) [Y] 5,10,12,17 * page 1, line 4 - line 15 * * page 8, line 1 - line 20 ** figure 1 *; | [XP]US6014209 (BISHOP ROBERT [US]) [XP] 11,14,15 * column 3, line 44 - line 47 * * column 4, line 7 - line 31 * * column 4, line 64 - column 5, line 5 * | Examination | US4152723 | US4556903 | US5278012 | by applicant | US4152723 | US4556903 | US4816686 | US4877326 | US5278021 |