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Extract from the Register of European Patents

EP About this file: EP1212788

EP1212788 - IMPROVED FILL MATERIAL FOR DUAL DAMASCENE PROCESSES [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  17.04.2015
Database last updated on 03.10.2024
Most recent event   Tooltip01.07.2016Lapse of the patent in a contracting state
New state(s): CY
published on 03.08.2016  [2016/31]
Applicant(s)For all designated states
Brewer Science
2401 Brewer Drive
Rolla, MO 65402 / US
[2002/24]
Inventor(s)01 / LAMB, James, E., III
1511 Scenic Drive
Rolla, MO 65401 / US
02 / SHAO, Xie
25 McFarland Drive
Rolla, MO 65401 / US
 [2002/24]
Representative(s)Uexküll & Stolberg
Partnerschaft von
Patent- und Rechtsanwälten mbB
Beselerstrasse 4
22607 Hamburg / DE
[N/P]
Former [2014/24]UEXKÜLL & STOLBERG
Patentanwälte
Beselerstrasse 4
22607 Hamburg / DE
Former [2002/24]UEXKÜLL & STOLBERG
Patentanwälte Beselerstrasse 4
22607 Hamburg / DE
Application number, filing date00955751.317.08.2000
[2002/24]
WO2000US22839
Priority number, dateUS1999038378526.08.1999         Original published format: US 383785
[2002/24]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO0115211
Date:01.03.2001
Language:EN
[2001/09]
Type: A1 Application with search report 
No.:EP1212788
Date:12.06.2002
Language:EN
The application published by WIPO in one of the EPO official languages on 01.03.2001 takes the place of the publication of the European patent application.
[2002/24]
Type: B1 Patent specification 
No.:EP1212788
Date:11.06.2014
Language:EN
[2014/24]
Search report(s)International search report - published on:US01.03.2001
(Supplementary) European search report - dispatched on:EP13.03.2008
ClassificationIPC:H01L21/302, H01L21/312, H01L21/47, H01L21/66, H01L21/768
[2013/46]
CPC:
H01L21/76808 (EP,US); H01L21/28 (KR); H01L21/02118 (EP);
H01L21/312 (US); H01L21/02282 (EP); Y10T428/12556 (EP,US);
Y10T428/24802 (EP,US) (-)
Former IPC [2002/24]H01L21/302, H01L21/312, H01L21/47, H01L21/66
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE [2002/24]
TitleGerman:VERBESSERTES FÜLLMATERIAL FÜR EIN DUAL-DAMASZENE-VERFAHREN[2002/24]
English:IMPROVED FILL MATERIAL FOR DUAL DAMASCENE PROCESSES[2002/24]
French:MATERIAU DE REMPLISSAGE DESTINE A DES PROCEDES DE DAMASQUINAGE DUAL[2002/24]
Entry into regional phase25.03.2002National basic fee paid 
25.03.2002Search fee paid 
25.03.2002Designation fee(s) paid 
25.03.2002Examination fee paid 
Examination procedure16.01.2001Request for preliminary examination filed
International Preliminary Examining Authority: US
25.03.2002Examination requested  [2002/24]
15.07.2008Invitation to provide information on prior art
13.10.2008Reply to the invitation to provide information on prior art
29.07.2009Despatch of a communication from the examining division (Time limit: M06)
26.01.2010Reply to a communication from the examining division
08.12.2011Despatch of a communication from the examining division (Time limit: M04)
18.04.2012Reply to a communication from the examining division
19.12.2013Communication of intention to grant the patent
22.04.2014Fee for grant paid
22.04.2014Fee for publishing/printing paid
22.04.2014Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  29.07.2009
Opposition(s)12.03.2015No opposition filed within time limit [2015/21]
Fees paidRenewal fee
14.08.2002Renewal fee patent year 03
13.08.2003Renewal fee patent year 04
26.08.2004Renewal fee patent year 05
12.08.2005Renewal fee patent year 06
14.08.2006Renewal fee patent year 07
14.08.2007Renewal fee patent year 08
31.03.2008Renewal fee patent year 09
12.08.2009Renewal fee patent year 10
17.08.2010Renewal fee patent year 11
11.08.2011Renewal fee patent year 12
10.08.2012Renewal fee patent year 13
19.08.2013Renewal fee patent year 14
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See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT11.06.2014
BE11.06.2014
CY11.06.2014
DK11.06.2014
ES11.06.2014
FI11.06.2014
IT11.06.2014
MC11.06.2014
NL11.06.2014
SE11.06.2014
IE17.08.2014
LU17.08.2014
CH31.08.2014
LI31.08.2014
GR12.09.2014
PT13.10.2014
[2016/31]
Former [2015/37]AT11.06.2014
BE11.06.2014
DK11.06.2014
ES11.06.2014
FI11.06.2014
IT11.06.2014
MC11.06.2014
NL11.06.2014
SE11.06.2014
IE17.08.2014
LU17.08.2014
CH31.08.2014
LI31.08.2014
GR12.09.2014
PT13.10.2014
Former [2015/30]AT11.06.2014
BE11.06.2014
DK11.06.2014
ES11.06.2014
FI11.06.2014
IT11.06.2014
MC11.06.2014
NL11.06.2014
SE11.06.2014
LU17.08.2014
CH31.08.2014
LI31.08.2014
GR12.09.2014
PT13.10.2014
Former [2015/22]AT11.06.2014
DK11.06.2014
ES11.06.2014
FI11.06.2014
IT11.06.2014
MC11.06.2014
NL11.06.2014
SE11.06.2014
LU17.08.2014
BE31.08.2014
CH31.08.2014
LI31.08.2014
GR12.09.2014
PT13.10.2014
Former [2015/20]AT11.06.2014
ES11.06.2014
FI11.06.2014
MC11.06.2014
NL11.06.2014
SE11.06.2014
LU17.08.2014
BE31.08.2014
CH31.08.2014
LI31.08.2014
GR12.09.2014
PT13.10.2014
Former [2015/19]AT11.06.2014
ES11.06.2014
FI11.06.2014
MC11.06.2014
NL11.06.2014
SE11.06.2014
LU17.08.2014
BE31.08.2014
GR12.09.2014
PT13.10.2014
Former [2015/18]AT11.06.2014
ES11.06.2014
FI11.06.2014
MC11.06.2014
NL11.06.2014
SE11.06.2014
GR12.09.2014
PT13.10.2014
Former [2015/12]AT11.06.2014
ES11.06.2014
FI11.06.2014
NL11.06.2014
SE11.06.2014
GR12.09.2014
PT13.10.2014
Former [2015/11]ES11.06.2014
FI11.06.2014
SE11.06.2014
GR12.09.2014
PT13.10.2014
Former [2015/10]ES11.06.2014
FI11.06.2014
SE11.06.2014
GR12.09.2014
Former [2014/50]FI11.06.2014
SE11.06.2014
GR12.09.2014
Former [2014/49]FI11.06.2014
Documents cited:Search[XA]DE4414808  (SAMSUNG ELECTRONICS CO LTD [KR]) [X] 1,2,4-6 * column 3, line 48 - column 5, line 61 * * column 6, line 63 - column 7, line 20 * * examples 2,3 * * column 8, line 56 - column 9, line 3 * [A] 12,18-21,25,27-29,34;
 [XA]EP0813114  (SHIPLEY CO LLC [US]) [X] 1-9,11,14-17 * page 4, line 10 - page 9, line 53; examples 13,14 * [A] 12,18,25-31,33,34;
 [A]US5883006  (IBA JUNICHIRO [US]) [A] 1-35 * column 1, line 45 - line 67 * * column 3, line 50 - column 5, line 57; figures 1d,2a-h *;
 [XA]WO9921058  (BREWER SCIENCE INC [US]) [X] 1,2,4,6-9,11,12,14-17 [A] 18,25,27,29-31,33,34;
 [XA]EP0916683  (CLARIANT INT LTD [CH]) [X] 1-11,14-16 * page 3, line 14 - page 12, line 10 * * page 13, line 14 * * page 15, line 5 - line 20 * [A] 18-21,25-33;
 [X]JPH11162982  (NEC CORP) [X] 1,18 * paragraph [0005] * * paragraph [0021] - paragraph [0027]; figures 4,5 *;
 [XA]JPH11204638  (TOSHIBA CORP) [X] 1,2,4-6,8,9,11,12,14,15,18-22,24,25,27-29,31,33,34 * paragraph [0002] - paragraph [0060] * * paragraph [0091] * * paragraph [0112] - paragraph [0164]; figures 1-7,15,16 * [A] 13,35;
 [E]EP1035442  (SHIPLEY CO LLC [US]) [E] 1-11,14-17* the whole document *
International search[Y]US4451597  (VICTORIUS CLAUS [US]);
 [Y]US4727100  (VASTA JOSEPH A [US]);
 [Y]US4981891  (FELTER RICHARD E [US], et al);
 [Y]US5283104  (AOUDE FARID Y [US], et al);
 [X]US5602198  (DAS SURYYA K [US], et al);
 [X]US5859136  (SCOPAZZI CHRISTOPHER [US], et al);
 [AP]US6054254  (SATO YASUHIKO [JP], et al)
by applicantEP0813114
 US5883006
 WO9921058
 EP0916683
 JPH11162982
 JPH11204638
 EP1035442
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.