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EP1245896
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EP About this file: EP1245896
| EP1245896 - METHOD AND DEVICE FOR FORMING REQUIRED GAS ATMOSPHERE [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 21.08.2009 Database last updated on 14.11.2024 | Most recent event Tooltip | 21.08.2009 | Withdrawal of application | published on 23.09.2009 [2009/39] | Applicant(s) | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo 144-8510 / JP | [N/P] |
| Former [2002/40] | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku, Tokyo 144-8510 / JP | Inventor(s) | 01 /
SHINODA, Setsuji 3-18-71, Tsujido Fujisawa-shi, Kanagawa 251-0047 / JP | 02 /
NAKAZAWA, Toshiharu 3-18-71, Tsujido Fujisawa-shi, Kanagawa 251-0047 / JP | 03 /
NOJI, Nobuharu 3-18-71, Tsujido Fujisawa-shi, Kanagawa 251-0047 / JP | 04 /
AIYOSHIZAWA, Shunichi 1-8-1-204, Nakamagome Ohta-ku, Tokyo 143-0027 / JP | [2002/40] | Representative(s) | Wagner, Karl H. Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | [N/P] |
| Former [2008/33] | Wagner, Karl H. Wagner & Geyer Partnerschaft Patent- und Rechtsanwälte Gewürzmühlstrasse 5 80538 München / DE | ||
| Former [2002/40] | Wagner, Karl H., Dipl.-Ing. Wagner & Geyer, Patentanwälte, Gewürzmühlstrasse 5 80538 München / DE | Application number, filing date | 00985814.3 | 21.12.2000 | [2002/40] | WO2000JP09091 | Priority number, date | JP20000000917 | 06.01.2000 Original published format: JP 2000000917 | [2002/40] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0150061 | Date: | 12.07.2001 | Language: | EN | [2001/28] | Type: | A1 Application with search report | No.: | EP1245896 | Date: | 02.10.2002 | Language: | EN | The application published by WIPO in one of the EPO official languages on 12.07.2001 takes the place of the publication of the European patent application. | [2002/40] | Search report(s) | International search report - published on: | JP | 12.07.2001 | Classification | IPC: | F17D1/02, H01L21/68, H01L21/02, F24F7/06 | [2002/40] | CPC: |
C23C16/45593 (EP,US);
H01L21/205 (KR);
C23C16/405 (EP,US);
C23C16/4402 (EP,US);
C23C16/4412 (EP,US);
H01L21/67017 (EP,US)
| Designated contracting states | DE, FR, GB [2004/22] |
| Former [2002/40] | DE, FR, GB, NL | Title | German: | VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON CASATMOSPHÄRE | [2002/40] | English: | METHOD AND DEVICE FOR FORMING REQUIRED GAS ATMOSPHERE | [2002/40] | French: | PROCEDE ET DISPOSITIF DE FORMATION D'UNE ATMOSPHERE GAZEUSE REQUISE | [2002/40] | Entry into regional phase | 19.06.2002 | Translation filed | 19.06.2002 | National basic fee paid | 19.06.2002 | Search fee paid | 19.06.2002 | Designation fee(s) paid | 19.06.2002 | Examination fee paid | Examination procedure | 25.06.2001 | Request for preliminary examination filed International Preliminary Examining Authority: JP | 19.06.2002 | Examination requested [2002/40] | 12.08.2009 | Application withdrawn by applicant [2009/39] | Fees paid | Renewal fee | 01.07.2002 | Renewal fee patent year 03 | 29.12.2003 | Renewal fee patent year 04 | 29.12.2004 | Renewal fee patent year 05 | 28.12.2005 | Renewal fee patent year 06 | 28.12.2006 | Renewal fee patent year 07 | 27.12.2007 | Renewal fee patent year 08 | 29.12.2008 | Renewal fee patent year 09 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]JPH06177225 (MATSUSHITA ELECTRIC IND CO LTD); | [Y]JPH0266400 (FUJITSU LTD, et al) |