-
EP1231628
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP Citations: EP1231628
| Cited in | Search | Type: | Patent literature | Publication No.: | US6020609
[A] (WU SHYE-LIN [TW]) [A] 1,4* the whole document *; | Type: | Patent literature | Publication No.: | US6171955
[A] (CHEN SHIH-CHING [TW]) [A] 1-3,5,6 * the whole document *; | Type: | Non-patent literature | Publication information: | [X] - PUTTE VAN DER P ET AL, "SURFACE MORPHOLOGY OF HCI SILICON WAFERS I. GAS PHASE COMPOSITION IN THE SILICON HCI SYSTEM AND SURFACE REACTIONS DURING ETCHING", JOURNAL OF CRYSTAL GROWTH,NL,NORTH-HOLLAND PUBLISHING CO. AMSTERDAM, (1977), vol. 41, ISSN 0022-0248, pages 133 - 145, XP000577106 [X] 1-3 * the whole document * | DOI: | http://dx.doi.org/10.1016/0022-0248(77)90106-3 |