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EP1209728
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EP About this file: EP1209728
| EP1209728 - Method of depositing organosilicate layers [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 14.04.2006 Database last updated on 31.08.2024 | Most recent event Tooltip | 14.04.2006 | Application deemed to be withdrawn | published on 31.05.2006 [2006/22] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2002/22] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, California 95054 / US | Inventor(s) | 01 /
Yieh, Elli 5888 Pistoia Way San Jose, CA 95138 / US | 02 /
Gaillard, Frederic rue des tallifardieres 38500 Voiron / FR | 03 /
Xia, Li-Qun 868 Leith Avenue CA - 95054 Santa Clara / US | [2002/22] | Representative(s) | Kirschner, Klaus Dieter Puschmann Borchert Bardehle Patentanwälte Partnerschaft Postfach 10 12 31 80086 München / DE | [N/P] |
| Former [2002/22] | Kirschner, Klaus Dieter, Dipl.-Phys. Schneiders & Behrendt Rechtsanwälte - Patentanwälte Sollner Strasse 38 81479 München / DE | Application number, filing date | 01124607.1 | 15.10.2001 | [2002/22] | Priority number, date | US20000723886 | 27.11.2000 Original published format: US 723886 | [2002/22] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1209728 | Date: | 29.05.2002 | Language: | EN | [2002/22] | Type: | A3 Search report | No.: | EP1209728 | Date: | 27.10.2004 | [2004/44] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.09.2004 | Classification | IPC: | H01L21/312, H01L21/316, H01L21/027, C23C16/30, C23C16/40 | [2004/31] | CPC: |
C23C16/30 (EP,US);
H01L21/20 (KR);
H01L21/02126 (EP,US);
C23C16/401 (EP,US);
H01L21/02216 (EP,US);
H01L21/02274 (EP,US);
H01L21/0276 (EP,US);
H01L21/3121 (US);
H01L21/3122 (US);
H01L21/31633 (US);
H01L21/02211 (EP);
H01L21/3086 (EP,US);
H01L21/31144 (EP,US);
H01L21/31612 (US);
H01L21/31629 (US);
|
| Former IPC [2002/22] | H01L21/312 | Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2005/29] |
| Former [2002/22] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Title | German: | Methode, eine organische Silikatschicht abzuscheiden | [2002/22] | English: | Method of depositing organosilicate layers | [2002/22] | French: | Méthode de depôt d'une couche organique de silicate | [2002/22] | Examination procedure | 18.04.2005 | Examination requested [2005/25] | 04.07.2005 | Despatch of a communication from the examining division (Time limit: M04) | 15.11.2005 | Application deemed to be withdrawn, date of legal effect [2006/22] | 02.01.2006 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2006/22] | Fees paid | Renewal fee | 06.10.2003 | Renewal fee patent year 03 | 06.10.2004 | Renewal fee patent year 04 | 07.10.2005 | Renewal fee patent year 05 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XA]EP0826791 (MATSUSHITA ELECTRIC IND CO LTD [JP]) [X] 1,2,6,16,18,19,22,29 * page 3, line 27 - page 9, line 35; figures 3A-3D * [A] 23-28,30; | [XA]GB2326168 (NEC CORP [JP]) [X] 1,2,6,16-20,22 * page 33 - page 42 *[A] 23-28; | [XY]EP0935283 (ASM JAPAN [JP]) [X] 1,2,16-20,22,29,32 * paragraph [0023] - paragraph [0049] * [Y] 21; | [XY]DE19904311 (NAT SEMICONDUCTOR CORP [US]) [X] 1,2,16,18-20,22,29,32 * column 2, line 35 - column 6, line 23; claims 1-3,11,12 * [Y] 21 |