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EP1220271
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EP About this file: EP1220271
| EP1220271 - Ion source having replaceable and sputterable solid source material [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 27.06.2008 Database last updated on 13.07.2024 | Most recent event Tooltip | 27.06.2008 | Application deemed to be withdrawn | published on 30.07.2008 [2008/31] | Applicant(s) | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915-1053 / US | [N/P] |
| Former [2002/27] | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915 / US | Inventor(s) | 01 /
Horsky, Thomas Neil 816 Depot Road Boxborough, Massachusetts 01719 / US | 02 /
Hollingsworth, Tommy Dale 1325 County Road 180 Leander, Texas 78641 / US | [2002/27] | Representative(s) | Burke, Steven David, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB | [N/P] |
| Former [2002/27] | Burke, Steven David, et al R.G.C. Jenkins & Co. 26 Caxton Street London SW1H 0RJ / GB | Application number, filing date | 01306533.9 | 31.07.2001 | [2002/27] | Priority number, date | US20000633322 | 07.08.2000 Original published format: US 633322 | [2002/27] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1220271 | Date: | 03.07.2002 | Language: | EN | [2002/27] | Type: | A3 Search report | No.: | EP1220271 | Date: | 26.11.2003 | [2003/48] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.10.2003 | Classification | IPC: | H01J27/08, H01J37/08, H01J37/34 | [2003/48] | CPC: |
H01J27/12 (EP,US);
H01J37/36 (KR)
|
| Former IPC [2002/27] | H01J27/08 | Designated contracting states | DE, FR, GB, IT, NL [2004/39] |
| Former [2004/34] | FR, GB, IT, NL | ||
| Former [2002/27] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Title | German: | Ionenquelle mit auswechselbarem und zerstäubbarem Quellenmaterial im festen Zustand | [2002/27] | English: | Ion source having replaceable and sputterable solid source material | [2002/27] | French: | Source d' ions avec matériau de source pulvérisable et remplaçable à l' état solide | [2002/27] | Examination procedure | 18.05.2004 | Examination requested [2004/29] | 10.01.2007 | Despatch of a communication from the examining division (Time limit: M06) | 27.07.2007 | Reply to a communication from the examining division | 01.02.2008 | Application deemed to be withdrawn, date of legal effect [2008/31] | 13.03.2008 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2008/31] | Request for further processing for: | 27.07.2007 | Request for further processing filed | 27.07.2007 | Full payment received (date of receipt of payment) Request granted | 28.08.2007 | Decision despatched | Fees paid | Renewal fee | 04.07.2003 | Renewal fee patent year 03 | 09.07.2004 | Renewal fee patent year 04 | 08.07.2005 | Renewal fee patent year 05 | 10.07.2006 | Renewal fee patent year 06 | Penalty fee | Penalty fee Rule 85a EPC 1973 | 30.06.2004 | DE M01 Fee paid on 22.07.2004 | Additional fee for renewal fee | 31.07.2007 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [DA]JPH10188833 ; | [A]US5497006 (SFERLAZZO PIERO [US], et al) [A] 1,11 * column 5 *; | [A]US5089746 (ROSENBLUM STEPHEN S [US], et al) [A] 1,11 * column 8 *; | [A]US5852345 (ARMINI ANTHONY J [US]) [A] 1,11 * abstract * | [DA] - PATENT ABSTRACTS OF JAPAN, (19981031), vol. 1998, no. 12, & JP10188833 A 19980721 (TOSHIBA CORP) [DA] 1,11 * abstract * |