PROCESS FOR PLASMA TREATING AN ISOLATION LAYER WITH LOW PERMITTIVITY | ||||
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Application No.EP01870205 |
Publication No.EP1195801 |
ApplicantApplied Materials, Inc. |
IPC |
Status | Application No. |
Publication No. |
Proprietor | Invalidation date |
Not in force since |
Renewal fees last paid |
Record last updated |
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Designated contracting states | DE FR GB |