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EP1194610

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EP About this file: EP1194610

EP1194610 - METHOD AND SYSTEM FOR PUMPING SEMICONDUCTOR EQUIPMENT FROM TRANSFER CHAMBERS [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 19.02.2010 Database last updated on 14.11.2024
Most recent event Tooltip	19.02.2010	Application deemed to be withdrawn	published on 24.03.2010 [2010/12]
Applicant(s)	For all designated states Alcatel Lucent 54, rue la Boétie 75008 Paris / FR
	[N/P]
Former [2007/14]	For all designated states Alcatel Lucent 54 rue La Boétie 75008 Paris / FR
Former [2002/15]	For all designated states ALCATEL 54, rue La Boétie 75008 Paris / FR
Inventor(s)	01 / LAGEDAMONT, Marc 17, rue de la Tournette F-74960 Cran Gevrier / FR
	02 / BERNARD, Roland 1421, route du Chainet F-74540 Viuz la Chiesaz / FR
	03 / CHEVALIER, Eric 8, chemin de la Colline F-74940 Annecy le Vieux / FR
	[2002/15]
Representative(s)	Korakis-Ménager, Sophie, et al Alcatel Lucent Intellectual Property & Standards 54, Rue La Boétie 75008 Paris / FR
	[N/P]
Former [2007/25]	Korakis-Ménager, Sophie, et al Alcatel Lucent Intellectual Property & Standards 54 rue La Boétie 75008 Paris / FR
Former [2005/18]	Lamoureux, Bernard, et al COMPAGNIE FINANCIERE ALCATEL Département Propriété Industrielle 54, rue La Boétie 75008 Paris / FR
Former [2002/15]	Poncet, Jean-François, et al Cabinet Poncet, 7, chemin de Tillier, B.P. 317 74008 Annecy Cédex / FR
Application number, filing date	01928018.9	20.04.2001
	[2002/15]
	WO2001FR01219
Priority number, date	FR20000005096	20.04.2000 Original published format: FR 0005096
	[2002/15]
Filing language	FR
Procedural language	FR
Publication	Type:	A1 Application with search report
	No.:	WO0181651
	Date:	01.11.2001
	Language:	FR
	[2001/44]
	Type:	A1 Application with search report
	No.:	EP1194610
	Date:	10.04.2002
	Language:	FR
	The application published by WIPO in one of the EPO official languages on 01.11.2001 takes the place of the publication of the European patent application.
	[2002/15]
Search report(s)	International search report - published on:	EP	01.11.2001
Classification	IPC:	C23C14/56, H01L21/00	[2002/15]
	CPC:	H01L21/67017 (EP,US); C23C14/564 (EP,US); C23C14/566 (EP,US); C23C16/4412 (EP,US)
Designated contracting states	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2002/15]
Title	German:	VERFAHREN UND PUMPENSYSTEM FÜR LADUNGSSCHLEUSENKAMMERN EINER HALBLEITERVORRICHTUNG	[2002/15]
	English:	METHOD AND SYSTEM FOR PUMPING SEMICONDUCTOR EQUIPMENT FROM TRANSFER CHAMBERS	[2002/15]
	French:	PROCEDE ET SYSTEME DE POMPAGE DES CHAMBRES DE TRANSFERT D'EQUIPEMENT DE SEMI-CONDUCTEUR	[2002/15]
Entry into regional phase	24.12.2001	National basic fee paid
	24.12.2001	Designation fee(s) paid
	24.12.2001	Examination fee paid
Examination procedure	24.12.2001	Amendment by applicant (claims and/or description)
	24.12.2001	Examination requested [2002/15]
	11.05.2009	Despatch of a communication from the examining division (Time limit: M04)
	22.09.2009	Application deemed to be withdrawn, date of legal effect [2010/12]
	04.11.2009	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2010/12]
Fees paid	Renewal fee
	27.03.2003	Renewal fee patent year 03
	14.04.2004	Renewal fee patent year 04
	11.04.2005	Renewal fee patent year 05
	30.03.2006	Renewal fee patent year 06
	11.04.2007	Renewal fee patent year 07
	13.03.2008	Renewal fee patent year 08
	16.04.2009	Renewal fee patent year 09
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited in	International search	[A]US4379743 (NAKATSUKASA MASASHI [JP], et al) [A] 6,11 * column 1, lines 42-46; claim 1 *;
		[YA]US4699570 (BOHN HEINZ [DE]) [Y] 10 * column 2, line 9 - column 3, line 10; figures 1-4 * * claim 1 * [A] 1;
		[Y]EP0385709 (EATON CORP [US]) [Y] 10 * column 2, line 44 - column 3, line 55 *;
		[Y]US5118251 (SAULGEOT CLAUDE [FR]) [Y] 7 * column 1 *;
		[A]GB2265634 (TOSHIBA KK [JP], et al) [A] 12* page 21, line 10 - page 22, line 9; claims 14,15 *;
		[A]US5455082 (SAITO MASASI [JP], et al) [A] 1,8-10 * column 7, lines 40-48; figure 3 * * column 12; figures 12,13 *;
		[A]EP0690235 (EBARA CORP [JP], et al) [A] 1,10 * page 3, lines 36-57 *;
		[A]EP0776026 (SAMSUNG ELECTRONICS CO LTD [KR]) [A] 10 * column 3, line 43 - column 4, line 4 *;
		[Y]EP0809284 (NIPPON OXYGEN CO LTD [JP]) [Y] 3-5 * column 9, line 33 - column 10, line 6 *;
		[PXY]EP1043645 (CIT ALCATEL [FR]) [PX] 1,2,10 * column 2, line 58 - column 4, line 20 * * column 5, line 47 - column 6, line 27 * [PY] 3-5,7

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