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Extract from the Register of European Patents

EP About this file: EP1302985

EP1302985 - METHOD FOR PRODUCING BONDED WAFER AND BONDED WAFER [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  06.06.2008
Database last updated on 14.09.2024
Most recent event   Tooltip06.06.2008Application deemed to be withdrawnpublished on 09.07.2008  [2008/28]
Applicant(s)For all designated states
Shin-Etsu Handotai Co., Ltd.
4-2 Marunouchi 1-chome, Chiyoda-ku
Tokyo 100-0005 / JP
[N/P]
Former [2003/16]For all designated states
Shin-Etsu Handotai Co., Ltd
4-2 Marunouchi 1-chome, Chiyoda-ku
Tokyo 100-0005 / JP
Inventor(s)01 / NAKANO, Masatake, c/o Isobe R & D Center
Shin-Etsu Handotai Co., Ltd, 13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
02 / YOKOKAWA, Isao, c/o Isobe R & D Center
Shin-Etsu Handotai Co., Ltd, 13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
03 / MITANI, Kiyoshi, c/o Isobe R & D Center
Shin-Etsu Handotai Co., Ltd, 13-1, Isobe 2-chome
Annaka-shi, Gunma 379-0196 / JP
 [2003/16]
Representative(s)Cooper, John, et al
Murgitroyd & Company
Scotland House
165-169 Scotland Street
Glasgow G5 8PL / GB
[N/P]
Former [2003/16]Cooper, John, et al
Murgitroyd & Company 165-169 Scotland Street
Glasgow G5 8PL / GB
Application number, filing date01932319.529.05.2001
[2003/16]
WO2001JP04499
Priority number, dateJP2000016049930.05.2000         Original published format: JP 2000160499
[2003/16]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO0193334
Date:06.12.2001
Language:EN
[2001/49]
Type: A1 Application with search report 
No.:EP1302985
Date:16.04.2003
Language:EN
The application published by WIPO in one of the EPO official languages on 06.12.2001 takes the place of the publication of the European patent application.
[2003/16]
Search report(s)International search report - published on:JP06.12.2001
ClassificationIPC:H01L27/12
[2003/16]
CPC:
H01L21/76254 (EP,US); H01L27/12 (KR); Y10S438/974 (EP,US);
Y10S438/977 (EP,US)
Designated contracting statesDE,   FR,   GB [2004/20]
Former [2003/16]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE,  TR 
Extension statesALNot yet paid
LTNot yet paid
LVNot yet paid
MKNot yet paid
RONot yet paid
SINot yet paid
TitleGerman:VERFAHREN ZUR HERSTELLUNG EINES GEBONDETEN WAFERS UND GEBONDETER WAFER[2003/16]
English:METHOD FOR PRODUCING BONDED WAFER AND BONDED WAFER[2003/16]
French:PROCEDE DE FABRICATION D'UNE PLAQUETTE COLLEE ET CETTE DERNIERE[2003/16]
Entry into regional phase29.11.2002Translation filed 
10.12.2002National basic fee paid 
10.12.2002Search fee paid 
10.12.2002Designation fee(s) paid 
10.12.2002Examination fee paid 
Examination procedure28.12.2001Request for preliminary examination filed
International Preliminary Examining Authority: JP
10.12.2002Examination requested  [2003/16]
03.12.2007Application deemed to be withdrawn, date of legal effect  [2008/28]
29.01.2008Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [2008/28]
Fees paidRenewal fee
13.05.2003Renewal fee patent year 03
13.05.2004Renewal fee patent year 04
13.05.2005Renewal fee patent year 05
20.04.2006Renewal fee patent year 06
Penalty fee
Additional fee for renewal fee
31.05.200707   M06   Not yet paid
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Cited inInternational search[A]JPH0878647  (NIPPON STEEL CORP);
 [A]JPH1098005  (TOSHIBA CORP);
 [A]US5909627  (EGLOFF RICHARD [US]);
 [X]JPH11307747  (NEC CORP);
 [A]EP0971396  (SHINETSU HANDOTAI KK [JP])
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.