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EP1303876
European procedure
Extract from the Register of European Patents
EP About this file: EP1303876
| EP1303876 - METHOD OF FORMING COPPER INTERCONNECT CAPPING LAYERS WITH IMPROVED INTERFACE AND ADHESION [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 02.07.2010 Database last updated on 17.07.2024 | Most recent event Tooltip | 02.07.2010 | No opposition filed within time limit | published on 04.08.2010 [2010/31] | Applicant(s) | For all designated states Globalfoundries Inc. Maples Corporate Services Limited P.O. Box 309 Ugland House KY1-1104 Grand Cayman / KY | [N/P] |
| Former [2009/52] | For all designated states GlobalFoundries, Inc. Maple Corporate Services Limited P.O. Box 309 Ugland House Grand Cayman KY1-1104 / KY | ||
| Former [2008/36] | For all designated states ADVANCED MICRO DEVICES, INC. One AMD Place Mail Stop 68 P.O. Box 3453 Sunnyvale CA 94088-3453 / US | ||
| Former [2003/17] | For all designated states ADVANCED MICRO DEVICES INC. One AMD Place, P.O. Box 3453 Sunnyvale, California 94088-3453 / US | Inventor(s) | 01 /
NGO, Minh, Van 40986 Canyon Heights Drive Fremont, CA 94539 / US | 02 /
RUELKE, Hartmut Wamenuender-Str. 7 01109 Dresden Wilschdorf / DE | 03 /
MERGILI, Lothar Am Schulfeld 5 01109 Dresden / DE | 04 /
HOHAGE, Joerg Mendelssohnallee 30 01309 Dresden / DE | 05 /
YOU, Lu 5978 Friar Way San Jose, CA 95129 / US | 06 /
HUERTAS, Robert, A. 975 Matador Drive Hollister, CA 95023 / CA | 07 /
HUANG, Richard 1068 West Hill Court Cupertino, CA 95014 / US | [2003/25] |
| Former [2003/17] | 01 /
NGO, Minh, Van 40986 Canyon Heights Drive Fremont, CA 94539 / US | ||
| 02 /
RUELKE, Hartmut Wamenuender-Str. 7 01109 Dresden Wilschdorf / DE | |||
| 03 /
MERGILI, Lothar Emil-Hoegg-Str. 13 01445 Radebeul / DE | |||
| 04 /
HOHAGE, Joerg Mendelssohnallee 30 01309 Dresden / DE | |||
| 05 /
YOU, Lu 3655 Pruperidge Avenue 156 Santa Clara, CA 95051 / US | |||
| 06 /
HUERTAS, Robert, A. 975 Matador Drive Hollister, CA 95023 / CA | |||
| 07 /
HUANG, Richard 1068 West Hill Court Cupertino, CA 95014 / US | Representative(s) | Brookes IP Windsor House 6-10 Mount Ephraim Road Tunbridge Wells, Kent TN1 1EE / GB | [N/P] |
| Former [2009/31] | Brookes Batchellor LLP 102-108 Clerkenwell Road London EC1M 5SA / GB | ||
| Former [2009/14] | Brookes Batchellor LLP 102-108 Clerkenwell Road London EC1M 5SA / GB | ||
| Former [2003/17] | Sanders, Peter Colin Christopher Brookes Batchellor, 102-108 Clerkenwell Road London EC1M 5SA / GB | Application number, filing date | 01941965.4 | 04.06.2001 | [2003/17] | WO2001US18228 | Priority number, date | US20000626455 | 26.07.2000 Original published format: US 626455 | [2003/17] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO0209173 | Date: | 31.01.2002 | Language: | EN | [2002/05] | Type: | A2 Application without search report | No.: | EP1303876 | Date: | 23.04.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 31.01.2002 takes the place of the publication of the European patent application. | [2003/17] | Type: | B1 Patent specification | No.: | EP1303876 | Date: | 26.08.2009 | Language: | EN | [2009/35] | Search report(s) | International search report - published on: | EP | 23.05.2002 | Classification | IPC: | H01L21/768 | [2003/17] | CPC: |
H01L21/76883 (EP,US);
H01L21/768 (KR);
H01L21/76834 (EP,US);
Y10S438/913 (EP,US)
| Designated contracting states | DE, GB [2004/22] |
| Former [2003/17] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | VERFAHREN ZUR HERSTELLUNG VON ABDECKSCHICHTEN FÜR EINE KUPFER-VERBINDUNGSSTRUKTUR MIT VERBESSERTER ZWISCHENFLÄCHE UND HAFTUNG | [2003/17] | English: | METHOD OF FORMING COPPER INTERCONNECT CAPPING LAYERS WITH IMPROVED INTERFACE AND ADHESION | [2003/17] | French: | PROCEDE DE FORMATION DE COUCHES DE COIFFAGE D'INTERCONNEXION A INTERFACE ET ADHESION AMELIOREES | [2003/17] | Entry into regional phase | 29.01.2003 | National basic fee paid | 29.01.2003 | Designation fee(s) paid | 29.01.2003 | Examination fee paid | Examination procedure | 15.02.2002 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 29.01.2003 | Examination requested [2003/17] | 04.03.2009 | Communication of intention to grant the patent | 06.07.2009 | Fee for grant paid | 06.07.2009 | Fee for publishing/printing paid | Opposition(s) | 27.05.2010 | No opposition filed within time limit [2010/31] | Fees paid | Renewal fee | 29.01.2003 | Renewal fee patent year 03 | 04.06.2004 | Renewal fee patent year 04 | 06.06.2005 | Renewal fee patent year 05 | 27.03.2006 | Renewal fee patent year 06 | 08.06.2007 | Renewal fee patent year 07 | 18.03.2008 | Renewal fee patent year 08 | 05.06.2009 | Renewal fee patent year 09 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]WO0029642 (APPLIED MATERIALS INC [US]) [A] 1,5 * page 4 - page 6 *; | [A]JPH11330246 ; | [PA]US6174810 (ISLAM RABIUL [US], et al) [PA] * column 3 - column 4 *; | [A]GB2345790 (IBM [US]) [A] 1,5 * page 4 - page 5 * | [A] - PATENT ABSTRACTS OF JAPAN, (20000229), vol. 2000, no. 02, & JP11330246 A 19991130 (MOTOROLA INC) [A] 1,5 * abstract * |