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Extract from the Register of European Patents

EP About this file: EP1284841

EP1284841 - GROOVED POLISHING PADS FOR CHEMICAL MECHANICAL PLANARIZATION [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  27.01.2006
Database last updated on 12.11.2024
Most recent event   Tooltip05.09.2008Change - representativepublished on 08.10.2008  [2008/41]
Applicant(s)For all designated states
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Suite 1300
1105 North Market Street
Wilmington, DE 19899 / US
[N/P]
Former [2005/04]For all designated states
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Suite 1300, 1105 North Market Street
Wilmington, DE 19899 / US
Former [2003/09]For all designated states
Rodel Holdings, Inc.
Suite 1300, 1105 N. Market Street
Wilmington, DE 19899 / US
Inventor(s)01 / JAMES, David, B.
221 Aronimink Drive
Newark, DE 19711 / US
02 / VISHWANATHAN, Arun
3203 Romilly Road
Wilmington, DE 19810 / US
03 / COOK, Lee, Melbourne
20 Bryson Road
Steelville, PA 19310 / US
04 / BURKE, Peter, A.
R116, 5000 N.E. 72 Avenue
Vancouver, WA 98661 / US
05 / SHIDNER, David
39 Tyson's Ford Road
Newark, DE 19711 / US
06 / SO, Joseph, K.
20 Nightingale Circle
Newark, DE 19711 / US
07 / ROBERTS, John, V., H.
17 West Country Lane
Newark, DE 19702 / US
 [2003/09]
Representative(s)Carpmaels & Ransford LLP
One Southampton Row
London WC1B 5HA / GB
[N/P]
Former [2008/41]Carpmaels & Ransford
One Southampton Row London
WC1B 5HA / GB
Former [2003/17]Carpmaels & Ransford
43 Bloomsbury Square
London WC1A 2RA / GB
Former [2003/09]Jones, Alan John, et al
CARPMAELS & RANSFORD 43 Bloomsbury Square
London, WC1A 2RA / GB
Application number, filing date01944169.024.05.2001
[2003/09]
WO2001US16870
Priority number, dateUS20000207938P27.05.2000         Original published format: US 207938 P
US20000222099P28.07.2000         Original published format: US 222099 P
[2003/09]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO0191972
Date:06.12.2001
Language:EN
[2001/49]
Type: A1 Application with search report 
No.:EP1284841
Date:26.02.2003
Language:EN
The application published by WIPO in one of the EPO official languages on 06.12.2001 takes the place of the publication of the European patent application.
[2003/09]
Type: B1 Patent specification 
No.:EP1284841
Date:23.03.2005
Language:EN
[2005/12]
Search report(s)International search report - published on:EP06.12.2001
ClassificationIPC:B24B37/04, B24D3/28, B24D13/14
[2003/09]
CPC:
B24B37/26 (EP); H01L21/304 (KR); B24B37/042 (EP);
B24D3/28 (EP); Y02P70/10 (EP)
Designated contracting statesDE,   FR,   GB [2004/21]
Former [2003/09]AT,  BE,  CH,  CY,  DE,  DK,  ES,  FI,  FR,  GB,  GR,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  SE,  TR 
Extension statesALNot yet paid
LTNot yet paid
LVNot yet paid
MKNot yet paid
RONot yet paid
SINot yet paid
TitleGerman:RILLEN-POLIERKISSEN ZUM CHEMISCH-MECHANISCHEN PLANARISIEREN[2003/09]
English:GROOVED POLISHING PADS FOR CHEMICAL MECHANICAL PLANARIZATION[2003/09]
French:TAMPONS DE POLISSAGE RAINURES DE PLANARISATION MECANIQUE CHIMIQUE[2003/09]
Entry into regional phase13.12.2002National basic fee paid 
13.12.2002Designation fee(s) paid 
13.12.2002Examination fee paid 
Examination procedure10.12.2001Request for preliminary examination filed
International Preliminary Examining Authority: EP
13.12.2002Examination requested  [2003/09]
09.02.2004Despatch of a communication from the examining division (Time limit: M04)
18.06.2004Reply to a communication from the examining division
19.07.2004Communication of intention to grant the patent
10.01.2005Fee for grant paid
10.01.2005Fee for publishing/printing paid
Opposition(s)27.12.2005No opposition filed within time limit [2006/11]
Fees paidRenewal fee
13.12.2002Renewal fee patent year 03
13.05.2004Renewal fee patent year 04
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Cited inInternational search[XY]US6017265  (COOK LEE MELBOURNE [US], et al) [X] 1,2 * example 3 * [Y] 5;
 [Y]US4569982  (GROEGLER GERHARD [DE], et al) [Y] 5 * figure 1; claims 1-6; table 1 *;
 [X]EP0878270  (APPLIED MATERIALS INC [US]) [X] 1,2 * the whole document *;
 [A]WO9830356  (RODEL INC [US]) [A] 3 * figure 2 *;
 [A]US5534345  (BRADSHAW RICHARD L [US]) [A] 6,7 * figure 1; table 4 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.