EP1284841 - GROOVED POLISHING PADS FOR CHEMICAL MECHANICAL PLANARIZATION [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 27.01.2006 Database last updated on 12.11.2024 | Most recent event Tooltip | 05.09.2008 | Change - representative | published on 08.10.2008 [2008/41] | Applicant(s) | For all designated states Rohm and Haas Electronic Materials CMP Holdings, Inc. Suite 1300 1105 North Market Street Wilmington, DE 19899 / US | [N/P] |
Former [2005/04] | For all designated states Rohm and Haas Electronic Materials CMP Holdings, Inc. Suite 1300, 1105 North Market Street Wilmington, DE 19899 / US | ||
Former [2003/09] | For all designated states Rodel Holdings, Inc. Suite 1300, 1105 N. Market Street Wilmington, DE 19899 / US | Inventor(s) | 01 /
JAMES, David, B. 221 Aronimink Drive Newark, DE 19711 / US | 02 /
VISHWANATHAN, Arun 3203 Romilly Road Wilmington, DE 19810 / US | 03 /
COOK, Lee, Melbourne 20 Bryson Road Steelville, PA 19310 / US | 04 /
BURKE, Peter, A. R116, 5000 N.E. 72 Avenue Vancouver, WA 98661 / US | 05 /
SHIDNER, David 39 Tyson's Ford Road Newark, DE 19711 / US | 06 /
SO, Joseph, K. 20 Nightingale Circle Newark, DE 19711 / US | 07 /
ROBERTS, John, V., H. 17 West Country Lane Newark, DE 19702 / US | [2003/09] | Representative(s) | Carpmaels & Ransford LLP One Southampton Row London WC1B 5HA / GB | [N/P] |
Former [2008/41] | Carpmaels & Ransford One Southampton Row London WC1B 5HA / GB | ||
Former [2003/17] | Carpmaels & Ransford 43 Bloomsbury Square London WC1A 2RA / GB | ||
Former [2003/09] | Jones, Alan John, et al CARPMAELS & RANSFORD 43 Bloomsbury Square London, WC1A 2RA / GB | Application number, filing date | 01944169.0 | 24.05.2001 | [2003/09] | WO2001US16870 | Priority number, date | US20000207938P | 27.05.2000 Original published format: US 207938 P | US20000222099P | 28.07.2000 Original published format: US 222099 P | [2003/09] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0191972 | Date: | 06.12.2001 | Language: | EN | [2001/49] | Type: | A1 Application with search report | No.: | EP1284841 | Date: | 26.02.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 06.12.2001 takes the place of the publication of the European patent application. | [2003/09] | Type: | B1 Patent specification | No.: | EP1284841 | Date: | 23.03.2005 | Language: | EN | [2005/12] | Search report(s) | International search report - published on: | EP | 06.12.2001 | Classification | IPC: | B24B37/04, B24D3/28, B24D13/14 | [2003/09] | CPC: |
B24B37/26 (EP);
H01L21/304 (KR);
B24B37/042 (EP);
B24D3/28 (EP);
Y02P70/10 (EP)
| Designated contracting states | DE, FR, GB [2004/21] |
Former [2003/09] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | RILLEN-POLIERKISSEN ZUM CHEMISCH-MECHANISCHEN PLANARISIEREN | [2003/09] | English: | GROOVED POLISHING PADS FOR CHEMICAL MECHANICAL PLANARIZATION | [2003/09] | French: | TAMPONS DE POLISSAGE RAINURES DE PLANARISATION MECANIQUE CHIMIQUE | [2003/09] | Entry into regional phase | 13.12.2002 | National basic fee paid | 13.12.2002 | Designation fee(s) paid | 13.12.2002 | Examination fee paid | Examination procedure | 10.12.2001 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 13.12.2002 | Examination requested [2003/09] | 09.02.2004 | Despatch of a communication from the examining division (Time limit: M04) | 18.06.2004 | Reply to a communication from the examining division | 19.07.2004 | Communication of intention to grant the patent | 10.01.2005 | Fee for grant paid | 10.01.2005 | Fee for publishing/printing paid | Opposition(s) | 27.12.2005 | No opposition filed within time limit [2006/11] | Fees paid | Renewal fee | 13.12.2002 | Renewal fee patent year 03 | 13.05.2004 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [XY]US6017265 (COOK LEE MELBOURNE [US], et al) [X] 1,2 * example 3 * [Y] 5; | [Y]US4569982 (GROEGLER GERHARD [DE], et al) [Y] 5 * figure 1; claims 1-6; table 1 *; | [X]EP0878270 (APPLIED MATERIALS INC [US]) [X] 1,2 * the whole document *; | [A]WO9830356 (RODEL INC [US]) [A] 3 * figure 2 *; | [A]US5534345 (BRADSHAW RICHARD L [US]) [A] 6,7 * figure 1; table 4 * |