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EP1316104
European procedure
Extract from the Register of European Patents
EP About this file: EP1316104
| EP1316104 - BULK GAS DELIVERY SYSTEM FOR ION IMPLANTERS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 21.04.2012 Database last updated on 01.01.2025 | Most recent event Tooltip | 21.06.2013 | Lapse of the patent in a contracting state New state(s): DE | published on 24.07.2013 [2013/30] | Applicant(s) | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915-1053 / US | [2011/24] |
| Former [2003/23] | For all designated states Axcelis Technologies, Inc. 55 Cherry Hill Drive Beverly, MA 01915 / US | Inventor(s) | 01 /
RZESZUT, Richard, John 25 Sumac Street Billerica, MA 01821 / US | 02 /
QUILL, James, Patrick 32 Sunset Drive Wakefield, MA 01880 / US | [2003/23] | Representative(s) | Treeby, Philip David William, et al Maucher Jenkins Seventh Floor Offices Artillery House 11-19 Artillery Row London SW1P 1RT / GB | [N/P] |
| Former [2011/25] | Treeby, Philip David William, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB | ||
| Former [2011/21] | Whitlock, Holly Elizabeth Ann, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB | ||
| Former [2003/23] | Burke, Steven David, et al R.G.C. Jenkins & Co. 26 Caxton Street London SW1H 0RJ / GB | Application number, filing date | 01960905.6 | 21.08.2001 | [2003/23] | WO2001GB03755 | Priority number, date | US20000654958 | 05.09.2000 Original published format: US 654958 | [2003/23] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO0221566 | Date: | 14.03.2002 | Language: | EN | [2002/11] | Type: | A2 Application without search report | No.: | EP1316104 | Date: | 04.06.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 14.03.2002 takes the place of the publication of the European patent application. | [2003/23] | Type: | B1 Patent specification | No.: | EP1316104 | Date: | 15.06.2011 | Language: | EN | [2011/24] | Search report(s) | International search report - published on: | EP | 01.08.2002 | Classification | IPC: | H01J37/317, H01J27/02 | [2003/23] | CPC: |
H01J37/3171 (EP,US);
H01J37/36 (KR);
H01J37/08 (EP,US)
| Designated contracting states | DE, FR, GB, IT, NL [2004/21] |
| Former [2003/23] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | GASZUFUHRVORRICHTUNG FÜR IONENIMPLANTIERUNGSGERÄTE | [2003/23] | English: | BULK GAS DELIVERY SYSTEM FOR ION IMPLANTERS | [2003/23] | French: | SYSTEME D'APPORT DE GAZ EN VRAC POUR IMPLANTEURS IONIQUES | [2003/23] | Entry into regional phase | 02.04.2003 | National basic fee paid | 02.04.2003 | Designation fee(s) paid | 02.04.2003 | Examination fee paid | Examination procedure | 02.04.2002 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 02.04.2003 | Examination requested [2003/23] | 13.09.2007 | Despatch of a communication from the examining division (Time limit: M04) | 23.01.2008 | Reply to a communication from the examining division | 22.09.2010 | Communication of intention to grant the patent | 11.03.2011 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time | 28.04.2011 | Fee for grant paid | 28.04.2011 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 13.09.2007 | Opposition(s) | 16.03.2012 | No opposition filed within time limit [2012/21] | Request for further processing for: | The application is deemed to be withdrawn due to failure to fulfill actions required for granting the patent | 28.04.2011 | Request for further processing filed | 28.04.2011 | Full payment received (date of receipt of payment) Request granted | 12.05.2011 | Decision despatched | Fees paid | Renewal fee | 06.08.2003 | Renewal fee patent year 03 | 06.08.2004 | Renewal fee patent year 04 | 08.08.2005 | Renewal fee patent year 05 | 07.08.2006 | Renewal fee patent year 06 | 03.08.2007 | Renewal fee patent year 07 | 08.08.2008 | Renewal fee patent year 08 | 07.08.2009 | Renewal fee patent year 09 | 06.08.2010 | Renewal fee patent year 10 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | IT | 15.06.2011 | NL | 15.06.2011 | FR | 31.08.2011 | GB | 15.09.2011 | DE | 01.03.2012 | [2013/30] |
| Former [2012/37] | IT | 15.06.2011 | |
| NL | 15.06.2011 | ||
| FR | 31.08.2011 | ||
| GB | 15.09.2011 | ||
| Former [2012/36] | IT | 15.06.2011 | |
| NL | 15.06.2011 | ||
| GB | 15.09.2011 | ||
| Former [2012/23] | IT | 15.06.2011 | |
| NL | 15.06.2011 | ||
| Former [2012/02] | NL | 15.06.2011 | Cited in | International search | [X]JPH11158627 ; | [X]JPH10275695 ; | [A]JPS622442 ; | [A]JPS6298543 | [X] - PATENT ABSTRACTS OF JAPAN, (19990930), vol. 1999, no. 11, & JP11158627 A 19990615 (NISSIN ELECTRIC CO LTD) [X] 1-6,15-17,19-22 * abstract * | [X] - PATENT ABSTRACTS OF JAPAN, (19990129), vol. 1999, no. 01, & JP10275695 A 19981013 (NISSIN ELECTRIC CO LTD) [X] 1-5,15-17,19,20 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19870530), vol. 011, no. 169, Database accession no. (E - 511), & JP62002442 A 19870108 (FUJITSU LTD;OTHERS: 01) [A] 1,15 * abstract * | [A] - PATENT ABSTRACTS OF JAPAN, (19871003), vol. 011, no. 304, Database accession no. (E - 545), & JP62098543 A 19870508 (SONY CORP) [A] 1,15 * abstract * |