-
EP1251551
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP1251551
| EP1251551 - CERAMIC HEATER FOR SEMICONDUCTOR MANUFACTURING AND INSPECTING EQUIPMENT [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 06.05.2005 Database last updated on 16.07.2024 | Most recent event Tooltip | 06.05.2005 | Withdrawal of application | published on 22.06.2005 [2005/25] | Applicant(s) | For all designated states IBIDEN CO., LTD. 1, Kanda-cho 2-chome Ogaki-shi, Gifu-ken 503-0917 / JP | [N/P] |
| Former [2002/43] | For all designated states IBIDEN CO., LTD. 1, Kanda-cho 2-chome Ogaki-shi Gifu-ken 503-0917 / JP | Inventor(s) | 01 /
ITO, Yasutaka c/o IBIDEN CO., LTD., 1-1, Kitagata, Ibigawacho Ibi-gun, Gifu 501-0695 / JP | 02 /
ITO, Atsushi c/o IBIDEN CO., LTD., 1-1, Kitagata, Ibigawacho Ibi-gun, Gifu 501-0695 / JP | [2002/43] | Representative(s) | Forstmeyer, Dietmar, et al Boeters & Lieck Oberanger 32 80331 München / DE | [N/P] |
| Former [2002/43] | Forstmeyer, Dietmar, Dr. rer. nat., Dipl.-Chem., et al Boeters & Bauer, Bereiteranger 15 81541 München / DE | Application number, filing date | 01961189.6 | 30.08.2001 | [2002/43] | WO2001JP07455 | Priority number, date | JP20000261474 | 30.08.2000 Original published format: JP 2000261474 | JP20000261475 | 30.08.2000 Original published format: JP 2000261475 | [2002/43] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO0219400 | Date: | 07.03.2002 | Language: | EN | [2002/10] | Type: | A1 Application with search report | No.: | EP1251551 | Date: | 23.10.2002 | Language: | EN | The application published by WIPO in one of the EPO official languages on 07.03.2002 takes the place of the publication of the European patent application. | [2002/43] | Search report(s) | International search report - published on: | JP | 07.03.2002 | Classification | IPC: | H01L21/02, H01L21/68, H05B3/20 | [2002/43] | CPC: |
H01L21/67248 (EP,US);
H01L21/67109 (EP,US)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2002/43] | Title | German: | KERAMISCHER HEIZKÖRPER FÜR HALBLEITER UND INSPEKTIONSAUSRÜSTUNGEN | [2002/43] | English: | CERAMIC HEATER FOR SEMICONDUCTOR MANUFACTURING AND INSPECTING EQUIPMENT | [2002/43] | French: | DISPOSITIF CERAMIQUE CHAUFFANT PERMETTANT LA PRODUCTION DE SEMI-CONDUCTEURS ET EQUIPEMENT D'INSPECTION | [2002/43] | Entry into regional phase | 21.05.2002 | Translation filed | 21.05.2002 | National basic fee paid | 21.05.2002 | Search fee paid | 21.05.2002 | Designation fee(s) paid | 21.05.2002 | Examination fee paid | Examination procedure | 21.05.2002 | Examination requested [2002/43] | 28.04.2005 | Application withdrawn by applicant [2005/25] | Fees paid | Renewal fee | 26.08.2003 | Renewal fee patent year 03 | 26.08.2004 | Renewal fee patent year 04 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]JPH01153596 (NEC CORP); | [Y]JPH0498784 (NGK INSULATORS LTD); | [A]JPH10233435 (TOTO LTD); | [A]EP0863544 (NGK INSULATORS LTD [JP]); | [Y]JPH11312570 (KYOCERA CORP); | [A]JP2000114354 (KYOCERA CORP) |