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EP1305985
European procedure
Extract from the Register of European Patents
EP About this file: EP1305985
| EP1305985 - Z-PINCH PLASMA X-RAY SOURCE USING SURFACE DISCHARGE PREIONIZATION [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 15.04.2005 Database last updated on 12.07.2024 | Most recent event Tooltip | 27.06.2008 | Change - representative | published on 30.07.2008 [2008/31] | Applicant(s) | For all designated states Plex LLC 20 Chapel Street C512 Brookline, MA 02446-5478 / US | [2003/18] | Inventor(s) | 01 /
MCGEOCH, Malcolm, W. 20 Chapel Street C512 Brookline, MA 02446 / US | [2003/18] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE | [N/P] |
| Former [2008/31] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | ||
| Former [2003/18] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 01966789.8 | 28.03.2001 | [2003/18] | WO2001US09964 | Priority number, date | US20000543495 | 06.04.2000 Original published format: US 543495 | [2003/18] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO0178469 | Date: | 18.10.2001 | Language: | EN | [2001/42] | Type: | A2 Application without search report | No.: | EP1305985 | Date: | 02.05.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 18.10.2001 takes the place of the publication of the European patent application. | [2003/18] | Type: | B1 Patent specification | No.: | EP1305985 | Date: | 09.06.2004 | Language: | EN | [2004/24] | Search report(s) | International search report - published on: | EP | 28.02.2002 | Classification | IPC: | H05G2/00 | [2003/18] | CPC: |
H05G2/003 (EP,US);
H05G2/005 (EP,US);
H05H1/06 (EP,US)
| Designated contracting states | DE, FR, GB, NL [2004/24] |
| Former [2003/18] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | Z-PINCH-PLASMA-RÖNTGENQUELLE MIT OBERFLÄCHENENTLADUNG-VORIONISIERUNG | [2003/18] | English: | Z-PINCH PLASMA X-RAY SOURCE USING SURFACE DISCHARGE PREIONIZATION | [2003/18] | French: | SOURCE DE RAYONS X DE PLASMA A STRICTION LONGITUDINALE UTILISANT UNE PREIONISATION A DECHARGE DE SURFACE | [2003/42] |
| Former [2003/18] | SOURCE DE RAYONS X DE PLASMA A STRICTION LONGITUDINALE UTILISATION UNE PREIONISATION A DECHARGE DE SURFACE | Entry into regional phase | 05.11.2002 | National basic fee paid | 05.11.2002 | Designation fee(s) paid | 05.11.2002 | Examination fee paid | Examination procedure | 03.10.2001 | Request for preliminary examination filed International Preliminary Examining Authority: EP | 05.11.2002 | Examination requested [2003/18] | 31.12.2002 | Amendment by applicant (claims and/or description) | 17.10.2003 | Communication of intention to grant the patent | 26.03.2004 | Fee for grant paid | 26.03.2004 | Fee for publishing/printing paid | Opposition(s) | 10.03.2005 | No opposition filed within time limit [2005/22] | Fees paid | Renewal fee | 03.04.2003 | Renewal fee patent year 03 | 22.03.2004 | Renewal fee patent year 04 | Penalty fee | Additional fee for renewal fee | 31.03.2003 | 03 M06 Fee paid on 03.04.2003 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | FR | 09.06.2004 | NL | 09.06.2004 | [2006/14] |
| Former [2006/13] | NL | 09.06.2004 | Cited in | International search | [DXA]US5504795 (MCGEOCH MALCOLM W [US]) [DX] 42 * column 2, line 32 - column 6, line 2 * * figures 1-3 * [A] 1-4,9-12,15,21,22,25-27,31-33,36,37,39-41; | [A]US5142166 (BIRX DANIEL L [US]) [A] 16 * column 3, line 14 - line 25 *; | [A]US5763930 (PARTLO WILLIAM NORMAN [US]) [A] 18,19,23 * column 3, line 37 - line 63 * * column 4, line 66 - line 20 * * figure 1 *; | [A]US5134641 (FRIEDE DIRK [DE], et al) [A] 1,21 * column 9, line 50 - line 58 * * column 10, line 35 - line 55 * | [A] - MCGEOCH M, "RADIO-FREQUENCY-PREIONIZED XENON Z-PINCH SOURCE FOR EXTREME ULTRAVIOLET LITHOGRAPHY", APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA,WASHINGTON, US, (19980320), vol. 37, ISSN 0003-6935, pages 1651 - 1658, XP000996996 [A] 17 * page 1652, column R, paragraph L - page 1653, column L, paragraph 1 * DOI: http://dx.doi.org/10.1364/AO.37.001651 |