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EP1313573
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EP About this file: EP1313573
| EP1313573 - SEMICONDUCTOR WAFER CONTAINER CLEANING APPARATUS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 24.04.2009 Database last updated on 30.10.2024 | Most recent event Tooltip | 24.04.2009 | Application deemed to be withdrawn | published on 27.05.2009 [2009/22] | Applicant(s) | For all designated states SEMITOOL, INC. 655 West Reserve Drive Kalispell Montana 59901 / US | [N/P] |
| Former [2003/22] | For all designated states SEMITOOL, INC. 655 West Reserve Drive Kalispell, Montana 59901 / US | Inventor(s) | 01 /
BEXTEN, Daniel, P. 655 West Reserve Drive Kalispell, MT 59901 / US | 02 /
NORBY, Jerry, R. 655 West Reserve Drive Kalispell, MT 59901 / US | 03 /
BRYER, James 655 West Reserve Drive Kalispell, MT 59901 / US | [2003/22] | Representative(s) | Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte Grillparzerstrasse 14 81675 München / DE | [N/P] |
| Former [2003/22] | Viering, Jentschura & Partner Postfach 22 14 43 80504 München / DE | Application number, filing date | 01984548.6 | 20.06.2001 | [2003/22] | WO2001US41085 | Priority number, date | US20000611642 | 07.07.2000 Original published format: US 611642 | US20000658395 | 08.09.2000 Original published format: US 658395 | [2003/22] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO0217355 | Date: | 28.02.2002 | Language: | EN | [2002/09] | Type: | A2 Application without search report | No.: | EP1313573 | Date: | 28.05.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 28.02.2002 takes the place of the publication of the European patent application. | [2003/22] | Search report(s) | International search report - published on: | US | 02.05.2002 | (Supplementary) European search report - dispatched on: | EP | 12.10.2005 | Classification | IPC: | B08B3/02, B08B5/02, B08B9/08, B08B3/12, H01L21/00 | [2005/35] | CPC: |
H01L21/67051 (EP);
B08B3/12 (EP);
B08B9/0861 (EP);
B08B9/32 (EP)
|
| Former IPC [2003/22] | B08B3/02, B08B5/02, B08B9/08 | Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2003/22] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | VORRICHTUNG ZUR REINIGUNG VON HALBLEITER-WAFER BEHÄLTERN | [2003/22] | English: | SEMICONDUCTOR WAFER CONTAINER CLEANING APPARATUS | [2003/22] | French: | APPAREIL DE NETTOYAGE DE CONTENANTS POUR PLAQUETTES SEMI-CONDUCTRICES | [2003/22] | Entry into regional phase | 07.02.2003 | National basic fee paid | 07.02.2003 | Search fee paid | 07.02.2003 | Designation fee(s) paid | 07.02.2003 | Examination fee paid | Examination procedure | 22.01.2002 | Request for preliminary examination filed International Preliminary Examining Authority: US | 07.02.2003 | Examination requested [2003/22] | 30.07.2003 | Amendment by applicant (claims and/or description) | 28.07.2008 | Despatch of a communication from the examining division (Time limit: M04) | 12.12.2008 | Application deemed to be withdrawn, date of legal effect [2009/22] | 12.01.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/22] | Fees paid | Renewal fee | 26.06.2003 | Renewal fee patent year 03 | 14.06.2004 | Renewal fee patent year 04 | 21.06.2005 | Renewal fee patent year 05 | 28.06.2006 | Renewal fee patent year 06 | 27.06.2007 | Renewal fee patent year 07 | 25.06.2008 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [E]US2001047812 (BRYER CHARLES JAMES [US], et al) [E] 1,6,26-28* paragraph [0010]; figure 7; claim 1 * | International search | [X]US5224503 ; | [X]US5672212 |