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EP1334514

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Extract from the Register of European Patents

EP About this file: EP1334514

EP1334514 - DIELECTRIC ETCH CHAMBER WITH EXPANDED PROCESS WINDOW [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 10.07.2009 Database last updated on 06.11.2024
Most recent event Tooltip	10.07.2009	Application deemed to be withdrawn	published on 12.08.2009 [2009/33]
Applicant(s)	For all designated states Applied Materials, Inc. P.O. Box 450A Santa Clara, California 95052 / US
	[N/P]
Former [2003/33]	For all designated states Applied Materials, Inc. P.O. Box 450A Santa Clara, California 95052 / US
Inventor(s)	01 / CARDUCCI, James, D. 731 Gail Avenue Sunnyvale, CA 94086 / US
	02 / NOORBAKHSH, Hamid 40327 Canyon Heights Drive Fremont, CA 95439 / US
	03 / LEE, Evans, Y. 2327 Farmcrest Street Milpitas, CA 95035 / US
	04 / PU, Bryan, Y. 3064 Rosato Court San Jose, CA 95135 / US
	05 / SHAN, Hongqing 1369 South Stelling Road Cupertino, CA 95014 / US
	06 / BJORKMAN, Claes 1532 California Street 5 Mountain View, CA 94041 / US
	07 / SALIMIAN, Siamak 958 Gerber Court Sunnyvale, CA 94087 / US
	08 / LUSCHER, Paul, E. 1365 Flicker Way Sunnyvale, CA 94087 / US
	09 / WELCH, Michael, D. 1169 Pineto Place Pleasanton, CA 94566 / US
	10 / LIU, Jingbao 760 Holbrook Place Sunnyvale, CA 94087 / US
	11 / KOMATSU, Takehiko 4512 Carlyle Court, 1514 Santa Clara, CA 95054 / US
	12 / DOAN, Kenny, L. 1801 Fumia Place San Jose, CA 95131 / US
	13 / CHANG, Melody 107 Willow Lane Union City, CA 94587 / US
	14 / WANG, Zhuxu 19327 Sakura Way Cupertino, CA 95014 / US
	15 / KIM, Yunsang 3648 Gleason Avenue San Jose, CA 95050 / US
	16 / WANG, Ruiping 622 Sammie Avenue Fremont, CA 94539 / US
	[2003/38]
Former [2003/33]	01 / CARDUCCI, James, D. 731 Gail Avenue Sunnyvale, CA 94086 / US
	02 / NOORBAKHSH, Hamid 40327 Canyon Heights Drive Fremont, CA 95439 / US
	03 / LEE, Evans, Y. 2327 Farmcrest Street Milpitas, CA 95035 / US
	04 / PU, Bryan, Y. 3064 Rosato Court San Jose, CA 95135 / US
	05 / SHAN, Hongqing 1369 South Stelling Road Cupertino, CA 95014 / US
	06 / BJORKMAN, Claes 1532 California Street 5 Mountain View, CA 94041 / US
	07 / SALIMIAN, Siamak 958 Gerber Court Sunnyvale, CA 94087 / US
	08 / LUSCHER, Paul, E. 1365 Flicker Way Sunnyvale, CA 94087 / US
	09 / WELCH, Michael, D. 1169 Pineto Place Pleasanton, CA 94566 / US
	10 / LIU, Jingbao 760 Holbrook Place Sunnyvale, CA 94087 / US
	11 / KOMATSU, Takehiko 4512 Carlyle Court, 1514 Santa Clara, CA 95054 / US
	12 / DOAN, Kenny, L. 1583 Clampet Way San Jose, CA 95131 / US
	13 / CHANG, Melody 107 Willow Lane Union City, CA 94587 / US
	14 / WANG, Zhuxu 19327 Sakura Way Cupertino, CA 95014 / US
	15 / KIM, Yunsang 3648 Gleason Avenue San Jose, CA 95050 / US
	16 / WANG, Ruiping 622 Sammie Avenue Fremont, CA 94539 / US
Representative(s)	Zimmermann, Gerd Heinrich, et al Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE
	[N/P]
Former [2008/30]	Zimmermann, Gerd Heinrich, et al Zimmermann & Partner Postfach 330 920 80069 München / DE
Former [2003/33]	Zimmermann, Gerd Heinrich, et al Zimmermann & Partner, Postfach 33 09 20 80069 München / DE
Application number, filing date	01993018.9	01.11.2001
	[2003/33]
	WO2001US46012
Priority number, date	US20000704972	01.11.2000 Original published format: US 704972
	US20000704867	01.11.2000 Original published format: US 704867
	[2003/33]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO0237541
	Date:	10.05.2002
	Language:	EN
	[2002/19]
	Type:	A2 Application without search report
	No.:	EP1334514
	Date:	13.08.2003
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 10.05.2002 takes the place of the publication of the European patent application.
	[2003/33]
Search report(s)	International search report - published on:	EP	10.10.2002
Classification	IPC:	H01L21/68, H01L21/31, H01L21/00, H01L21/311, H01J37/32, H01L21/58	[2007/41]
	CPC:	H01L21/6875 (EP); H01L21/3065 (KR); H01J37/32522 (EP); H01L21/31116 (EP); H01L21/67069 (EP); H01L21/6833 (EP); (+) H01L21/68792 (EP); H01L21/76802 (EP); H01L21/76807 (EP); H01L21/76897 (EP); H01L2924/3011 (EP) (-)
	Former IPC [2003/33]	H01L21/68
Designated contracting states	DE, FR, GB, IT [2004/22]
Former [2003/33]	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR
Extension states	AL	Not yet paid
	LT	Not yet paid
	LV	Not yet paid
	MK	Not yet paid
	RO	Not yet paid
	SI	Not yet paid
Title	German:	DIELEKTRISCHE ÄTZKAMMER MIT ERWEITERTEM PROZESSFENSTER	[2003/33]
	English:	DIELECTRIC ETCH CHAMBER WITH EXPANDED PROCESS WINDOW	[2003/33]
	French:	CHAMBRE DE GRAVURE DIELECTRIQUE A FENETRE DE TRAITEMENT EXPANSEE	[2003/33]
Entry into regional phase	20.06.2002	National basic fee paid
	20.06.2002	Designation fee(s) paid
	20.06.2002	Examination fee paid
Examination procedure	20.06.2002	Amendment by applicant (claims and/or description)
	20.06.2002	Examination requested [2003/33]
	07.08.2008	Despatch of a communication from the examining division (Time limit: M06)
	18.02.2009	Application deemed to be withdrawn, date of legal effect [2009/33]
	24.03.2009	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/33]
Fees paid	Renewal fee
	07.11.2003	Renewal fee patent year 03
	08.11.2004	Renewal fee patent year 04
	07.11.2005	Renewal fee patent year 05
	06.11.2006	Renewal fee patent year 06
	06.11.2007	Renewal fee patent year 07
	07.11.2008	Renewal fee patent year 08
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited in	International search	[XY]US5788799 (STEGER ROBERT J [US], et al) [X] 1 * the whole document * [Y] 2-8;
		[Y]US5798016 (OEHRLEIN GOTTLIEB STEFAN [US], et al) [Y] 1-8 * column 2, line 46 - column 3, line 60 *;
		[Y]JPH11176920 ;
		[Y]US6122159 (ARAI KENICHI [JP], et al) [Y] 1-3 * abstract *;
		[Y]EP0512936 (IBM [US]) [Y] 2-4 * the whole document *;
		[Y]US5886863 (NAGASAKI KOICHI [JP], et al) [Y] 2-4 * column 8, line 9 - line 11 * * column 26, line 47 - line 61 * * column 22, line 66 - line 67 *;
		[Y]US5753132 (SHAMOUILIAN SHAMOUIL [US], et al) [Y] 5-8 * column 1, line 48 - line 50 *;
		[Y]JPH10209257 (TOMOEGAWA PAPER CO LTD) [Y] 2-7 * paragraphs [0003] , [0004]; example 1 *;
		[PY]US6166897 (MATSUNAGA TADAO [JP]);
		[Y]EP0942060 (NITTO DENKO CORP [JP]) [Y] 5-7 * abstract *
		[Y] - PATENT ABSTRACTS OF JAPAN, (19991029), vol. 1999, no. 12, & JP11176920 A 19990702 (SHIN ETSU CHEM CO LTD) [Y] 1-3 * abstract *

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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