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EP1327913
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EP About this file: EP1327913
| EP1327913 - Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 07.08.2009 Database last updated on 03.09.2024 | Most recent event Tooltip | 07.08.2009 | Application deemed to be withdrawn | published on 09.09.2009 [2009/37] | Applicant(s) | For all designated states ASML Holding N.V. De Run 6501 5504 DR Veldhoven / NL | [N/P] |
| Former [2006/25] | For all designated states ASML Holding N.V. De Run 6501 5504 DR Veldhoven / NL | ||
| Former [2003/29] | For all designated states ASML US, Inc. 77 Danbury Road Wilton, CT 06897-0877 / US | Inventor(s) | 01 /
Freidman, Glenn M. 15 Bartram Drive Redding, Connecticut 06896 / US | 02 /
Kochersperger, Peter 38 Jamestown Road Easton, Connecticut 06612 / US | 03 /
Laganza, Joseph 10 Emerson Street East Norwalk, Connecticut 06855 / US | [2003/29] | Representative(s) | van den Hooven, Jan, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
| Former [2009/08] | Van den Hooven, Jan, et al ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | ||
| Former [2003/29] | Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 80538 München / DE | Application number, filing date | 02027411.4 | 09.12.2002 | [2003/29] | Priority number, date | US20020040375 | 09.01.2002 Original published format: US 40375 | [2003/29] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1327913 | Date: | 16.07.2003 | Language: | EN | [2003/29] | Type: | A3 Search report | No.: | EP1327913 | Date: | 21.03.2007 | [2007/12] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 15.02.2007 | Classification | IPC: | G03F9/00 | [2003/29] | CPC: |
G03F9/7011 (EP,US);
G03F9/00 (KR);
G03F7/70741 (EP,US)
| Designated contracting states | DE, FR, GB, IT, NL [2007/48] |
| Former [2003/29] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, SI, SK, TR | Title | German: | Verfahren und Vorrichtung zur Übertragung und Ladung einer Maske mittels eines robotischen Endeffektors | [2003/29] | English: | Method and apparatus for transferring and loading a reticle with a robotic reticle end-effector | [2003/29] | French: | Procédé et dispositif permettant de transférer et de charger un masque à l'aide d'un effecteur d'extrémité de robot | [2003/29] | Examination procedure | 30.04.2007 | Examination requested [2007/24] | 19.12.2007 | Despatch of a communication from the examining division (Time limit: M04) | 29.04.2008 | Reply to a communication from the examining division | 02.09.2008 | Despatch of a communication from the examining division (Time limit: M06) | 13.03.2009 | Application deemed to be withdrawn, date of legal effect [2009/37] | 21.04.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/37] | Fees paid | Renewal fee | 07.12.2004 | Renewal fee patent year 03 | 13.12.2005 | Renewal fee patent year 04 | 12.12.2006 | Renewal fee patent year 05 | 13.12.2007 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.12.2008 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]JP2001076998 (CANON KK) [X] 1,4-9 * the whole document *; | [E]US2003077912 (MATSUMOTO KEN [JP]) [E] 1,4-9 * paragraphs [0025] , [0034]; figure 1 *; | [X]US6183026 (CAI LIHONG [US], et al) [X] 11-13,16,17,21-29,32,33,36-42 * column 4, line 56 - line 67; figures 1-5; claims 1,5,6,11,12 *; | [X]WO0068625 (MATRIX INTEGRATED SYSTEMS INC [US]) [X] 28,29,32,33,36-42 * page 7, lines 12-17; figures 2,4; claims 1,7 * * page 8, line 7 - line 17 * * page 13, line 19 - line 30 *; | [X]EP1052546 (ASM LITHOGRAPHY BV [NL]) [X] 28,32,37,38 * paragraphs [0031] - [0035]; figures 5-9 *; | [X]EP1052547 (ASM LITHOGRAPHY BV [NL]) [X] 28,29,32,33,36,38-42 * paragraphs [0023] - [0029]; figures 2-4 * |