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EP1286388
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EP About this file: EP1286388
| EP1286388 - Aluminium hardmask for dielectric ETCH [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 09.10.2009 Database last updated on 02.11.2024 | Most recent event Tooltip | 09.10.2009 | Application deemed to be withdrawn | published on 11.11.2009 [2009/46] | Applicant(s) | For all designated states Texas Instruments Incorporated 7839 Churchill Way Mail Station 3999 Dallas, Texas 75251 / US | [N/P] |
| Former [2003/09] | For all designated states Texas Instruments Incorporated 7839 Churchill Way, Mail Station 3999 Dallas, Texas 75251 / US | Inventor(s) | 01 /
Brennan, Kenneth D. 2610 Dupree Circle 78748, Austin / US | [2003/09] | Representative(s) | Holt, Michael, et al Texas Instruments Limited European Patent Department 3rd Floor 401 Grafton Gate Milton Keynes MK9 1AQ / GB | [N/P] |
| Former [2003/09] | Holt, Michael, et al Texas Instruments Ltd., EPD MS/13, 800 Pavilion Drive Northampton Business Park, Northampton NN4 7YL / GB | Application number, filing date | 02102210.8 | 22.08.2002 | [2003/09] | Priority number, date | US20010935450 | 23.08.2001 Original published format: US 935450 | [2003/09] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1286388 | Date: | 26.02.2003 | Language: | EN | [2003/09] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 17.12.2002 | Classification | IPC: | H01L21/311, H01L21/768 | [2003/09] | CPC: |
H01L21/76811 (EP,US);
H01L21/31144 (EP,US);
H01L21/76813 (EP,US)
| Designated contracting states | DE, FR, GB [2003/46] |
| Former [2003/09] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, SK, TR | Title | German: | Hartmaske aus Aluminium zum Ätzen einer dielektrischen Schicht | [2003/09] | English: | Aluminium hardmask for dielectric ETCH | [2003/09] | French: | Masque dur en aluminium pour gravure d'un diélectrique | [2003/09] | Examination procedure | 26.08.2003 | Examination requested [2003/44] | 28.10.2008 | Despatch of a communication from the examining division (Time limit: M06) | 08.05.2009 | Application deemed to be withdrawn, date of legal effect [2009/46] | 16.06.2009 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/46] | Fees paid | Renewal fee | 31.08.2004 | Renewal fee patent year 03 | 31.08.2005 | Renewal fee patent year 04 | 31.08.2006 | Renewal fee patent year 05 | 31.08.2007 | Renewal fee patent year 06 | 01.09.2008 | Renewal fee patent year 07 | Penalty fee | Additional fee for renewal fee | 31.08.2009 | 08 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XA]EP0260201 (FAIRCHILD SEMICONDUCTOR [US]) [X] 1,2 * column 3 - column 4 * [A] 5; | [X]US5562801 (NULTY JAMES E [US]) [X] 1,2 * column 6 - column 7 *; | [X]EP0855737 (MITEL CORP [CA]) [X] 1,2 * page 4 *; | [A]EP1033745 (MOTOROLA INC [US]) [A] 6* the whole document *; | [A]US6169029 (YANG CHING-SHENG [TW]) [A] 4 * abstract *; | [PXA]US2001029105 (SETA SHOJI [JP], et al) [PX] 1,2,4 * paragraph [0089] - paragraph [0095] * [PA] 6,7,9 |