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EP1271642

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EP About this file: EP1271642

EP1271642 - Method for evaluating dependence of properties of semiconductor substrate on plane orientation and semiconductor device using the same [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 08.05.2009 Database last updated on 14.09.2024
Most recent event Tooltip	08.05.2009	Application deemed to be withdrawn	published on 10.06.2009 [2009/24]
Applicant(s)	For all designated states Sharp Kabushiki Kaisha 22-22, Nagaike-cho Abeno-ku Osaka-shi, Osaka 545-8522 / JP
	For all designated states Masuoka, Fujio 2-33-18, Higashikatsuyama, Aoba-ku Sendai-shi Miyagi 981-0923 / JP
	[N/P]
Former [2003/01]	For all designated states Sharp Kabushiki Kaisha 22-22, Nagaike-cho, Abeno-ku Osaka-shi, Osaka 545-8522 / JP
	For all designated states Masuoka, Fujio 2-33-18, Higashikatsuyama, Aoba-ku Sendai-shi, Miyagi 981-0923 / JP
Inventor(s)	01 / Endoh, Tetsuo 8-6, Yurigaoka 5-chome Natori-shi, Miyagi 981-1245 / JP
	02 / Masuoka, Fujio 2-33-18, Higashikatsuyama, Aoba-ku Sendai-shi, Miyagi 981-0923 / JP
	03 / Takeuchi, Noboru 2537-111, Kasuga-cho Fukuyama-shi, Hiroshima 721-0907 / JP
	04 / Tanigami, Takuji 3-10-301, Kinoshocho 1-chome Fukuyama-shi, Hiroshima 720-0082 / JP
	05 / Yokoyama, Takashi 17-6, Rokuchonome-Nakamachi, Wakabayashi-ku Sendai-shi, Miyagi 984-0012 / JP
	[2003/01]
Representative(s)	Brown, Kenneth Richard, et al R.G.C. Jenkins & Co 26 Caxton Street London SW1H 0RJ / GB
	[N/P]
Former [2003/01]	Brown, Kenneth Richard, et al R.G.C. Jenkins & Co. 26 Caxton Street London SW1H 0RJ / GB
Application number, filing date	02254340.9	21.06.2002
	[2003/01]
Priority number, date	JP20010190277	22.06.2001 Original published format: JP 2001190277
	[2003/01]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	EP1271642
	Date:	02.01.2003
	Language:	EN
	[2003/01]
	Type:	A3 Search report
	No.:	EP1271642
	Date:	21.09.2005
	[2005/38]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	08.08.2005
Classification	IPC:	H01L21/66	[2003/01]
	CPC:	H01L22/12 (EP,US); H01L29/78 (KR); H01L2924/0002 (EP,US)
	C-Set:	H01L2924/0002, H01L2924/00 (EP,US)
Designated contracting states	DE, GB, NL [2006/23]
Former [2003/01]	AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR
Title	German:	Methode zur Evaluierung der Abhängigkeit von Halbleitersubstrat-Eigenschaften von der Kristallorientierung und Halbleiter damit	[2003/01]
	English:	Method for evaluating dependence of properties of semiconductor substrate on plane orientation and semiconductor device using the same	[2003/01]
	French:	Méthode d'évaluation de la dépendance d'un matériau semi-conductrice de l'orientation cristallographique et dispositif semi-conductrice associée	[2003/01]
Examination procedure	14.12.2005	Examination requested [2006/06]
	04.04.2006	Loss of particular rights, legal effect: designated state(s)
	11.07.2006	Despatch of communication of loss of particular rights: designated state(s) AT, BE, CH, CY, DK, ES, FI, FR, GR, IE, IT, LU, MC, PT, SE, TR
	12.08.2008	Despatch of a communication from the examining division (Time limit: M04)
	23.12.2008	Application deemed to be withdrawn, date of legal effect [2009/24]
	26.01.2009	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2009/24]
Fees paid	Renewal fee
	14.06.2004	Renewal fee patent year 03
	14.06.2005	Renewal fee patent year 04
	14.06.2006	Renewal fee patent year 05
	14.06.2007	Renewal fee patent year 06
	28.03.2008	Renewal fee patent year 07
	Penalty fee
	Penalty fee Rule 85a EPC 1973
	26.04.2006	AT M01 Not yet paid
	26.04.2006	BE M01 Not yet paid
	26.04.2006	CH M01 Not yet paid
	26.04.2006	CY M01 Not yet paid
	26.04.2006	DK M01 Not yet paid
	26.04.2006	ES M01 Not yet paid
	26.04.2006	FI M01 Not yet paid
	26.04.2006	FR M01 Not yet paid
	26.04.2006	GR M01 Not yet paid
	26.04.2006	IE M01 Not yet paid
	26.04.2006	IT M01 Not yet paid
	26.04.2006	LU M01 Not yet paid
	26.04.2006	MC M01 Not yet paid
	26.04.2006	PT M01 Not yet paid
	26.04.2006	SE M01 Not yet paid
	26.04.2006	TR M01 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[DX]JPH07283117 ;
		[DA]JPH10154810 ;
		[X]US4309813 (HULL RICHARD) [X] 10 * the whole document *;
		[XY]US4470875 (POTEAT TOMMY L [US]) [X] 7-10 * column 2, line 54 - column 34, line 14; figures 1-4 * [Y] 1-6;
		[Y]EP0618615 (SIEMENS AG [DE]) [Y] 1-6 * page 5, line 45 - page 6, line 37; figure 1 *;
		[Y] - WOLF S ET AL, "Silicon processing for the VLSI era, volume 1: Process technology", SILICON PROCESSING FOR THE VLSI ERA, LATTICE PRESS, SUNSET BEACH, CA, US, (1986), vol. 1, pages 211 - 213, XP002337036 [Y] 1-6 * the whole document *
		[DX] - PATENT ABSTRACTS OF JAPAN, (19960229), vol. 1996, no. 02, & JP07283117 A 19951027 (OKI ELECTRIC IND CO LTD) [DX] 10,11 * abstract *
		[X] - VANGBO M ET AL, "PRECISE MASK ALIGNMENT TO THE CRYSTALLOGRAPHIC ORIENTATION OF SILICON WAFERS USING WET ANISOTROPIC ETCHING", JOURNAL OF MICROMECHANICS & MICROENGINEERING, NEW YORK, NY, US, (199606), vol. 6, no. 2, ISSN 0960-1317, pages 279 - 284, XP001028555 [X] 10 * the whole document * DOI: http://dx.doi.org/10.1088/0960-1317/6/2/011
		[X] - ENSELL G, "Alignment of mask patterns to crystal orientation", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, (199605), vol. 53, no. 1, ISSN 0924-4247, pages 345 - 348, XP004018170 [X] 10 * the whole document * DOI: http://dx.doi.org/10.1016/0924-4247(96)80158-0
		[X] - CHEN P-H ET AL, "PRECISE MASK ALIGNMENT DESIGN TO CRYSTAL ORIENTATION OF (100) SILICON WAFER USING WET ANISOTROPIC ETCHING", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, (2000), vol. 4174, ISSN 0277-786X, pages 462 - 466, XP001030488 [X] 10 * the whole document * DOI: http://dx.doi.org/10.1117/12.396466
		[DA] - PATENT ABSTRACTS OF JAPAN, (19980930), vol. 1998, no. 11, & JP10154810 A 19980609 (SANYO ELECTRIC CO LTD) [DA] 1-10 * abstract *

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