Extract from the Register of European Patents

EP Citations: EP1283368

Cited inSearch
Type:Patent literature
Publication No.:DE10001509  [A]
 (LEYBOLD VAKUUM GMBH [DE]) [A] 1,2* the whole document *;
Type:Patent literature
Publication No.:EP1118774  [A]
 (SEIKO SEIKI KK [JP]) [A] 1 * figure 5; claim 1 *