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EP About this file: EP1357576

EP1357576 - Highly heat-resistant plasma etching electrode and dry etching device including the same [Right-click to bookmark this link]
Status	The application is deemed to be withdrawn Status updated on 25.06.2010 Database last updated on 06.07.2024
Most recent event Tooltip	25.06.2010	Application deemed to be withdrawn	published on 28.07.2010 [2010/30]
Applicant(s)	For all designated states Nisshinbo Industries, Inc. 31-11, Nihonbashi Ningyocho 2-chome Chuo-ku Tokyo 103-8650 / JP
	[N/P]
Former [2003/44]	For all designated states Nisshinbo Industries, Inc. 31-11, Nihonbashi Ningyocho 2-chome Chuo-ku, Tokyo 103-8650 / JP
Inventor(s)	01 / Yamaguchi, Akira Kawagoe Plant, Nisshinbo Industies,Inc.,4-10,Higa shitamachi, Kawagoe-shi, Saitama 350-1114 / JP
	02 / Tomita, Hideshi Rsrch and Dev. Center,Nisshinbo Industries,Inc.,1 -2-3, Ohnodai, Midori-ku, Chiba 267-0056 / JP
	[2006/31]
Former [2003/44]	01 / Yamaguchi, Akira Kawagoe Plant, Nisshinbo Industies,Inc.,4-10,Higa shitamachi, Kawagoe-shi, Saitama 350-1114 / JP
	02 / Tomita, Shuji Rsrch and Dev. Center,Nisshinbo Industries,Inc.,1 -2-3, Ohnodai, Midori-ku, Chiba 267-0056 / JP
Representative(s)	Moinas, Michel Cabinet Michel Moinas 13 Chemin du Levant 01210 Ferney-Voltaire / FR
	[N/P]
Former [2003/44]	Moinas, Michel Cabinet Michel Moinas 13 Chemin du Levant 01210 Ferney-Voltaire / FR
Application number, filing date	02356151.7	31.07.2002
	[2003/44]
Priority number, date	JP20020118861	22.04.2002 Original published format: JP 2002118861
	JP20020187529	27.06.2002 Original published format: JP 2002187529
	[2003/44]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	EP1357576
	Date:	29.10.2003
	Language:	EN
	[2003/44]
	Type:	A3 Search report
	No.:	EP1357576
	Date:	26.04.2006
	[2006/17]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	10.03.2006
Classification	IPC:	H01J37/32, C08L63/00, C08G18/09, C08K3/04	[2003/44]
	CPC:	H01J37/3255 (EP,US); H01L21/3065 (KR); C09J163/00 (EP,US); H01J37/32009 (EP,US); C08K3/04 (EP,US); C08L2666/20 (EP,US); (+) C08L79/08 (EP,US) (-)
	C-Set:	C09J163/00, C08L2666/20 (EP,US)
Designated contracting states	DE [2007/01]
Former [2003/44]	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, SK, TR
Title	German:	Hitzebeständige Elektrode zum Plasmaätzen, und Plasmaätzvorrichtung mit dieser Elektrode	[2003/44]
	English:	Highly heat-resistant plasma etching electrode and dry etching device including the same	[2003/44]
	French:	Electrode résistante à la chaleur pour décapage à plasma, et dispositif pour décapage à plasma comportant celle-ci	[2003/44]
Examination procedure	07.08.2006	Examination requested [2006/38]
	27.10.2006	Loss of particular rights, legal effect: designated state(s)
	14.02.2007	Despatch of a communication from the examining division (Time limit: M04)
	19.02.2007	Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, SK, TR
	08.06.2007	Reply to a communication from the examining division
	02.02.2010	Application deemed to be withdrawn, date of legal effect [2010/30]
	09.03.2010	Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2010/30]
Fees paid	Renewal fee
	28.07.2004	Renewal fee patent year 03
	27.07.2005	Renewal fee patent year 04
	26.07.2006	Renewal fee patent year 05
	31.07.2007	Renewal fee patent year 06
	14.07.2008	Renewal fee patent year 07
	Penalty fee
	Penalty fee Rule 85a EPC 1973
	04.12.2006	AT M01 Not yet paid
	04.12.2006	BE M01 Not yet paid
	04.12.2006	BG M01 Not yet paid
	04.12.2006	CH M01 Not yet paid
	04.12.2006	CY M01 Not yet paid
	04.12.2006	CZ M01 Not yet paid
	04.12.2006	DK M01 Not yet paid
	04.12.2006	EE M01 Not yet paid
	04.12.2006	ES M01 Not yet paid
	04.12.2006	FI M01 Not yet paid
	04.12.2006	FR M01 Not yet paid
	04.12.2006	GB M01 Not yet paid
	04.12.2006	GR M01 Not yet paid
	04.12.2006	IE M01 Not yet paid
	04.12.2006	IT M01 Not yet paid
	04.12.2006	LU M01 Not yet paid
	04.12.2006	MC M01 Not yet paid
	04.12.2006	NL M01 Not yet paid
	04.12.2006	PT M01 Not yet paid
	04.12.2006	SE M01 Not yet paid
	04.12.2006	SK M01 Not yet paid
	04.12.2006	TR M01 Not yet paid
	Additional fee for renewal fee
	31.07.2009	08 M06 Not yet paid
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[A]JP2000290468 ;
		[A]JPH0616907 ;
		[A]JPH09241353 ;
		[A]US5079326 (SUZUKI TOSHIO [JP], et al) [A] 1,3-7 * abstract * * column 1, lines 52-54 * * column 13, line 35 - column 14, line 65 * * column 5, lines 14,15 *;
		[A]US5223584 (LENKE GERD M [US], et al) [A] 1-7 * abstract * * column 2, lines 38-58 * * column 7, line 23 - column 13, line 50 *;
		[A]US5576398 (TAKAHASHI MASAYUKI [JP], et al) [A] 1,3-7 * abstract * * column 2, line 43 - column 4, line 22 * * column 8, line 5 - column 10, line 45 *;
		[A]EP0803897 (NISSHIN SPINNING [JP]) [A] 1,10-12 * abstract * * page 1, line 55 - page 2, line 49; figures 1,5 *;
		[A]EP0928825 (NISSHIN SPINNING [JP]) [A] 1-7 * abstract * * paragraphs [0014] - [0037] *;
		[A]EP0943642 (NISSHIN SPINNING [JP]) [A] 1* paragraphs [0001] , [0049] *;
		[X]US2002043335 (YAMAGUCHI AKIRA [JP], et al) [X] 1-12 * the whole document * * paragraphs [0014] - [0059]; figure 1; example 8; claims 1-6 *
		[A] - PATENT ABSTRACTS OF JAPAN, (20010205), vol. 2000, no. 13, & JP2000290468 A 20001017 (SUMITOMO BAKELITE CO LTD) [A] 1-7 * abstract * * paragraphs [0008] - [0017] *
		[A] - PATENT ABSTRACTS OF JAPAN, (19940421), vol. 018, no. 222, Database accession no. (C - 1193), & JP06016907 A 19940125 (NISSHINBO IND INC;OTHERS: 01) [A] 1,2,6 * abstract * * paragraphs [0001] , [0009] , [0014] , [0023] *
		[A] - PATENT ABSTRACTS OF JAPAN, (19980130), vol. 1998, no. 01, & JP09241353 A 19970916 (JAPAN SYNTHETIC RUBBER CO LTD) [A] 1-7 * abstract * * paragraphs [0005] - [0008] - [0010] , [0013] *

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