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EP1361604
European procedure
Extract from the Register of European Patents
EP About this file: EP1361604
| EP1361604 - DEVICE AND METHOD FOR TREATMENT [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 22.01.2010 Database last updated on 15.11.2024 | Most recent event Tooltip | 04.03.2011 | Lapse of the patent in a contracting state | published on 06.04.2011 [2011/14] | Applicant(s) | For all designated states TOKYO ELECTRON LIMITED 3-6 Akasaka, 5-chome, Minato-ku Tokyo 107-8481 / JP | [2009/12] |
| Former [2003/46] | For all designated states Tokyo Electron Limited 3-6 Akasaka, 5-chome, Minato-ku Tokyo 107-8481 / JP | Inventor(s) | 01 /
KATO, Yoshihiro, c/o Tokyo Electron AT Limited 2-41, Machiya 1-chome, Shiroyama-machi Tsukui-gun, Kanagawa 220-0101 / JP | 02 /
GOTO, Tadashi, c/o Tokyo Electron EE Limited 2-41, Machiya 1-chome, Shiroyama-machi Tsukui-gun, Kanagawa 220-0101 / JP | 03 /
YOSHITAKA, Hikaru, c/o Tokyo Electron AT Limited 2-41, Machiya 1-chome, Shiroyama-machi Tsukui-gun, Kanagawa 220-0101 / JP | 04 /
AOKI, Makoto, c/o Tokyo Electron AT Limited 2-41, Machiya 1-chome, Shiroyama-machi Tsukui-gun, Kanagawa 220-0101 / JP | [2003/46] | Representative(s) | Liesegang, Eva Boehmert & Boehmert Anwaltspartnerschaft mbB Pettenkoferstrasse 22 80336 München / DE | [N/P] |
| Former [2003/46] | Liesegang, Eva Forrester & Boehmert, Pettenkoferstrasse 20-22 80336 München / DE | Application number, filing date | 02716335.1 | 22.01.2002 | [2003/46] | WO2002JP00429 | Priority number, date | JP20010013570 | 22.01.2001 Original published format: JP 2001013570 | JP20010014011 | 23.01.2001 Original published format: JP 2001014011 | [2003/46] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO02058126 | Date: | 25.07.2002 | Language: | EN | [2002/30] | Type: | A1 Application with search report | No.: | EP1361604 | Date: | 12.11.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 25.07.2002 takes the place of the publication of the European patent application. | [2003/46] | Type: | B1 Patent specification | No.: | EP1361604 | Date: | 18.03.2009 | Language: | EN | [2009/12] | Search report(s) | International search report - published on: | JP | 25.07.2002 | (Supplementary) European search report - dispatched on: | EP | 07.11.2005 | Classification | IPC: | C23C16/455, H01J37/32 | [2005/51] | CPC: |
C23C16/45565 (EP,US);
H01L21/31 (KR);
C23C16/455 (EP,US);
H01J37/3244 (EP,US)
|
| Former IPC [2003/46] | H01L21/31 | Designated contracting states | DE, FR, GB, IT [2008/43] |
| Former [2003/46] | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | EINRICHTUNG UND VERFAHREN ZUR BEHANDLUNG | [2003/46] | English: | DEVICE AND METHOD FOR TREATMENT | [2003/46] | French: | DISPOSITIF ET PROCEDE DE TRAITEMENT | [2003/46] | Entry into regional phase | 22.07.2003 | Translation filed | 22.07.2003 | National basic fee paid | 22.07.2003 | Search fee paid | 22.07.2003 | Designation fee(s) paid | 22.07.2003 | Examination fee paid | Examination procedure | 07.08.2002 | Request for preliminary examination filed International Preliminary Examining Authority: JP | 22.07.2003 | Examination requested [2003/46] | 01.03.2007 | Despatch of a communication from the examining division (Time limit: M04) | 11.07.2007 | Reply to a communication from the examining division | 26.09.2008 | Communication of intention to grant the patent | 26.01.2009 | Fee for grant paid | 26.01.2009 | Fee for publishing/printing paid | Opposition(s) | 21.12.2009 | No opposition filed within time limit [2010/08] | Fees paid | Renewal fee | 22.07.2003 | Renewal fee patent year 03 | 12.01.2005 | Renewal fee patent year 04 | 12.01.2006 | Renewal fee patent year 05 | 12.01.2007 | Renewal fee patent year 06 | 14.01.2008 | Renewal fee patent year 07 | 14.01.2009 | Renewal fee patent year 08 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | IT | 18.03.2009 | [2011/14] | Documents cited: | Search | [X]US5595606 (FUJIKAWA YUICHIRO [JP], et al) [X] 1-12 * column 5, line 41 - column 6, line 54; figures 2,4-6 *; | [X]US6086677 (UMOTOY SALVADOR P [US], et al) [X] 1-12 * page 6, line 65 - page 7, line 60; figures 10-12 *; | [X]US6148761 (MAJEWSKI ROBERT [US], et al) [X] 1-12 * column 7, lines 17-55; figures 8,9 *; | [X]WO0103159 (LAM RES CORP [US], et al) [X] 1-12 * page 8, line 6 - page 11, line 16; figures 4-6 *; | [XP]WO0161071 (AIXTRON AG [DE], et al) [XP] 1-12 * page 13, line 438 - page 14, line 490; figure 2 *; | [XP]EP1134789 (APPLIED MATERIALS INC [US]) [XP] 1-12 * column 4, line 55 - column 5, line 31 * * column 7, line 41 - column 8, line 34 * * figures 1,10,12 *; | [E]WO0223964 (APPLIED MATERIALS INC [US]) [E] 1-12* page 16, line 10 - page 17, line 4; figure 10b * | International search | [X]JPH04237123 (ANELVA CORP) |