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Extract from the Register of European Patents

EP About this file: EP1368825

EP1368825 - RUTHENIUM SILICIDE PROCESSING METHODS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  13.11.2009
Database last updated on 31.08.2024
Most recent event   Tooltip07.10.2011Lapse of the patent in a contracting state
New state(s): CY, TR		published on 09.11.2011  [2011/45]
Applicant(s)For all designated states
Micron Technology, Inc.
8000 South Federal Way
Boise, ID 83716 / US
[2009/02]
Former [2003/50]For all designated states
Micron Technology, Inc.
8000 South Federal Way
Boise, ID 83716 / US
Inventor(s)01 / ANDREAS, Michael, T.
1400 Hill Road
Boise, ID 83702 / US
02 / MORGAN, Paul, A.
12768 S. Cloverdale Road
Kuna, ID 83634 / US
 [2003/50]
Representative(s)Somervell, Thomas Richard, et al
Marks & Clerk LLP
Alpha Tower
Suffolk Street
Queensway
Birmingham B1 1TT / GB
[N/P]
Former [2009/16]Somervell, Thomas Richard, et al
Marks & Clerk LLP Alpha Tower Suffolk Street Queensway Birmingham
B1 1TT / GB
Former [2003/50]Carpenter, David
MARKS & CLERK, Alpha Tower, Suffolk Street Queensway
Birmingham B1 1TT / GB
Application number, filing date02717625.411.03.2002
[2003/50]
WO2002US07648
Priority number, dateUS2001081000815.03.2001         Original published format: US 810008
[2003/50]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO02075803
Date:26.09.2002
Language:EN
[2002/39]
Type: A2 Application without search report 
No.:EP1368825
Date:10.12.2003
Language:EN
The application published by WIPO in one of the EPO official languages on 26.09.2002 takes the place of the publication of the European patent application.
[2003/50]
Type: B1 Patent specification 
No.:EP1368825
Date:07.01.2009
Language:EN
[2009/02]
Search report(s)International search report - published on:EP01.05.2003
ClassificationIPC:H01L21/3205
[2003/50]
CPC:
H01L21/32053 (EP,US); H01L21/3205 (KR); H01L21/0209 (EP,US);
H01L21/28556 (EP,US); H01L21/32134 (EP,US)
Designated contracting statesAT,   BE,   CH,   CY,   DE,   DK,   ES,   FI,   FR,   GB,   GR,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   SE,   TR [2003/50]
Extension statesALNot yet paid
LTNot yet paid
LVNot yet paid
MKNot yet paid
RONot yet paid
SINot yet paid
TitleGerman:VERFAHREN ZUM VERARBEITEN VON RUTHENIUMSILIZID[2003/50]
English:RUTHENIUM SILICIDE PROCESSING METHODS[2003/50]
French:PROCEDES DE TRAITEMENT DE SILICIURE DE RUTHENIUM[2003/50]
Entry into regional phase14.08.2003National basic fee paid 
14.08.2003Designation fee(s) paid 
14.08.2003Examination fee paid 
Examination procedure02.10.2002Request for preliminary examination filed
International Preliminary Examining Authority: US
14.08.2003Examination requested  [2003/50]
30.06.2006Despatch of a communication from the examining division (Time limit: M06)
14.12.2006Reply to a communication from the examining division
31.07.2008Communication of intention to grant the patent
21.11.2008Fee for grant paid
21.11.2008Fee for publishing/printing paid
Opposition(s)08.10.2009No opposition filed within time limit [2009/51]
Fees paidRenewal fee
15.03.2004Renewal fee patent year 03
14.03.2005Renewal fee patent year 04
09.03.2006Renewal fee patent year 05
14.03.2007Renewal fee patent year 06
14.03.2008Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAT07.01.2009
BE07.01.2009
CY07.01.2009
DK07.01.2009
FI07.01.2009
NL07.01.2009
TR07.01.2009
IE11.03.2009
LU11.03.2009
CH31.03.2009
LI31.03.2009
MC31.03.2009
SE07.04.2009
GR08.04.2009
ES18.04.2009
PT08.06.2009
[2011/44]
Former [2011/21]AT07.01.2009
BE07.01.2009
DK07.01.2009
FI07.01.2009
NL07.01.2009
IE11.03.2009
LU11.03.2009
CH31.03.2009
LI31.03.2009
MC31.03.2009
SE07.04.2009
GR08.04.2009
ES18.04.2009
PT08.06.2009
Former [2010/47]AT07.01.2009
BE07.01.2009
DK07.01.2009
FI07.01.2009
NL07.01.2009
IE11.03.2009
CH31.03.2009
LI31.03.2009
MC31.03.2009
SE07.04.2009
GR08.04.2009
ES18.04.2009
PT08.06.2009
Former [2010/08]AT07.01.2009
BE07.01.2009
DK07.01.2009
FI07.01.2009
NL07.01.2009
IE11.03.2009
CH31.03.2009
LI31.03.2009
MC31.03.2009
SE07.04.2009
ES18.04.2009
PT08.06.2009
Former [2010/07]AT07.01.2009
BE07.01.2009
DK07.01.2009
FI07.01.2009
NL07.01.2009
IE11.03.2009
MC31.03.2009
SE07.04.2009
ES18.04.2009
PT08.06.2009
Former [2009/47]AT07.01.2009
BE07.01.2009
DK07.01.2009
FI07.01.2009
NL07.01.2009
MC31.03.2009
SE07.04.2009
ES18.04.2009
PT08.06.2009
Former [2009/46]AT07.01.2009
BE07.01.2009
DK07.01.2009
FI07.01.2009
NL07.01.2009
SE07.04.2009
ES18.04.2009
PT08.06.2009
Former [2009/43]AT07.01.2009
BE07.01.2009
FI07.01.2009
NL07.01.2009
SE07.04.2009
ES18.04.2009
PT08.06.2009
Former [2009/40]AT07.01.2009
FI07.01.2009
NL07.01.2009
SE07.04.2009
ES18.04.2009
PT08.06.2009
Former [2009/38]FI07.01.2009
NL07.01.2009
SE07.04.2009
ES18.04.2009
PT08.06.2009
Former [2009/33]NL07.01.2009
ES18.04.2009
Former [2009/26]NL07.01.2009
Cited inInternational search[DA]US6197628  (VAARTSTRA BRIAN A [US], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.