EP1368825 - RUTHENIUM SILICIDE PROCESSING METHODS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 13.11.2009 Database last updated on 31.08.2024 | Most recent event Tooltip | 07.10.2011 | Lapse of the patent in a contracting state New state(s): CY, TR | published on 09.11.2011 [2011/45] | Applicant(s) | For all designated states Micron Technology, Inc. 8000 South Federal Way Boise, ID 83716 / US | [2009/02] |
Former [2003/50] | For all designated states Micron Technology, Inc. 8000 South Federal Way Boise, ID 83716 / US | Inventor(s) | 01 /
ANDREAS, Michael, T. 1400 Hill Road Boise, ID 83702 / US | 02 /
MORGAN, Paul, A. 12768 S. Cloverdale Road Kuna, ID 83634 / US | [2003/50] | Representative(s) | Somervell, Thomas Richard, et al Marks & Clerk LLP Alpha Tower Suffolk Street Queensway Birmingham B1 1TT / GB | [N/P] |
Former [2009/16] | Somervell, Thomas Richard, et al Marks & Clerk LLP Alpha Tower Suffolk Street Queensway Birmingham B1 1TT / GB | ||
Former [2003/50] | Carpenter, David MARKS & CLERK, Alpha Tower, Suffolk Street Queensway Birmingham B1 1TT / GB | Application number, filing date | 02717625.4 | 11.03.2002 | [2003/50] | WO2002US07648 | Priority number, date | US20010810008 | 15.03.2001 Original published format: US 810008 | [2003/50] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO02075803 | Date: | 26.09.2002 | Language: | EN | [2002/39] | Type: | A2 Application without search report | No.: | EP1368825 | Date: | 10.12.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.09.2002 takes the place of the publication of the European patent application. | [2003/50] | Type: | B1 Patent specification | No.: | EP1368825 | Date: | 07.01.2009 | Language: | EN | [2009/02] | Search report(s) | International search report - published on: | EP | 01.05.2003 | Classification | IPC: | H01L21/3205 | [2003/50] | CPC: |
H01L21/32053 (EP,US);
H01L21/3205 (KR);
H01L21/0209 (EP,US);
H01L21/28556 (EP,US);
H01L21/32134 (EP,US)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2003/50] | Extension states | AL | Not yet paid | LT | Not yet paid | LV | Not yet paid | MK | Not yet paid | RO | Not yet paid | SI | Not yet paid | Title | German: | VERFAHREN ZUM VERARBEITEN VON RUTHENIUMSILIZID | [2003/50] | English: | RUTHENIUM SILICIDE PROCESSING METHODS | [2003/50] | French: | PROCEDES DE TRAITEMENT DE SILICIURE DE RUTHENIUM | [2003/50] | Entry into regional phase | 14.08.2003 | National basic fee paid | 14.08.2003 | Designation fee(s) paid | 14.08.2003 | Examination fee paid | Examination procedure | 02.10.2002 | Request for preliminary examination filed International Preliminary Examining Authority: US | 14.08.2003 | Examination requested [2003/50] | 30.06.2006 | Despatch of a communication from the examining division (Time limit: M06) | 14.12.2006 | Reply to a communication from the examining division | 31.07.2008 | Communication of intention to grant the patent | 21.11.2008 | Fee for grant paid | 21.11.2008 | Fee for publishing/printing paid | Opposition(s) | 08.10.2009 | No opposition filed within time limit [2009/51] | Fees paid | Renewal fee | 15.03.2004 | Renewal fee patent year 03 | 14.03.2005 | Renewal fee patent year 04 | 09.03.2006 | Renewal fee patent year 05 | 14.03.2007 | Renewal fee patent year 06 | 14.03.2008 | Renewal fee patent year 07 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 07.01.2009 | BE | 07.01.2009 | CY | 07.01.2009 | DK | 07.01.2009 | FI | 07.01.2009 | NL | 07.01.2009 | TR | 07.01.2009 | IE | 11.03.2009 | LU | 11.03.2009 | CH | 31.03.2009 | LI | 31.03.2009 | MC | 31.03.2009 | SE | 07.04.2009 | GR | 08.04.2009 | ES | 18.04.2009 | PT | 08.06.2009 | [2011/44] |
Former [2011/21] | AT | 07.01.2009 | |
BE | 07.01.2009 | ||
DK | 07.01.2009 | ||
FI | 07.01.2009 | ||
NL | 07.01.2009 | ||
IE | 11.03.2009 | ||
LU | 11.03.2009 | ||
CH | 31.03.2009 | ||
LI | 31.03.2009 | ||
MC | 31.03.2009 | ||
SE | 07.04.2009 | ||
GR | 08.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2010/47] | AT | 07.01.2009 | |
BE | 07.01.2009 | ||
DK | 07.01.2009 | ||
FI | 07.01.2009 | ||
NL | 07.01.2009 | ||
IE | 11.03.2009 | ||
CH | 31.03.2009 | ||
LI | 31.03.2009 | ||
MC | 31.03.2009 | ||
SE | 07.04.2009 | ||
GR | 08.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2010/08] | AT | 07.01.2009 | |
BE | 07.01.2009 | ||
DK | 07.01.2009 | ||
FI | 07.01.2009 | ||
NL | 07.01.2009 | ||
IE | 11.03.2009 | ||
CH | 31.03.2009 | ||
LI | 31.03.2009 | ||
MC | 31.03.2009 | ||
SE | 07.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2010/07] | AT | 07.01.2009 | |
BE | 07.01.2009 | ||
DK | 07.01.2009 | ||
FI | 07.01.2009 | ||
NL | 07.01.2009 | ||
IE | 11.03.2009 | ||
MC | 31.03.2009 | ||
SE | 07.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2009/47] | AT | 07.01.2009 | |
BE | 07.01.2009 | ||
DK | 07.01.2009 | ||
FI | 07.01.2009 | ||
NL | 07.01.2009 | ||
MC | 31.03.2009 | ||
SE | 07.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2009/46] | AT | 07.01.2009 | |
BE | 07.01.2009 | ||
DK | 07.01.2009 | ||
FI | 07.01.2009 | ||
NL | 07.01.2009 | ||
SE | 07.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2009/43] | AT | 07.01.2009 | |
BE | 07.01.2009 | ||
FI | 07.01.2009 | ||
NL | 07.01.2009 | ||
SE | 07.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2009/40] | AT | 07.01.2009 | |
FI | 07.01.2009 | ||
NL | 07.01.2009 | ||
SE | 07.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2009/38] | FI | 07.01.2009 | |
NL | 07.01.2009 | ||
SE | 07.04.2009 | ||
ES | 18.04.2009 | ||
PT | 08.06.2009 | ||
Former [2009/33] | NL | 07.01.2009 | |
ES | 18.04.2009 | ||
Former [2009/26] | NL | 07.01.2009 | Cited in | International search | [DA]US6197628 (VAARTSTRA BRIAN A [US], et al) |