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EP1317766
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EP About this file: EP1317766
| EP1317766 - ULTRA FAST RAPID THERMAL PROCESSING CHAMBER AND METHOD OF USE [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 03.06.2005 Database last updated on 06.07.2024 | Most recent event Tooltip | 03.06.2005 | Withdrawal of application | published on 20.07.2005 [2005/29] | Applicant(s) | For all designated states Hitachi Kokusai Electric Inc. 3-14-20 Higashi-Nakano Nakano-ku Tokyo 164-8511 / JP | [N/P] |
| Former [2003/24] | For all designated states HITACHI KOKUSAI ELECTRIC INC. 3-14-20 Higashi-Nakano, Nakano-ku Tokyo 164-8511 / JP | Inventor(s) | 01 /
MAHAWILI, Imad 3731 Oakmont, S.E. Grand Rapids, MI 49546 / US | [2003/24] | Representative(s) | Boyce, Conor, et al FRKelly 27 Clyde Road Ballsbridge Dublin 4 / IE | [N/P] |
| Former [2003/24] | Boyce, Conor, et al F. R. Kelly & Co., 27 Clyde Road, Ballsbridge Dublin 4 / IE | Application number, filing date | 02720958.4 | 12.02.2002 | [2003/24] | WO2002US04180 | Priority number, date | US20010268340P | 12.02.2001 Original published format: US 268340 P | [2003/24] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO02065514 | Date: | 22.08.2002 | Language: | EN | [2002/34] | Type: | A1 Application with search report | No.: | EP1317766 | Date: | 11.06.2003 | Language: | EN | The application published by WIPO in one of the EPO official languages on 22.08.2002 takes the place of the publication of the European patent application. | [2003/24] | Search report(s) | International search report - published on: | EP | 22.08.2002 | Classification | IPC: | H01L21/00 | [2003/24] | CPC: |
H01L21/67115 (EP,US);
H01L21/324 (KR)
| Designated contracting states | AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE, TR [2003/24] | Title | German: | ULTRASCHNELLE WÄRMEBEHANDLUNGSKAMMER UND ANWENDUNGSVERFAHREN | [2003/24] | English: | ULTRA FAST RAPID THERMAL PROCESSING CHAMBER AND METHOD OF USE | [2003/24] | French: | CHAMBRE DE TRAITEMENT THERMIQUE ULTRA-RAPIDE ET PROCEDE D'UTILISATION | [2003/24] | Entry into regional phase | 21.03.2003 | National basic fee paid | 21.03.2003 | Designation fee(s) paid | 21.03.2003 | Examination fee paid | Examination procedure | 28.06.2002 | Request for preliminary examination filed International Preliminary Examining Authority: US | 25.11.2002 | Amendment by applicant (claims and/or description) | 21.03.2003 | Examination requested [2003/24] | 23.05.2005 | Application withdrawn by applicant [2005/29] | Fees paid | Renewal fee | 04.02.2004 | Renewal fee patent year 03 | 28.02.2005 | Renewal fee patent year 04 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [XAY]US4649261 (SHEETS RONALD E [US]) [X] 1,2,4,17,38,46,48-50 * the whole document * [A] 10,28,43 [Y] 5-8,18-20,22,34-37,39-41; | [DYA]US5951896 (MAHAWILI IMAD [US]) [DY] 5-8 * abstract * * column 5, lines 15-42 * [A] 1,17,34,38; | [YDA]US5814365 (MAHAWILI IMAD [US]) [YD] 18-20,22,34-37,39-41 * column 5, lines 40-48 * [A] 1,17,24-26,28-30,38 |